JPS63200326U - - Google Patents
Info
- Publication number
- JPS63200326U JPS63200326U JP1987090564U JP9056487U JPS63200326U JP S63200326 U JPS63200326 U JP S63200326U JP 1987090564 U JP1987090564 U JP 1987090564U JP 9056487 U JP9056487 U JP 9056487U JP S63200326 U JPS63200326 U JP S63200326U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- semiconductor device
- device manufacturing
- wafer
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案に係る常圧化学気相成長装置の
ウエーハアンローデイング部を示す概略図、第２
図は従来の常圧化学気相成長装置のウエーハアン
ローデイング部を示す概略図である。
１……ベルヌーイチヤツク、２……エアー遮断
バルブ、３……センサー、４……ウエーハ、５…
…トレイ、６……アンローダステージ、７……キ
ヤリア。
Fig. 1 is a schematic diagram showing the wafer unloading section of the atmospheric pressure chemical vapor deposition apparatus according to the present invention;
The figure is a schematic diagram showing a wafer unloading section of a conventional atmospheric pressure chemical vapor deposition apparatus. 1... Bernoulli check, 2... Air cutoff valve, 3... Sensor, 4... Wafer, 5...
...Tray, 6...Unloader stage, 7...Carrier.
Claims (1)
装置において、アンローデイング時にウエーハを
搬送するベルヌーイチヤツクに、ウエーハの有無
を感知するセンサーと、該センサーに連動して開
閉するエアー遮断バルブとを有することを特徴と
する半導体素子製造装置。 In an atmospheric pressure chemical vapor deposition apparatus used in semiconductor device manufacturing, a Bernoulli chuck that transports a wafer during unloading has a sensor that detects the presence or absence of a wafer, and an air cutoff valve that opens and closes in conjunction with the sensor. A semiconductor device manufacturing apparatus characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987090564U JPS63200326U (en) | 1987-06-12 | 1987-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987090564U JPS63200326U (en) | 1987-06-12 | 1987-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200326U true JPS63200326U (en) | 1988-12-23 |
Family
ID=30950545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987090564U Pending JPS63200326U (en) | 1987-06-12 | 1987-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200326U (en) |
-
1987
- 1987-06-12 JP JP1987090564U patent/JPS63200326U/ja active Pending