JPS6183145U - - Google Patents

Info

Publication number
JPS6183145U
JPS6183145U JP16754084U JP16754084U JPS6183145U JP S6183145 U JPS6183145 U JP S6183145U JP 16754084 U JP16754084 U JP 16754084U JP 16754084 U JP16754084 U JP 16754084U JP S6183145 U JPS6183145 U JP S6183145U
Authority
JP
Japan
Prior art keywords
arm
cam
rotary cam
cam groove
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16754084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042435Y2 (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16754084U priority Critical patent/JPH042435Y2/ja
Publication of JPS6183145U publication Critical patent/JPS6183145U/ja
Application granted granted Critical
Publication of JPH042435Y2 publication Critical patent/JPH042435Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
JP16754084U 1984-11-05 1984-11-05 Expired JPH042435Y2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16754084U JPH042435Y2 ( ) 1984-11-05 1984-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16754084U JPH042435Y2 ( ) 1984-11-05 1984-11-05

Publications (2)

Publication Number Publication Date
JPS6183145U true JPS6183145U ( ) 1986-06-02
JPH042435Y2 JPH042435Y2 ( ) 1992-01-28

Family

ID=30725333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16754084U Expired JPH042435Y2 ( ) 1984-11-05 1984-11-05

Country Status (1)

Country Link
JP (1) JPH042435Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005515620A (ja) * 2002-01-15 2005-05-26 エンテグリス・インコーポレーテッド ウエハ搬送装置の扉および掛止機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005515620A (ja) * 2002-01-15 2005-05-26 エンテグリス・インコーポレーテッド ウエハ搬送装置の扉および掛止機構

Also Published As

Publication number Publication date
JPH042435Y2 ( ) 1992-01-28

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