JPS6183932A - Multipoint sampling apparatus for gas - Google Patents

Abstract

PURPOSE:To enable a highly accurate measurement, by providing a suction gas passage system simply and linearly. CONSTITUTION:This apparatus is equipped with a turntable 5, a sampling side suction port 10, a selective communication mechanism 11 and the like. Then, with the step operation of a pulse motor 18, the communication mechanism 11 is turned to be positioned concentric with the 1 side of the suction port 10 and then, a more accurate correction is done with the corresponding of a proximity sensor 19 to a positioning hole 20 while a solenoid 16 is electrically energized and excited to lift a pilot member 12, making a communication hole 14 continue to the 1 side of a port 10. At this point, an inner hollow section 7 is sucked with an exhaust pump so that gas to be measured is sucked to the internal end of the port 10 to be fed into a measuring device through a measuring machine side port 15. On the other hand, with the demagnetization of the solenoid 16, the member 12 is lowered and a motor 18 is driven with a circular lip 13a of a U-shaped packing 13 separated from the undersurface of a support plate 1a and thus, there is no slide friction between both parts thereby enabling accurate measurement.

Description

[Detailed description of the invention] [Industrial application field] The present invention is a control technology for industrial clean rooms.

−・Ventilation control and abnormal field detection in general buildings and multiple
This article relates to a gas multi-point sampling device related to the time-lapse measurement technology of diffused gas sampling, etc., and for example, when measuring the C degree of particulates in a clean room at multiple points, it is necessary to provide a device that automatically switches the measurement points. do. It is something.

[Conventional technology]

Conventionally, this type of multi-point sampling device connects a large number of points to be measured and one sampling suction port of the measuring device via a branch joint, and inserts a solenoid valve in each branch side passage. Fixed points were being switched.

[Problem that the invention seeks to solve]

In the conventional configuration described in L, when switching suction at each measured point,
Due to the small orifice diameter of the solenoid valve and the complicated gas flow path, dust etc. in the sucked gas tends to settle, accumulate, and re-splatter in the middle of the valve. Although it was difficult to measure, in order to make the orifice diameter larger, the valve itself would have to be larger, making the entire device larger, and the internal structure of the valve related to the gas flow path would have to be changed. This is extremely difficult.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to improve the accuracy of measured values by simplifying the gas flow path in the switching device, making it a linear structure, and increasing the aperture.

[Level-L for solving problems]

In order to achieve the above object, the present invention has a plurality of sampling-side suction ports opened at equi-eccentric positions of the main body, and a rotary table that is axially installed with respect to the main body. A selective communication mechanism is provided for advancing and retracting to connect or disconnect the measuring instrument side boat, the rotary table is driven to rotate in steps by a pulse motor, and an inner cavity formed by the main body and the rotary table and containing the selective communication mechanism is provided. This is a multi-point gas pump device that communicates with each other through exhaust ports.The selective communication mechanism has a structure in which a communication hole is bored in the axis of a pilot member that slides when excited by a solenoid. .

[For production]

The device of the present invention rotates a pulse motor step by step, and sequentially disposes a selection communication mechanism to a plurality of sampling-side suction ports.A sampling device side boat, which is integrated by retracting a of the selection communication mechanism, is connected to the sampler side indicated by L. It communicates with one of the side suction ports, and is always in exhaust communication with the remaining sampling side suction ports that do not communicate with the measuring instrument side boat via the exhaust port.

〔Example〕

Hereinafter, one embodiment of the present invention will be explained according to the drawings! +1
Then, Fig. 1 shows 11= of the gas multi-point sampling device.
FIG. The main body (1) has a cylindrical peripheral wall (1b) on the smooth upper surface of the base part (1a), and a po-Z part (lc) in the center of the "-" surface.
A shaft hole (2) is formed in the axial center of the boss portion (lc), and a bearing member (3) is inserted into the Ihh hole (2) from the north end to the circumference 11. A shaft (4) penetrating through the inside of (Ib) is rotatably installed. Reference numeral (5) denotes a rotary table which is fastened to the lower end of the shaft (4) by means of a nut, and the cylindrical peripheral wall (lb) is rotated through a spacer (6) fitted onto the shaft (4). It is located inside, and the outer periphery is a cylindrical peripheral wall (l
b), which is rotatable in close proximity to the main body (+) and a rotary table (5), forming an inner cavity (7) surrounded by the main body (+) and the rotary table (5); 4), a plurality of small holes (8) (
8)... are equally spaced at equal angles, and a tube connecting pipe (8) is connected and fixed to the upper end of each of the small holes (8) to form a sampling side suction port (lo). In addition, on the - side of the rotary table (5) marked L, there is one selection J at the same position as the eccentricity f)'I of the sampling side suction port (10) marked 1-.
! It constitutes a one-way mechanism (11), and (12) is connected to a sleeve (27) that is airtightly fitted from the bottom side into the mounting hole (5a) drilled in the rotary table (5). It is a pilot member in which a cylindrical part (12a) is inserted and supported so as to be slidable in the same direction as the shaft (4), and the north shaft part (+2b) protruding from the upper end of the pilot member (12) has the support. An annular lip (13) that comes into close contact with the inner surface of the board (la)
a) into which the U-shaped gasket (13) is fitted;
A communication hole (1) is provided along the entire length of the pilot member (12).
4), and a tube connection stepped portion (12c) is formed at the lower end to form a measuring device side date (15). Sign (1
6) is a solenoid fixed to the side surface of the inner cavity (7) of the L rotary table (5) by being inserted externally into the pilot member (12), and the solenoid (16) is During energization, the upper member (12) of the pyro slides upward, and the annular lip (13a) of the U-shaped seal (13) comes into close contact with the lower surface of the support plate (Ia), and during non-seasonal demagnetization, the pyro and upper member (12) slide upward. In addition, a pulse motor (
18) is fixedly installed, and the output shaft (1
8a) is rotatably connected to the upper end of the shaft (4), and the step of the pulse motor (18) is adapted to the sampling side suction boat (10), and iij
A proximity sensor (
19) is fixedly installed, and a 1111 mark 41! is attached to the cylindrical peripheral wall (1b) corresponding to the proximity sensor (19). I machine side boat (1
A positioning hole (20) is bored at a position where the axes of the sampling side suction boat (10) and the sampling side suction boat (10) are aligned with each other.

A part of the cylindrical peripheral wall (tb) is provided with an exhaust port (2+) that communicates with the inner cavity (7), (22)
is a flexible tube for connecting to a total of 6I1 machines.

As shown in the block diagram of Fig. 2, the gas multi-point sampling device (A) having the above configuration is constructed using a flexible tube (
22) Connect the other end to a 41 constant device (such as a particle counter).
After connecting the suction boat (23) and the exhaust port (2+) to the exhaust pump (24), for example, connect multiple points (J, R2...-R,) in the clean room (25) to the
When using l fixed points, the six measured points (R1゜R2...R
n) and each port of the sampling side suction boat (10) of the multi-point sampling device M (A)) (PI, P2φ...Pn
) through a sampling tube (26).

That is, the selection fF communication structure (11) is connected to the sampling side suction boat (10) by the step of the pulse motor (18).
), the solenoid (16)
is energized and energized to raise the pilot member (12) and connect the communication hole (14) to the sampling side suction port (1).
Consecutive with one of 0). At this time, the inner cavity (7) is constantly suctioned by the exhaust pump (24), and each sampling side suction port (10) has a clean room (25) up to the inner end.
The wave meter 411 gas is inhaled, and is immediately sucked into the measuring device (23) via the measuring device side bow 1z (15).

After the gas inside the device is allowed to flow for a certain period of time in the state shown in H, the measurement is completed, and the device is connected to the attached system and scanned repeatedly.
is demagnetized, the pyro and the upper member (12) fall under their own weight, and the pulse motor (!8
) is now driven, so there is no sliding friction between them.

Therefore, wear and dust generation of the U-shaped gasket (13) are suppressed, and accurate measurement becomes possible.

〔Effect of the invention〕

As described above, the gas multi-point sampling device of the present invention has a simple and linear flow path system for the suction gas, so there is no accumulation, sedimentation, or re-scattering of substances in the gas, and high precision is achieved. In addition, since there are no sliding parts in the flow path of the device, there is no dust generation in the device, which improves the reliability of measurements.Also, a constant exhaust pump eliminates the need for tubes in the entire system. Since the inside of the device is suctioned, there is not only little time delay in measurement, but also the device of the present invention can use a commonly used particle counter as a measuring device.Furthermore, since it is driven by a microcomputer, it is highly reliable and can be used for unmanned measurement. It has the characteristics that it is possible to

[Brief explanation of drawings]

Fig. 1 is a front sectional view showing an embodiment of the gas multi-point sampling device according to the present invention, Fig. 2 is a block diagram showing an example of the use of the device, and Fig. 3 is a schematic view of the device with the selective communication mechanism disengaged. FIG. (A) Multi-point sampling 9 positions (1) Main body (4) Shaft (5) Rotary table (1O) Sampling side suction port (11) Selection communication mechanism (12) Pilot member (+
3) U-type packing (15) Total of 111 side boats (1
B) Solenoid (18) Pulse motor (19) Proximity sensor (20) Positioning hole (21) Exhaust port Patent applicant Fujita Kogyo Co., Ltd. Figure 1 i-7 2161

Claims (1)

[Claims] A main body is formed by opening a plurality of sampling-side suction ports at equidistant positions from the axis of a plate-shaped body having a cylindrical peripheral wall formed on the lower surface, and a body facing the plate-shaped body within the cylindrical peripheral wall. A rotary table pivotally attached to a pulse motor is rotatably installed, forming an inner cavity in which the sampling side suction port is opened, and a measurement is made to one of the sampling side suction ports with respect to the rotary table. A gas multi-point sampling device comprising a selective communication mechanism for driving a port on the machine side forward and backward to communicate or disconnect both ports, and having an exhaust port communicating with the inner cavity in the main body.