JPS6184554U - - Google Patents

Info

Publication number
JPS6184554U
JPS6184554U JP16799284U JP16799284U JPS6184554U JP S6184554 U JPS6184554 U JP S6184554U JP 16799284 U JP16799284 U JP 16799284U JP 16799284 U JP16799284 U JP 16799284U JP S6184554 U JPS6184554 U JP S6184554U
Authority
JP
Japan
Prior art keywords
detection part
heating
semiconductor sensor
organic solvent
excluding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16799284U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16799284U priority Critical patent/JPS6184554U/ja
Publication of JPS6184554U publication Critical patent/JPS6184554U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Description

【図面の簡単な説明】
図面は本考案の塩素系有機溶剤ガス用半導体セ
ンサの実施例を示すもので、第1図は検出部の断
面説明図、第2図は第1図の検出部を収納した筐
体の断面説明図、第3図は従来のこの種半導体セ
ンサの断面説明図である。 1:検出部、2:検出部加熱用電熱線、2
検出部加熱用ヒータ部、2,2:リード部、
4,4:被覆樹脂層、5,5:端子部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 検出部加熱用電熱線の検出部加熱ヒータ部を除
    く、検出部外に露出しているリード部及び端子部
    を樹脂で被覆したことを特徴とする塩素系有機溶
    剤ガス用半導体センサ。
JP16799284U 1984-11-07 1984-11-07 Pending JPS6184554U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16799284U JPS6184554U (ja) 1984-11-07 1984-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16799284U JPS6184554U (ja) 1984-11-07 1984-11-07

Publications (1)

Publication Number Publication Date
JPS6184554U true JPS6184554U (ja) 1986-06-04

Family

ID=30725777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16799284U Pending JPS6184554U (ja) 1984-11-07 1984-11-07

Country Status (1)

Country Link
JP (1) JPS6184554U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010175428A (ja) * 2009-01-30 2010-08-12 Konica Minolta Holdings Inc 有機溶媒ガス濃度の検出方法、有機溶媒ガス濃度の調整方法、有機溶媒ガス濃度検出装置及び有機デバイスの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010175428A (ja) * 2009-01-30 2010-08-12 Konica Minolta Holdings Inc 有機溶媒ガス濃度の検出方法、有機溶媒ガス濃度の調整方法、有機溶媒ガス濃度検出装置及び有機デバイスの製造方法

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