JPS6184835U - - Google Patents
Info
- Publication number
- JPS6184835U JPS6184835U JP17114284U JP17114284U JPS6184835U JP S6184835 U JPS6184835 U JP S6184835U JP 17114284 U JP17114284 U JP 17114284U JP 17114284 U JP17114284 U JP 17114284U JP S6184835 U JPS6184835 U JP S6184835U
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- chip
- temperature
- pressure
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図イは本考案の一実施例のセンサ部分を示
す斜視図、第１図ロは第１図イにおけるＡ矢視側
から見た側面図、第１図ハは第１図イに形成され
る歪ゲージの配置を示すゲージ配置図、第２図は
本考案における圧力変換器の全体構成を示す構成
図、第３図は本考案における歪ゲージの他の実施
例を示す構成図である。
１…基板、２…ゲージチツプ、３…歪検知穴、
４…ダイヤフラム、５…圧力導入孔、６…基準孔
、９…カンチレバー、Ｇ１〜Ｇ４，Ｇ５〜Ｇ８，
Ｇ９…歪ゲージ、ＧＲ，Ｇ′Ｒ…基準ゲージ、Ｇ
ｐ，Ｇ′ｐ…圧力ゲージ、ＧＴ…温度ゲージ、Ｅ
Ｓ…定電圧、Ｉｉ…定電流、ＥＲ，Ｅｐ，ＥＴ，
Ｅ０…出力電圧、ＯＳＣ…発振器、ＰＣＣ…演算
回路。
Fig. 1A is a perspective view showing the sensor portion of an embodiment of the present invention, Fig. 1B is a side view seen from the direction of arrow A in Fig. 1A, and Fig. 1C is the configuration shown in Fig. 1A. FIG. 2 is a configuration diagram showing the overall configuration of the pressure transducer according to the present invention, and FIG. 3 is a configuration diagram showing another embodiment of the strain gauge according to the present invention. . 1... Board, 2... Gauge chip, 3... Strain detection hole,
4...Diaphragm, 5...Pressure introduction hole, 6...Reference hole, 9...Cantilever, G1 to G4 , G5 to G8 ,
G 9 ...Strain gauge, G R , G'R... Reference gauge, G
p , G' p ...Pressure gauge, GT...Temperature gauge, E
S... constant voltage, I i ... constant current, ER, E p , ET,
E0 ...output voltage, OSC...oscillator, PCC...arithmetic circuit.
Claims (1)
上の歪ゲージを介して被測定圧力を検出する半導
体圧力変換器において、定電流源で駆動されて前
記被測定圧力に対応する歪に応答する前記ゲージ
チツプ上に形成された圧力ゲージと、定電流源で
駆動されて前記ゲージチツプの温度変化に応答す
る前記ゲージチツプ上に形成された温度ゲージと
、定電圧で駆動されてあらかじめ設定された所定
の基準応力に応答する前記ゲージチツプ上に形成
された基準ゲージと、前記圧力ゲージの出力Ｅｐ
と前記温度ゲージの出力ＥＴと前記基準ゲージの
出力ＥＲと基準温度での前記温度ゲージの出力Ｅ
Ｔ０と前記基準温度での前記基準ゲージの出力Ｅ
Ｒ０とを用いて実質的にＥｐ／（ＥＴＥＲ／ＥＴ
０ＥＲ０）なる演算を実行する演算手段とを具備
し、前記被測定圧力に対応した圧力信号を出力す
ることを特徴とする半導体圧力変換器。 In a semiconductor pressure transducer that has a semiconductor gauge chip and detects a pressure to be measured via a strain gauge on the gauge chip, a semiconductor pressure transducer is formed on the gauge chip that is driven by a constant current source and responds to a strain corresponding to the pressure to be measured. a temperature gauge formed on the gage chip that is driven by a constant current source and responds to temperature changes in the gage chip; and a temperature gauge formed on the gage chip that is driven by a constant voltage and responds to a preset predetermined reference stress. The reference gauge formed on the gauge chip and the output E p of the pressure gauge
and the output ET of the temperature gauge, the output ER of the reference gauge, and the output E of the temperature gauge at the reference temperature.
Output E of the reference gauge at T 0 and the reference temperature
R 0 and substantially E p /(ETER/ET
0 ER 0 ), and outputs a pressure signal corresponding to the pressure to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171142U JPH0514186Y2 (en) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171142U JPH0514186Y2 (en) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184835U true JPS6184835U (en) | 1986-06-04 |
| JPH0514186Y2 JPH0514186Y2 (en) | 1993-04-15 |
Family
ID=30728838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984171142U Expired - Lifetime JPH0514186Y2 (en) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514186Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006337147A (en) * | 2005-06-01 | 2006-12-14 | Denso Corp | Sensor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
-
1984
- 1984-11-12 JP JP1984171142U patent/JPH0514186Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5791431A (en) * | 1980-10-09 | 1982-06-07 | Gen Motors Corp | Double hollow pressure sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006337147A (en) * | 2005-06-01 | 2006-12-14 | Denso Corp | Sensor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514186Y2 (en) | 1993-04-15 |
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