JPH0269745U - - Google Patents
Info
- Publication number
- JPH0269745U JPH0269745U JP14869888U JP14869888U JPH0269745U JP H0269745 U JPH0269745 U JP H0269745U JP 14869888 U JP14869888 U JP 14869888U JP 14869888 U JP14869888 U JP 14869888U JP H0269745 U JPH0269745 U JP H0269745U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film membrane
- length
- deflection
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 14
- 239000012528 membrane Substances 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Description
第１図はこの考案の一実施例に係る薄膜の内部
応力・ヤング率測定装置の構成を示す概略構成図
、第２図ａは長方形薄膜メンブレンを含む試料の
形状を示す正面断面図、第２図ｂは長方形薄膜メ
ンブレンの形状を示す平面図、第３図は定数Ｃ１
の薄膜メンブレンの長辺短辺比ｎに対する特性を
示す特性図、第４図は定数Ｃ２のポアソン比依存
特性を示す特性図、第５図は正方形薄膜メンブレ
ンにおけるＣ２の値と長方形薄膜メンブレンにお
けるＣ２の値の比とポアソン比の関係を示す特性
図、第６図は被測定薄膜メンブレンの断面形状を
示す正面断面図である。
１０……薄膜メンブレン、１８……試料、２４
……圧力計（圧力検出手段）、４４……顕微鏡（
たわみ測定手段）、５４……真空ポンプ（圧力印
加手段）、５６……計算機（演算手段）、Ａ……
装着部。
FIG. 1 is a schematic configuration diagram showing the configuration of a thin film internal stress/Young's modulus measuring device according to an embodiment of the invention, FIG. 2a is a front sectional view showing the shape of a sample including a rectangular thin film membrane, and FIG. Figure b is a plan view showing the shape of a rectangular thin film membrane, and Figure 3 is a constant C1.
Figure 4 is a characteristic diagram showing the dependence of the constant C2 on Poisson's ratio, and Figure 5 shows the value of C2 in a square thin film membrane and C2 in a rectangular thin film membrane. FIG. 6 is a front sectional view showing the cross-sectional shape of the thin film membrane to be measured. 10... Thin film membrane, 18... Sample, 24
...Pressure gauge (pressure detection means), 44...Microscope (
deflection measuring means), 54... vacuum pump (pressure application means), 56... computer (calculating means), A...
Mounting part.
Claims (1)
に形成された被測定薄膜メンブレンを含む試料を
気密に装着する試料装着部と、 この試料装着部に装着された被測定薄膜メンブ
レンの表裏に圧力差を印加する圧力印加手段と、 この印加された圧力差を検出する圧力検出手段
と、 圧力差が印加された状態における被測定薄膜メ
ンブレンのたわみを測定するたわみ測定手段と、 圧力検出手段で得られた印加圧力値、たわみ測
定手段によつて得られたたわみ量および長方形の
薄膜メンブレンの短辺の長さに基づいて薄膜メン
ブレンの内部応力およびヤング率を算出する演算
部と、 この演算部によつて得られた演算結果を表示す
る出力手段と、 を有し、 長辺の長さが短辺の長さの２倍以上の長方形薄
膜メンブレンを利用して内部応力およびヤング率
を測定することを特徴とする薄膜の内部応力・ヤ
ング率測定装置。[Scope of Claim for Utility Model Registration] A sample mounting section for airtightly mounting a sample including a thin film membrane to be measured formed such that the length of the long side is at least twice the length of the short side; a pressure applying means for applying a pressure difference between the front and back sides of a thin film membrane to be measured attached to the part; a pressure detecting means for detecting the applied pressure difference; and a deflection of the thin film membrane to be measured in a state where the pressure difference is applied. and a deflection measuring means for measuring the internal stress of the thin film membrane based on the applied pressure value obtained by the pressure detecting means, the amount of deflection obtained by the deflection measuring means, and the length of the short side of the rectangular thin film membrane. A rectangular thin film membrane, the long side of which is at least twice the length of the short side, comprising: a calculation unit that calculates Young's modulus; and an output unit that displays the calculation results obtained by the calculation unit. A device for measuring internal stress and Young's modulus of a thin film, characterized by measuring internal stress and Young's modulus using .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14869888U JPH0543406Y2 (en) | 1988-11-15 | 1988-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14869888U JPH0543406Y2 (en) | 1988-11-15 | 1988-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0269745U true JPH0269745U (en) | 1990-05-28 |
| JPH0543406Y2 JPH0543406Y2 (en) | 1993-11-01 |
Family
ID=31420252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14869888U Expired - Lifetime JPH0543406Y2 (en) | 1988-11-15 | 1988-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543406Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6277024B2 (en) * | 2014-03-17 | 2018-02-07 | 三菱航空機株式会社 | Aircraft strength test apparatus and strength test method |
-
1988
- 1988-11-15 JP JP14869888U patent/JPH0543406Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543406Y2 (en) | 1993-11-01 |
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