JPS6186927U - - Google Patents
Info
- Publication number
- JPS6186927U JPS6186927U JP1984170340U JP17034084U JPS6186927U JP S6186927 U JPS6186927 U JP S6186927U JP 1984170340 U JP1984170340 U JP 1984170340U JP 17034084 U JP17034084 U JP 17034084U JP S6186927 U JPS6186927 U JP S6186927U
- Authority
- JP
- Japan
- Prior art keywords
- hood
- resist
- hole
- resist coating
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170340U JPS6186927U (da) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170340U JPS6186927U (da) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186927U true JPS6186927U (da) | 1986-06-07 |
Family
ID=30728045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984170340U Pending JPS6186927U (da) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186927U (da) |
-
1984
- 1984-11-12 JP JP1984170340U patent/JPS6186927U/ja active Pending
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