JPS6190855U - - Google Patents

Info

Publication number
JPS6190855U
JPS6190855U JP17471884U JP17471884U JPS6190855U JP S6190855 U JPS6190855 U JP S6190855U JP 17471884 U JP17471884 U JP 17471884U JP 17471884 U JP17471884 U JP 17471884U JP S6190855 U JPS6190855 U JP S6190855U
Authority
JP
Japan
Prior art keywords
vapor deposition
center portion
deposition apparatus
vapor
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17471884U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17471884U priority Critical patent/JPS6190855U/ja
Publication of JPS6190855U publication Critical patent/JPS6190855U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図および第２図はいずれもこの考案の一実
施例を示す図で、第１図は要部平面図、第２図は
要部側断面図、第３図〜第５図はいずれも従来の
この種蒸着装置を示す図で第３図は要部平面図、
第４図は要部側断面図、第５図は側断面図である
。 図中、１，１１はウエハホルダ、２はウエハ固
定部材、５は回動機構、８は蒸発源、９は防着板
、１０は容器である。尚、図中同一符号は同一又
は相当部分を示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 中心部とこの中心部から放射状に突出した
    複数の突出片とを有し、複数の被蒸着体固定部材
    が取付けられた被蒸着体ホルダ、この被蒸着体ホ
    ルダに対向して配置された蒸発源を備えた蒸着装
    置。 (2) 被蒸着体ホルダは回動機構を介して回動自
    在に複数個配置されている実用新案登録請求の範
    囲第１項記載の蒸着装置。
JP17471884U 1984-11-16 1984-11-16 Pending JPS6190855U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17471884U JPS6190855U (ja) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17471884U JPS6190855U (ja) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6190855U true JPS6190855U (ja) 1986-06-12

Family

ID=30732333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17471884U Pending JPS6190855U (ja) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6190855U (ja)

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