JPS61945A - Measuring instrument of optical disc groove shape - Google Patents
Measuring instrument of optical disc groove shapeInfo
- Publication number
- JPS61945A JPS61945A JP59122367A JP12236784A JPS61945A JP S61945 A JPS61945 A JP S61945A JP 59122367 A JP59122367 A JP 59122367A JP 12236784 A JP12236784 A JP 12236784A JP S61945 A JPS61945 A JP S61945A
- Authority
- JP
- Japan
- Prior art keywords
- groove
- optical disc
- light
- order
- groove shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
- G11B33/10—Indicating arrangements; Warning arrangements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Recording Or Reproduction (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は元ディスクの溝形状を測定する装置に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a device for measuring the groove shape of an original disk.
従来例の構成とその問題点
高密度大容量の情報記録として期待されている光ディス
クには、記録・再生時のトラッキングを容易にするため
、あらかじめ光ディスク記録面にトラッキング用の溝を
設けている。その断面形状はトラッキング信号、再生信
号と強い関係をもっており、高品質の光ディスクを得る
うえで、光ディスクの溝形状を正確に測定する方法及び
装置の開発が望まれている０以下に従来の元ディスク溝
形状測定装置について説明する。第１図は従来の光ディ
スク溝形状測定装置のレーザー照射部を示す説明図であ
る。Ｈｅ −Ｎ ｏレーザーより発光された波長λの光
ビームはその波面法線の光ディスクトラック溝直交断面
上の方向成分が光ディスク記録面法線２とψの角度をな
してディスク表面３に入射し、その反射光は記録面上の
溝により０次元４．１次元５．２次元６等に回折される
０第２図は従来の元ディスク溝形状測定装置のレーザー
受元部を示す説明図である。平行光はトラック溝直交断
面上でψの入射角でディスク表面７に入射し、屈折率ｎ
の基材部８を経て溝幅ａ、溝深ａ、溝ピッチｂの矩形波
形状の溝をもつ光ディスク記録面９により反射し、その
反射回折光は再び基材部８を経て、元ディスク表面７よ
り出射する。その０次、１次、２次の回折元軸上にそれ
ぞれ集光レンズ１０．’１１．１２を配設し、その焦点
位置付近にそれぞれ光電素子１３，１４．１５を配置す
る。Conventional Structures and Their Problems Optical disks that are expected to be used for high-density, large-capacity information recording are provided with tracking grooves in advance on the recording surface of the optical disk in order to facilitate tracking during recording and reproduction. Its cross-sectional shape has a strong relationship with tracking signals and playback signals, and in order to obtain high-quality optical discs, it is desired to develop a method and device for accurately measuring the groove shape of optical discs. The groove shape measuring device will be explained. FIG. 1 is an explanatory diagram showing a laser irradiation section of a conventional optical disc groove shape measuring device. A light beam of wavelength λ emitted from a He-No laser is incident on the disk surface 3 with the directional component of the wavefront normal on the cross section orthogonal to the optical disk track groove forming an angle ψ with the optical disk recording surface normal 2, The reflected light is diffracted by the grooves on the recording surface into 0 dimensions, 4 dimensions, 1 dimensions, 5 dimensions, 2 dimensions 6, etc. Figure 2 is an explanatory diagram showing the laser receiving part of a conventional original disc groove shape measuring device. . The parallel light enters the disk surface 7 at an incident angle of ψ on the cross section perpendicular to the track groove, and has a refractive index n
The reflected diffracted light passes through the base material part 8 and is reflected by the optical disc recording surface 9, which has rectangular wave-shaped grooves with a groove width a, a groove depth a, and a groove pitch b. It emits from 7. Condensing lenses 10. '11.12 are arranged, and photoelectric elements 13, 14.15 are arranged near their focal positions, respectively.
以上のように構成された従来の光ディスク溝形状測定装
置について、以下その測定原理について説明する。第２
図に示すようにトラック溝直交断面とディスク表面７の
一交線をＵ軸とし、トラック溝直交断面とディスク記録
面９との交線をＸ軸とする。ディスク表面入射前での入
射光の振幅分布からディスク記録面に至るまでの入射光
の振幅分布ｑ２ （”）は次式で与えられる。The measurement principle of the conventional optical disc groove shape measuring device configured as described above will be explained below. Second
As shown in the figure, a line of intersection between the track groove orthogonal cross section and the disk surface 7 is taken as the U axis, and an intersecting line between the track groove orthogonal cross section and the disk recording surface 9 is taken as the X axis. The amplitude distribution q2 ('') of the incident light from the amplitude distribution of the incident light before the incidence on the disk surface to the disk recording surface is given by the following equation.
ｃｙ２（ｕ）＝Ｔ （÷）ｅｌ９づ
ディスク記録面９での反射光の振幅分布ｑ ３Ｃｘ）は
次式で与えられる。cy2(u)=T (÷el9) The amplitude distribution q3Cx of the reflected light on the disk recording surface 9 is given by the following equation.
ｑ３＜ｘ＞−１１＜％＞ｅ−５争グ申■（÷）＊ＴＩＴ
（佃この反射光のディスク表面７出射直後の振幅分布ｃ
ｙ４（ｕ）は次式で与えられる。q3<x>-11<%>e-5 conflict ■(÷)*TIT
(Amplitude distribution of Tsukuda's reflected light immediately after exiting from the disk surface 7 c
y4(u) is given by the following formula.
ＣＪ （ｕ）−Ｔ（’）ｅ−’ ＴｕＳ１１ψ［：’１
７（’ｌ＊Ｔｌ’ｒ（Ｈ） １４ ｃ
ｂ ａこのディスク表面出
射後の反射光のフラウンホーファ領域での振幅分布Ｇ（
ｆ）は次式で与えられる。CJ (u)-T(')e-'TuS11ψ[:'1
7('l*Tl'r(H) 14 c
b aAmplitude distribution G(
f) is given by the following equation.
ここにに１ は比例定数、Ｆはフーリエ変換記号、θは
ディスク表面法線からの見込み角である。Here, 1 is a proportionality constant, F is a Fourier transform symbol, and θ is an angle of view from the disk surface normal.
式（１）を計算し
Ｇ（ｆ沖に、（ａ ｃ （ｃｊ＋ｎｃ （ｏｆ ）■（
ｂｆ ） ｌ＊！５ｉｎｃ（ｃｆ ）４πｎｄ
＋ｃ（ｂ−ａ）ｅ−’ Ａ ｌｅ−””５ｉｎＣ（
ｂ−ａ）ｆＴＩＴ（ｂｆ）１ｃ ）） ｂの時には
Ｇ（ｆ）＃に、Ｃ［：ＩＮ（ｂｆ）＊５ｉｎｃ（ｃｆ）
ｌｌａｓｉｎｃ（ａｆ）以下簡単のため、ε＝ ａ ／
ｂ δ＝２πｎｄ／λとおく。Calculating equation (1), G(f off), (ac (cj+nc (of))■(
bf) l*! 5 inc(cf)4πnd +c(b-a)e-' A le-””5inC(
b-a) fTIT(bf)1c )) When b, G(f)#, C[:IN(bf)*5inc(cf)
llasinc(af) For simplicity, ε= a /
Let b δ=2πnd/λ.
ｆ ＝ｏ 、 −、、−、の時、Ｇ（ｆ）はピーク値を
とり、それぞれ０次、１次、２次の回折光の振幅値を与
える。０次、１次、２次の回折光強度を工。、Ｉ、、Ｉ
２とすると、
Ｉｄ＝に２ＩＱ（０）ｌ ２＝に７に２ｂ２ｂ２ｃ２（
＋２ｇ、（１−ｔ）ＣＯＳ２δ＋（１−ｇ）ハＩ、、４
．＝ ｃｏｓ２ｒｔｔ −・−
−−−（３）る。よって、１次回折元６０波面法線とＯ
次回折光４０波面法線のなす角をθ。１とすると■ｏ、
Ｉ４．Ｉ２のパワー値を光電素子１３，１４゜１５で検
出し、１次回折光と０次回折元のなす角θｏ１を光電素
子１３．１４の位置関係により測定することで、Ｉ、／
Ｉｏ、 Ｉ２／１１．θ。１等は測定出来る。When f = o, -, , -, G(f) takes a peak value and gives amplitude values of 0th-order, 1st-order, and 2nd-order diffracted light, respectively. The intensity of the 0th, 1st, and 2nd order diffracted light is calculated. ,I,,I
2, then Id=to 2IQ(0)l 2=to 7 to 2b2b2c2(
+2g, (1-t)COS2δ+(1-g)HaI,,4
．． = cos2rtt −・−
---(3). Therefore, the first-order diffraction source 60 wavefront normal and O
The angle formed by the normal to the wavefront of the 40th order diffracted light is θ. If it is 1, ■o,
I4. By detecting the power value of I2 with the photoelectric elements 13 and 14°15 and measuring the angle θo1 between the 1st-order diffracted light and the 0th-order diffraction source based on the positional relationship of the photoelectric elements 13 and 14, I, /
Io, I2/11. θ. The first prize can be measured.
よって（２） 、 （３） 、 （４）の関係式を連立
させることにより、溝幅ａ、溝深ａ、溝ピッチｂは測定
できる。Therefore, by combining the relational expressions (2), (3), and (4), the groove width a, groove depth a, and groove pitch b can be measured.
しかしながら、上記の構成では溝端の傾斜部すなわち溝
のだれを含んだ台形状の溝を測定することが出来ない。However, with the above configuration, it is not possible to measure a trapezoidal groove including an inclined portion at the groove end, that is, a groove droop.
発明の目的
本発明は上記従来の問題点を解消するもので、溝端に傾
斜すなわち溝のだれを含んだ台形状の溝形状を測定する
ことのできる元ディスク溝形状測定装置を提供すること
を目的とする。OBJECTS OF THE INVENTION The present invention solves the above-mentioned conventional problems, and an object thereof is to provide an original disk groove shape measuring device that can measure a trapezoidal groove shape that includes an inclination or sag at the groove end. shall be.
発明の構成 本発明は屈折率ｎの基材におおわれた、溝幅ａ。Composition of the invention In the present invention, the groove width a is covered with a base material having a refractive index n.
溝深ａ、溝ビｙチを、溝端での傾斜部の幅ｅの台形状の
溝をもつ光ディスク記録面に波長λの平行光を照射し、
平行光の波面法線の元ディスクトラック溝直交断面上の
方向成分が光ディスク記録面法線とψの角度をなし、平
行光の０次、１次、２次及びｍ次の反射もしくは回折光
の光軸上に光電素子を配設させて、それぞれの元強度工
。、１１．Ｉ、。A parallel beam of wavelength λ is irradiated onto the recording surface of an optical disc having a trapezoidal groove with a groove depth a and a groove beach y and a width e of the sloped portion at the groove end.
The direction component of the wavefront normal of the parallel light on the cross section orthogonal to the original disk track groove makes an angle ψ with the normal to the optical disk recording surface, and the 0th, 1st, 2nd, and mth order reflected or diffracted light of the parallel light A photoelectric element is placed on the optical axis, and each source strength is improved. , 11. I.
Ｉｒｎを検出し、素子間の位置関係により０次と１次の
反射もしくは透過回折光の光軸のなす角θを検出し、ａ
／ｂ＝ｇ 、 （ｂ−ａ−２ｅ ）／ｂ＝ｇ 、 ２
πｎｄ／λ−δとして、
ｂ−λ／［５ｉｎ（θ＋ψ）−ｓｉｎ ｒｐ ｌの４式
を連立して溝形状を測定することのできるものである。Irn is detected, and the angle θ between the optical axes of the 0th-order and 1st-order reflected or transmitted diffracted light is detected based on the positional relationship between the elements, and a
/b=g, (ba-a-2e)/b=g, 2
As πnd/λ-δ, the groove shape can be measured by simultaneously combining the following four equations: b-λ/[5in(θ+ψ)-sin rpl.
実施例の説明
第３図は本発明の実施例における元ディスク溝形状測定
装置のレーザー受光部を示す説明図である。平行光はト
ランク溝直交断面上でψの入射角でディスク表面７に入
射し、屈折率ｎの基材部８を経て、溝幅ａ、溝深ａ、溝
ピッチを、溝端での傾斜部の幅ｅの台形状の溝をもつ光
ディスク記録面９′により反射し、その反射回折光は再
び基材部８を経て元ディスク表面７より出射する。その
０次、１次、２次及びｍ次の回折元軸上にそれぞれ集光
レンズ１０，１１，１２．１１’を配設し、その焦点位
置付近にそれぞれ光電素子１３，１４゜１５ 、１４’
を設置する。以上のように構成された本実施例の元ディ
スク溝形状測定装置について、以下その測定原理につい
て説明する。DESCRIPTION OF THE EMBODIMENTS FIG. 3 is an explanatory view showing a laser light receiving section of the original disk groove shape measuring device in the embodiment of the present invention. The parallel light enters the disk surface 7 at an incident angle of ψ on a cross section perpendicular to the trunk groove, passes through the base material part 8 with a refractive index n, and changes the groove width a, groove depth a, and groove pitch of the slope at the groove end. It is reflected by the optical disc recording surface 9' having a trapezoidal groove with a width e, and the reflected diffracted light passes through the base member 8 again and is emitted from the original disc surface 7. Condensing lenses 10, 11, 12, 11' are arranged on the 0th, 1st, 2nd, and m-th diffraction source axes, respectively, and photoelectric elements 13, 14, 15, 14, '
Set up. The measurement principle of the original disk groove shape measuring device of this embodiment configured as described above will be explained below.
第３図に示すように、トラック溝直交断面とディスク表
面７の交線をＵ軸とし、トラック溝直交断面とディスク
記録面９′との交線をＸ軸とする〇ディスク表面入射前
での入射光の振幅分布ｃｒ１（ｕ）、入射直後からディ
スク記録面に至るまでの入射光の振幅分布ｑ２（ｘ）は
前述のとうりである。ディスク記録面９′での反射光の
振幅成分ｑ讐ｘ）は次式で与えられる。As shown in Figure 3, the line of intersection between the track groove orthogonal cross section and the disk surface 7 is the U axis, and the line of intersection between the track groove orthogonal cross section and the disk recording surface 9' is the X axis. The amplitude distribution cr1(u) of the incident light and the amplitude distribution q2(x) of the incident light from immediately after incidence to the disk recording surface are as described above. The amplitude component q/x) of the reflected light on the disk recording surface 9' is given by the following equation.
この反射光のディスク表面７出射直後の振幅分布 ｑ
’（ｕ）は次式で与えられる。Amplitude distribution of this reflected light immediately after exiting the disk surface 7 q
'(u) is given by the following equation.
このディスク出射後の反射光のフラウンホーファ領域で
の振幅分布Ｇ’（ｆ）は次式で与えられる。The amplitude distribution G'(f) of the reflected light after being emitted from the disk in the Fraunhofer region is given by the following equation.
Ｇ／（１） ＝ Ｋ 、Ｆ Ｃｃｒ／４（ｕ） ）
−・−＝ ・（５）式β〕を計算し、
Ｇ’（量）＝ Ｋ、［ａｃｌｓｉｎｃ （ａｆ ）
Ｈ（ｂｆ ）ｌ＊５ｉｎｃ（ｃｆ ）ｎ５ｉｎ２α
ただしＩｏ７ λ
ｃ））ｂの時には
Ｇτｆ）Ｌ：に、Ｃ（［１■「（ｂｆ）＊５ｉｎｃ （
ｃｆ）ｌ （ａｓｉｎｃ（ａｆ）以下簡単のためｔ＝ａ
／を、τ−（ｂ −ａ −２ｅ）／ｂ 。G/(1) = K, F Ccr/4(u))
−・−=・(5) Formula β] is calculated, and G' (quantity) = K, [aclsinc (af)
H(bf )l*5inc(cf)n5in2α However, when Io7 λ c)) b, Gτf) L:, C([1 ■ "(bf)*5inc (
cf) l (asinc(af) For simplicity, t=a
/, τ-(b-a-2e)/b.
δ＝２ｙｒｎｄ／λ とおく。’＝０．ｂ ’ −ｂ
’ −ｂ ”時Ｇ’（ｆ）Ｉ／′ｉピーク値をと９、
それぞ扛０次、１次、２次及びｍ次の回折光の振幅値を
与える。０次、１次、２次及びｍ次の回折光強度をＩ。Let δ=2yrnd/λ. '=0. b'-b
' -b 'When G'(f)I/'i peak value is 9,
The amplitude values of the 0th-order, 1st-order, 2nd-order, and m-order diffracted lights are given, respectively. The 0th-order, 1st-order, 2nd-order, and m-order diffracted light intensities are I.
、Ｉ、、Ｉ２゜Ｉｍとすると、Ｉｏ、Ｉ、、Ｉ２．Ｉｍ
は次式で与えられる。, I, , I2°Im, then Io, I, , I2 . Im
is given by the following equation.
ｌｏ−ＩＯ２ゆ）Ｉ２−にイに２ｂ２Ｃ２（ε２＋２ε
ＥＣ０Ｓ２δ→ε）（＝ｎ２ｙｒｔ −２ｓｉｎｙｒｔ
ｓｉｎｙｒ ｅｃｏｓ２δ＋５ｉｎ２ｙｒＪ（Ｓｉｎ２
２ｙｒｖ＋２Ｓｉｎ２πｇＳｉｎ２πｇ℃ｏｓ２δ＋Ｓ
ｉｎ２２ｙｒＪ（ｓｉｎ２ｍｙｒ ε＋２ （−１）−
ｉｎｎ ｙｒ Ｅ Ｓｉｎｍｙｒ ｔ ＣＯ５２δ＋ｓ
ｉｎ２ｍｙｒｇ ）よって以下の（６） 、 （力、
（８）式が求まる。lo-IO2yu) I2-nii2b2C2(ε2+2ε
EC0S2δ→ε) (=n2yrt −2sinyrt
sinyr ecos2δ+5in2yrJ (Sin2
2yrv+2Sin2πgSin2πg℃os2δ+S
in22yrJ(sin2myr ε+2 (-1)-
inn yr E Sinmyr t CO52δ+s
in2myrg) Therefore, the following (6), (force,
Equation (8) is found.
・・・・・（８） また溝幅すは０次と１次の回折光波面法線のなす角θ。・・・・・・(8) In addition, the groove width is the angle θ between the wavefront normals of the 0th and 1st order diffracted lights.
１を使って、前述の（４）式で与えられる。1, it is given by the above equation (4).
Ｉｏ、１１．Ｉ２．Ｉ、、のパワー値を光電素子１３．
１４’。Io, 11. I2. The power value of I, , is determined by the photoelectric element 13.
14'.
１５．１４’で検出し、０次回折元と１次回折光のなす
角θ。、を光電素子１３．１４の位置間、係により測定
することで１１／工。、１２／１ｏ、Ｉｍ／′Ｉｏ、θ
。１等は測定出来る。よってに２） 、 （３） 、
（４） 、 （６）の関係式を連立させることにより台
形状の溝寸法である溝幅ａ、溝深ａ、溝ピッチを、溝端
での傾斜部の幅ｅの測定が出来る。15. Angle θ between the 0th-order diffraction source and the 1st-order diffracted light detected at 14'. , by measuring between the positions of the photoelectric elements 13 and 14, 11/work. , 12/1o, Im/'Io, θ
. The first prize can be measured. Therefore, 2), (3),
By combining the relational expressions (4) and (6), it is possible to measure the groove width a, groove depth a, groove pitch, which are trapezoidal groove dimensions, and the width e of the sloped portion at the groove end.
以上のように、本実施例によれば０次、１次、２次及び
ｍ次の反射回折光の元軸上ＶｃＭ、電素子全素子させて
、それぞれの光強度を測定し、０次と１次の回折光の光
軸のなす角を検出することにより、光ディスク記録面の
溝幅、溝深、溝ピッチ、及び溝端の傾斜部の幅を沖」定
することのできるものである。なお上記実施例では反射
回折光の検出による測定方法を説明したが、透過回折光
の検出によっても同様の測定が可能である。さらに、デ
ィスクに照射する平行光がトラック溝断面に傾斜して入
射する元であっても溝形状を測定する算出式に変化はな
い。As described above, according to this example, the on-axis VcM of the 0th-order, 1st-order, 2nd-order, and m-order reflected diffraction light, and the light intensity of each of the electronic elements are measured, and the 0th-order and By detecting the angle formed by the optical axis of the first-order diffracted light, it is possible to determine the groove width, groove depth, groove pitch, and width of the sloped portion of the groove end on the recording surface of the optical disk. In the above embodiment, a measurement method using detection of reflected diffraction light was explained, but similar measurement is also possible by detection of transmitted diffraction light. Furthermore, even if the parallel light irradiating the disk is incident on the cross section of the track groove at an angle, there is no change in the calculation formula for measuring the groove shape.
発明の効果 本発明の元ディスク溝形状測定装置は、０次。Effect of the invention The original disk groove shape measuring device of the present invention is of zero order.
１次、２次及びｍ次の反射もしくは透過回折光の光軸上
に光電素子を配設させて、それぞれの光強度を測定し、
０次と１次の回折光の光軸のなす角を検出することによ
り、台形状の溝形状をなす元ディスク記録面の溝幅、溝
深、溝ピッチ、及び溝端の傾斜部の幅の測定を実現する
ものであり、その実用的効果は大きい。A photoelectric element is arranged on the optical axis of the first-order, second-order, and m-order reflected or transmitted diffracted light, and the light intensity of each is measured,
By detecting the angle formed by the optical axes of the 0th and 1st order diffracted lights, it is possible to measure the groove width, groove depth, groove pitch, and width of the slope of the groove end on the original disk recording surface, which has a trapezoidal groove shape. The practical effect is great.
第１図は従来の光ディスク溝形状演１」定装置のレーザ
ー照射部を示す図、第２図は従来の元ディスク溝形状測
定装置のレーザー受元部を示す図、第３図は本発明の実
施例における光ディスク溝形状測定装置のレーザー受元
部を示す図である。
７・・・・・・元ディスク表面、８・・・・・・基材部
、９．９′・・・・・・記録面、１０，１１．１１’、
１２・・・・・集光レンズ、１３，１４．１４’、１５
・・・・・光電素子ＯFIG. 1 is a diagram showing a laser irradiation part of a conventional optical disc groove shape measuring device, FIG. 2 is a diagram showing a laser receiving part of a conventional original disc groove shape measuring device, and FIG. 3 is a diagram showing a laser receiving part of a conventional optical disc groove shape measuring device. FIG. 3 is a diagram showing a laser receiving part of the optical disc groove shape measuring device in an example. 7... Original disk surface, 8... Base material part, 9.9'... Recording surface, 10, 11.11',
12...Condensing lens, 13, 14.14', 15
...Photoelectric element O
Claims (1)
チを、溝端での傾斜部の幅ｅの台形状の溝をもつ光ディ
スク記録面に波長λの平行光を照射し、前記平行光の波
面法線の光ディスクトラック溝直交断面上の方向成分が
前記光ディスク記録面法線とψの角度をなし、前記平行
光の０次、１次、２波及びｍ次の反射もしくは回折光の
光軸上に光電素子を配設させて、それぞれの光強度Ｉ＿
０、Ｉ＿１、Ｉ＿２、Ｉ＿ｍを検出し、前記素子間の位
置関係により前記０次と１次の反射もしくは透過回折光
の光軸のなす角θを検出し、ａ／ｂ＝ε、（ｂ−ａ−２
ｅ）／ｂ＝＠ε＠、２πｎｄ／λ＝δとして ｂ＝λ／｛ｓｉｎ（θ＋ψ）−ｓｉｎψ｝ ▲数式、化学式、表等があります▼ の４式を連立して溝形状を測定することを特徴とする光
ディスク溝形状測定装置。[Claims] A recording surface of an optical disc having a trapezoidal groove with a groove width a, a groove depth d, and a groove pitch having a width e of an inclined portion at the groove end is covered with a base material having a refractive index n. Parallel light is irradiated, and the directional component of the wavefront normal of the parallel light on a cross section orthogonal to the optical disc track groove forms an angle ψ with the normal to the optical disc recording surface, and the 0th, 1st, 2nd waves, and A photoelectric element is arranged on the optical axis of the m-th reflected or diffracted light, and the light intensity I_
0, I_1, I_2, and I_m, and the angle θ formed by the optical axes of the 0th and 1st order reflected or transmitted diffracted lights is detected based on the positional relationship between the elements, and a/b=ε, (b− a-2
e)/b=@ε@, 2πnd/λ=δ, b=λ/{sin(θ+ψ)−sinψ} ▲There are mathematical formulas, chemical formulas, tables, etc.▼ To measure the groove shape by simultaneously using the following four equations. An optical disk groove shape measuring device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59122367A JPS61945A (en) | 1984-06-14 | 1984-06-14 | Measuring instrument of optical disc groove shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59122367A JPS61945A (en) | 1984-06-14 | 1984-06-14 | Measuring instrument of optical disc groove shape |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61945A true JPS61945A (en) | 1986-01-06 |
| JPH0556571B2 JPH0556571B2 (en) | 1993-08-19 |
Family
ID=14834111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59122367A Granted JPS61945A (en) | 1984-06-14 | 1984-06-14 | Measuring instrument of optical disc groove shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61945A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261511A (en) * | 1988-08-29 | 1990-03-01 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for measuring cyclic surface structure |
| JPH07185360A (en) * | 1993-10-28 | 1995-07-25 | F Hoffmann La Roche Ag | Automatic pipette extractor |
-
1984
- 1984-06-14 JP JP59122367A patent/JPS61945A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0261511A (en) * | 1988-08-29 | 1990-03-01 | Nippon Telegr & Teleph Corp <Ntt> | Apparatus for measuring cyclic surface structure |
| JPH07185360A (en) * | 1993-10-28 | 1995-07-25 | F Hoffmann La Roche Ag | Automatic pipette extractor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0556571B2 (en) | 1993-08-19 |
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