JPS6197833U - - Google Patents
Info
- Publication number
- JPS6197833U JPS6197833U JP18309584U JP18309584U JPS6197833U JP S6197833 U JPS6197833 U JP S6197833U JP 18309584 U JP18309584 U JP 18309584U JP 18309584 U JP18309584 U JP 18309584U JP S6197833 U JPS6197833 U JP S6197833U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- moving body
- horizontal moving
- element units
- move
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
図面はこの考案の実施例を示し、第１図は熱処
理装置の主要部と発熱体ユニツト交換装置を示す
部分切欠き側面図、第２図は同部分切欠き正面図
である。
１０…多段式半導体拡散炉、１２…筐体、１４
…発熱体ユニツト交換装置、３０…水平移動体、
４８…フオーク（発熱体ユニツト支持体）。
The drawings show an embodiment of this invention, with FIG. 1 being a partially cutaway side view showing the main parts of the heat treatment apparatus and a heating element unit exchanger, and FIG. 2 being a partially cutaway front view of the same. 10... Multi-stage semiconductor diffusion furnace, 12... Housing, 14
...Heating element unit exchange device, 30...Horizontal moving body,
48...Fork (heating element unit support).
Claims (1)
水平に配置されている熱処理装置であつて、 発熱体ユニツト交換用の水平移動体３０が筐体
１２に出入自在に取付けられ、発熱体ユニツト交
換時に発熱体ユニツト１４を１つずつ支持して出
入するための発熱体ユニツト支持体４８が水平移
動体３０に昇降自在に取付けられている発熱体ユ
ニツト交換装置を内蔵した熱処理装置。[Scope of Claim for Utility Model Registration] A heat treatment apparatus in which a plurality of upper and lower heating element units 14 are arranged horizontally in a housing 12, wherein a horizontal moving body 30 for replacing the heating element units can freely move in and out of the housing 12. A heating element unit replacement device is installed in the horizontal moving body 30 in which a heating element unit support body 48 is attached to the horizontal moving body 30 so as to be able to move up and down to support the heating element units 14 one by one and move them in and out when exchanging the heating element units. heat treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183095U JPH0220825Y2 (en) | 1984-11-30 | 1984-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984183095U JPH0220825Y2 (en) | 1984-11-30 | 1984-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6197833U true JPS6197833U (en) | 1986-06-23 |
| JPH0220825Y2 JPH0220825Y2 (en) | 1990-06-06 |
Family
ID=30740613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984183095U Expired JPH0220825Y2 (en) | 1984-11-30 | 1984-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220825Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138046A (en) * | 1982-02-12 | 1983-08-16 | Mitsubishi Electric Corp | Wafer transfer device |
-
1984
- 1984-11-30 JP JP1984183095U patent/JPH0220825Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138046A (en) * | 1982-02-12 | 1983-08-16 | Mitsubishi Electric Corp | Wafer transfer device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220825Y2 (en) | 1990-06-06 |
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