JPS62120338U - - Google Patents
Info
- Publication number
- JPS62120338U JPS62120338U JP661786U JP661786U JPS62120338U JP S62120338 U JPS62120338 U JP S62120338U JP 661786 U JP661786 U JP 661786U JP 661786 U JP661786 U JP 661786U JP S62120338 U JPS62120338 U JP S62120338U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- ionization
- forming
- section
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP661786U JPS62120338U (2) | 1986-01-22 | 1986-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP661786U JPS62120338U (2) | 1986-01-22 | 1986-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62120338U true JPS62120338U (2) | 1987-07-30 |
Family
ID=30789302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP661786U Pending JPS62120338U (2) | 1986-01-22 | 1986-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62120338U (2) |
-
1986
- 1986-01-22 JP JP661786U patent/JPS62120338U/ja active Pending
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