JPS62123094A - ３―５属化合物半導体気相成長用サセプタ - Google Patents

３―５属化合物半導体気相成長用サセプタ

Info

Publication number
JPS62123094A
JPS62123094A JP60261369A JP26136985A JPS62123094A JP S62123094 A JPS62123094 A JP S62123094A JP 60261369 A JP60261369 A JP 60261369A JP 26136985 A JP26136985 A JP 26136985A JP S62123094 A JPS62123094 A JP S62123094A
Authority
JP
Japan
Prior art keywords
susceptor
atn
film
semiconductor
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60261369A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566919B2 (mo
Inventor
Hiroaki Tanji
丹治　宏彰
Masaharu Suzuki
正治 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP60261369A priority Critical patent/JPS62123094A/ja
Publication of JPS62123094A publication Critical patent/JPS62123094A/ja
Publication of JPH0566919B2 publication Critical patent/JPH0566919B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP60261369A 1985-11-22 1985-11-22 ３―５属化合物半導体気相成長用サセプタ Granted JPS62123094A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60261369A JPS62123094A (ja) 1985-11-22 1985-11-22 ３―５属化合物半導体気相成長用サセプタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60261369A JPS62123094A (ja) 1985-11-22 1985-11-22 ３―５属化合物半導体気相成長用サセプタ

Publications (2)

Publication Number Publication Date
JPS62123094A true JPS62123094A (ja) 1987-06-04
JPH0566919B2 JPH0566919B2 (mo) 1993-09-22

Family

ID=17360881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60261369A Granted JPS62123094A (ja) 1985-11-22 1985-11-22 ３―５属化合物半導体気相成長用サセプタ

Country Status (1)

Country Link
JP (1) JPS62123094A (mo)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05251365A (ja) * 1991-05-28 1993-09-28 Ngk Insulators Ltd 耐蝕性部材
JPH06163428A (ja) * 1992-11-26 1994-06-10 Ngk Insulators Ltd 耐蝕性部材
NL1015550C2 (nl) * 2000-06-28 2002-01-02 Xycarb Ceramics B V Werkwijze voor het vervaardigen van een uit een kern opgebouwde susceptor, aldus verkregen susceptor en een werkwijze voor het aanbrengen van actieve lagen op een halfgeleidersubstraat onder toepassing van een dergelijke susceptor.
US8247080B2 (en) 2004-07-07 2012-08-21 Momentive Performance Materials Inc. Coating structure and method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392338A (en) * 1976-12-28 1978-08-14 Suwa Seikosha Kk Sheath parts for portable watch
JPS54157778A (en) * 1978-06-02 1979-12-12 Toshiba Ceramics Co Susceptor
JPS56158866A (en) * 1980-05-09 1981-12-07 Toshiba Corp Structural material for use at high temperature
JPS60216536A (ja) * 1984-04-12 1985-10-30 Nippon Telegr & Teleph Corp <Ntt> 基板載置台

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5392338A (en) * 1976-12-28 1978-08-14 Suwa Seikosha Kk Sheath parts for portable watch
JPS54157778A (en) * 1978-06-02 1979-12-12 Toshiba Ceramics Co Susceptor
JPS56158866A (en) * 1980-05-09 1981-12-07 Toshiba Corp Structural material for use at high temperature
JPS60216536A (ja) * 1984-04-12 1985-10-30 Nippon Telegr & Teleph Corp <Ntt> 基板載置台

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05251365A (ja) * 1991-05-28 1993-09-28 Ngk Insulators Ltd 耐蝕性部材
JPH06163428A (ja) * 1992-11-26 1994-06-10 Ngk Insulators Ltd 耐蝕性部材
NL1015550C2 (nl) * 2000-06-28 2002-01-02 Xycarb Ceramics B V Werkwijze voor het vervaardigen van een uit een kern opgebouwde susceptor, aldus verkregen susceptor en een werkwijze voor het aanbrengen van actieve lagen op een halfgeleidersubstraat onder toepassing van een dergelijke susceptor.
WO2002000968A1 (en) * 2000-06-28 2002-01-03 Xycarb Ceramics B.V. A method for manufacturing a susceptor, a susceptor thus obtained and its application
US8247080B2 (en) 2004-07-07 2012-08-21 Momentive Performance Materials Inc. Coating structure and method

Also Published As

Publication number Publication date
JPH0566919B2 (mo) 1993-09-22

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