JPS62123717A - Semiconductor manufacturing equipment - Google Patents

Abstract

PURPOSE:To automatically instruct the system aligner of the exchange of masks by a method wherein the lot numbers of wafers input to a system are read out by the wafer reader, the system controller instructs the aligner of a mask to be set on the aligner and the mask is set on the aligner on the basis of that instruction. CONSTITUTION:A lot number is preprinted on each wafer and a mask-name is preprinted on each mask as well. The corresponding data of the lot numbers and the mask-names to be photoengraved are stored in a system controller 7. When a wafer is fed into a wafer loader 1, the lot number of the wafer is read out by a wafer reader 5, the lot number is confirmed and that information is reported to the controller 7. The controller 7 instructs a system aligner 2 of a mask to be set on the aligner 2 and the prescribed mask is set on the aligner 2 on the basis of that instruction. Before the mask is set on the aligner 2, the mask-name printed on the mask is confirmed by a mask reader 6.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor manufacturing apparatus for manufacturing integrated circuits (so-called ICs).

[Conventional technology]

Conventionally, this type of semiconductor manufacturing equipment has a wafer loader 1 into which silicon wafers are loaded, a system aligner (photolithography equipment) 2 which patterns the wafers, and a plurality of masks in stock, as shown in the schematic diagram of FIG. There is known a mask stocker 3 for carrying wafers, and a wafer loader 4 for discharging wafers. The mask exchange operation between the mask stocker 3 and the aligner 2 is handled automatically.

[Problem that the invention seeks to solve]

In the photolithography work in the conventional semiconductor manufacturing equipment as described above, it is necessary for the operator to confirm the loft number of the wafer input into the system and instruct the aligner 2 or mask stocker 3 to replace the mask. Furthermore, if a mistake occurs in checking the lot number and mask, it is necessary to confirm this through inspection work after the wafer leaves the system.

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor manufacturing apparatus that does not require the operator to confirm the lot number of a wafer.

[Means for solving problems]

A semiconductor manufacturing apparatus according to the present invention is equipped with a lot number reading device and a mask reading device for managing masks (reticles) used in photolithography.

[Effect]

In this invention, a wafer lot number reading device reads the lot number of a wafer input into the system, instructs which mask to set in the aligner or mask stocker, and sets the mask in the aligner based on the instruction. Before the mask is set in this aligner, the mask name printed on the mask is confirmed by a mask reader.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

In FIG. 1, the same reference numerals as in the conventional semiconductor manufacturing apparatus described in FIG. 3 indicate the same or corresponding parts. code 5
6 is a wafer league (wafer lot number reader) that reads characters printed on a wafer, such as a wafer lot number; 6 is a mask reader (mask reader) that reads characters printed on a mask, such as a round mask name; 7 is a mask reader that reads characters printed on a mask, such as a round mask name; It is the entire system controller.

In the semiconductor manufacturing apparatus configured as described above, a lot number is printed on the wafer in advance, and a mask name is also printed on the mask in advance.

The system controller has correspondence data between the lot number and the name of the mask to be photoengraved. In this state, when a wafer is loaded into the wafer loader, the lot number of the loaded wafer is read by the wafer league, thereby confirming the lot number, and this information is reported to the system controller 7. The system controller 7 instructs the aligner 2 or the Max 1-Taker 3 about the mask to be set in the aligner 2, and a predetermined mask is set in the aligner 2 based on the data.

Before the mask is set in the aligner 2, the mask name printed on the mask is confirmed by the mask reader 6, thereby ensuring that the mask is set.

FIG. 2 shows another embodiment of the present invention, and shows the first embodiment.
The system controller 7 is removed from what was explained in the figure, that is, the lot number printed in advance on the wafer and the mask name printed in advance on the mask are made to correspond one-to-one, thereby eliminating the need for the system controller 7. It is something.

As described above, the wafer loaded into the wafer loader 4 has its printed lot number read by the wafer league 5 and is reported to the aligner 2 or mask stocker 3. Based on this data, aligner 2 or mask stocker 3 is placed in aligner 2. A fixed mask is set.

Before the mask is set in the aligner 2, the mask name printed on the mask is confirmed by the mask reader 6, thereby ensuring that the mask is set.

〔Effect of the invention〕

As explained above, the present invention includes a wafer league and a mask reader for managing masks used in photolithography, and the wafer league reads the 4-1-1 numbers of wafers input into the system, and The mask to be set in the mask stocker is instructed, the mask is set in the aligner based on the instruction, and the mask name printed on the mask is confirmed by the mask reader before the mask is set in the aligner. Unlike conventional semiconductor manufacturing equipment, there is no need for the operator to confirm the lot number of the wafer input into the system, and there is an advantage that it is possible to automatically instruct the aligner or mask I/tuber to replace the mask.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing one embodiment of the present invention, FIG. 2 is a block diagram showing another embodiment, and FIG. 3 is a block diagram for explaining a conventional semiconductor manufacturing apparatus. 1: wafer league, 2 system aligner, 3: mask stocker, 4: wafer unloader, 5: wafer league, 6: mask league, 7: system controller. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent: Patent Attorney Tadashi Sato Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] A wafer lot number reading device for managing the masks and a mask in a semiconductor manufacturing device for manufacturing integrated circuits, which includes a photolithography device for patterning a wafer and a mask stocker for stocking a plurality of masks used for photolithography. The wafer lot number reading device reads the lot number of the input wafer and indicates which mask to set in the photolithography apparatus or mask stocker, and the mask is placed in the photolithography apparatus based on the instruction. 1. A semiconductor manufacturing apparatus characterized in that the mask name printed on the mask is confirmed by a mask reader before the mask is set in the photolithography apparatus.