JPS62126830U - - Google Patents
Info
- Publication number
- JPS62126830U JPS62126830U JP1398786U JP1398786U JPS62126830U JP S62126830 U JPS62126830 U JP S62126830U JP 1398786 U JP1398786 U JP 1398786U JP 1398786 U JP1398786 U JP 1398786U JP S62126830 U JPS62126830 U JP S62126830U
- Authority
- JP
- Japan
- Prior art keywords
- heating
- plate
- heater
- planar heater
- heating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案ウエハ加熱装置の平面図、第２
図はその縦断正面図、第３図はヒータの断面図を
しめす。
１…加熱板、２…面状ヒータ、３…抑え板、４
…断熱材、５…カバー、６…リード線、７…ヒー
タ素子、８…絶縁板。
Figure 1 is a plan view of the wafer heating device of the present invention, Figure 2
The figure shows a vertical front view thereof, and FIG. 3 shows a sectional view of the heater. 1... Heating plate, 2... Planar heater, 3... Holding plate, 4
...Insulating material, 5...Cover, 6...Lead wire, 7...Heater element, 8...Insulating plate.
Claims (1)
ータとその抑え板より成り、前記面状ヒータはそ
の全面に格子状又は渦巻状に配列された加熱素子
と、この上下を覆う板状絶縁物とにより構成され
ていることを特徴とするウエハ加熱装置。 It consists of a heating plate, a planar heater that is in contact with the lower surface of the heating plate, and a holding plate for the heating plate, and the planar heater has heating elements arranged in a lattice or spiral pattern on its entire surface, and a plate-shaped heater that covers the top and bottom of the heating element. A wafer heating device comprising an insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398786U JPS62126830U (en) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398786U JPS62126830U (en) | 1986-02-04 | 1986-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126830U true JPS62126830U (en) | 1987-08-12 |
Family
ID=30803559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1398786U Pending JPS62126830U (en) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126830U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50156049A (en) * | 1974-05-10 | 1975-12-16 | ||
| JPS5821332A (en) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | Device for baking resist on semiconductor wafer |
| JPS6123321A (en) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | Semiconductor wafer baking apparatus |
-
1986
- 1986-02-04 JP JP1398786U patent/JPS62126830U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50156049A (en) * | 1974-05-10 | 1975-12-16 | ||
| JPS5821332A (en) * | 1981-05-15 | 1983-02-08 | ジ−・シ−・エ−・コ−ポレ−シヨン | Device for baking resist on semiconductor wafer |
| JPS6123321A (en) * | 1984-07-11 | 1986-01-31 | Toshiba Corp | Semiconductor wafer baking apparatus |
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