JPS62127467A - Member deposited with ceramics and its production - Google Patents

Abstract

PURPOSE:To develop a sliding member which has excellent adhesiveness to an Fe metallic base material and wear resistance and does not wear the mating member by subjecting the surface of the base material for the sliding member to a plasma treatment by gaseous Ar, then forming a hard ceramic layer thereon by plasma discharge in the presence of gaseous raw materials. CONSTITUTION:The Fe base material 10 consisting of a cast iron or free cutting steel, etc., is put into a reaction chamber 1 and a cylindrical electrode 4 is disposed around the same in the stage of producing the high-speed sliding member such as the shaft of a compressor. After the inside of the reaction chamber 1 is evacuated to a vacuum, the gaseous Ar is introduced therein and the material 10 is heated to 150-300 deg.C by a heater 12 and 300W high-frequency electric power is impressed by a high-frequency power source 14 to induce plasma between the electrode 4 and the material 10. The Ar in the reaction chamber 1 is expelled and gas such as SiH4, NH3 or BF3 is introduced into the chamber to induce the plasma between the electrode 4 and the material 10 by which the hard ceramic layer consisting of hard SiC, B4C, SiN, BN etc., is formed on the surface of the base material. The sliding member having the excellent sliding characteristic is thus obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a member coated with ceramics suitable for a member that opens and moves at high speed, and a method for manufacturing the same.

[Prior Art] For example, members that are subjected to high-speed sliding, such as compressor shafts, engine camshafts, laser scanners for laser printers, printer guide rails, etc., are susceptible to wear. wear has a major impact on equipment life and performance. For this reason, hard materials such as high-speed steel and cemented carbide that are hard to wear are used for such high-speed sliding members. However, these materials have high material costs and processing costs, so if it is necessary to avoid higher costs, use relatively inexpensive materials such as cast iron or free-cutting steel. Countermeasures have been taken such as hardening the surface and imparting moisture/R properties. Furthermore, a technique has been proposed in which cutting tools are coated with high-hardness ceramics such as TiN and TiC to improve the wear resistance of cutting tools.

[Problems to be solved by the invention] However, surface hardening treatment includes quenching, and lubricity imparting treatment includes tuftride treatment, Varco treatment, and coating treatment with blackened molybdenum disulfide. In the treatment process, sufficient durability cannot be obtained under severe conditions in which loads are applied and rotation is performed at high speed.

In addition, in quenching and tuftride treatment, treatment I
Since the I temperature is as high as 500° C. or higher, there is a risk that the base material may be deformed during the treatment, and these treatments cannot be applied to members that require high dimensional accuracy.

Furthermore, if TiN or TiC is coated on a member that slides at high speed, the hardness of these ceramics is high, so the other sliding member will be ground, and this grinding debris will adhere to the ceramic coating. There is a problem that it gets burned in.

This invention was made in view of such circumstances, and
It has high adhesion to the base material, excellent wear resistance, and does not grind the sliding mating member.
It is an object of the present invention to provide a member coated with ceramics in which the occurrence of seizure is suppressed and a method for manufacturing the same.

[Means for Solving the Problems] A member to which the ceramic according to the present invention is adhered has a base material whose main component is iron, and a surface of the base material that is plasma-treated with an argon-containing gas. It is characterized by having a deposited ceramic layer whose main component is silicon or boron.

In addition, the manufacturing method involves plasma treatment by generating plasma using argon-containing gas between a base material whose main component is iron, and then a ceramic layer whose main component is silicon or boron is placed on top of the base material. It is characterized by forming.

[Function] As a result of various studies to develop a ceramic material that has high hardness, high wear resistance, and does not grind the other material, the inventor of the present application has developed a ceramic material that is mainly made of silicon or boron. It has been found that the ceramic component satisfies these requirements. In addition, such ceramic materials can be applied to the base material by sputtering, plasma CVD, ion blating, etc., but since the processing humidity is relatively low at 200 to 300°C,
Deformation of the base material during processing can be suppressed, and these ceramics can also be applied to members that require high precision.

However, these ceramics have the disadvantage that their adhesion to the base material is inferior to TiN and TiC. In particular, when the base material is cast iron such as a compressor shaft, it is practically difficult to form a film with these ceramics.

The inventor of the present application repeatedly conducted various experimental studies in order to deposit these ceramics stably and easily on a base material whose main component is iron, and as a result, the surface of the base material was And 1! It has been found that these ceramics can be adhered to a base material with high adhesion by applying high frequency power or direct current power to generate plasma and performing plasma treatment during the process. The present invention is
This study was based on these research results.

Ceramics that have high wear resistance and do not grind the opposing sliding member include silicon nitride (S i N), boron nitride (BN), and silicon carbide (S
i C), boron carbide (BC), silicon oxide (Sin)
, silicon carbonitride (S i CX NY ), boron carbonitride (BCx NY ), silicon carbonate (S ! Cx O
y) or boron carbonate (BCXOY). For example, SiN and SiC have a Vickers hardness of 1800 to 2000, and SiC has a Vickers hardness of 2000.
The Vickers hardness of BN is 2500.
3000 to 3000. These ceramics thus have high hardness, excellent wear resistance, and
If the other sliding member is made of iron, the other sliding member will not be ground. Such ceramics can be manufactured by sputtering, ion blasting, plasma C
Although it can be manufactured by methods such as VD, thermal CVD, and photo-CVD, plasma CVD is preferable in view of its good contact with the base material and the possibility of lower temperature treatment.

[Embodiments] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The ceramic-covered member according to this example is manufactured as follows. First, a base material is obtained by forming a block of cast iron or free-cutting grade 1 into a predetermined shape such as a shirt for a rotary compressor or a carriage guide for a printer. Next, the surface of this base material is treated by generating plasma in a gas containing Ar gas.

Then, a ceramic such as SiN is coated on the surface of the base material. The shaft or carriage guide manufactured in this way has a base material whose main component is iron and whose surface is made of Si.
It is covered with ceramic such as N. Therefore, even if the active member acts on such a member at a high speed, wear is suppressed and the sliding member is not ground.

Next, with reference to FIGS. 1 and 2, a method of manufacturing a member coated with ceramics according to this embodiment by a plasma CVD method will be described.

A cylindrical reaction chamber 1 is supported on a suitable support with its axis vertically aligned, and is electrically suspended via an insulator 2. The inside of the reaction chamber 1 is evacuated by a mechanical booster pump, an oil rotary pump (not shown), etc.
The vacuum level is maintained at approximately 10-3 torr. Various raw material gases are introduced into the reaction chamber 1 through a gas inlet 3 . A cylindrical electrode 4 is installed in the reaction chamber 1 coaxially with respect to its peripheral wall, and is set to the same potential as the reaction chamber 1. This electrode 4 is provided with a plurality of gas flow holes (not shown), and the gas inlet 3
The gas introduced into the reaction chamber 1 through the gas passage hole of the electrode 4 reacts! It is almost uniformly supplied to the center of the 1. The cylindrical shield 5 is grounded and the reaction chamber 1
It is arranged to surround the

At the center of the reaction chamber 1, a cylindrical base material 10 is disposed at the axial center of the electrode 4 with its axial direction being vertical. reaction "i"
! A support member 11 is installed on the top plate 1 via an insulator 2, and the base material 10 is suspended from the support member 11 and charged into the reaction chamber 1. A heater 12 made of a resistance heating wire is inserted into the center of the base material 10 . This heater 12 is connected to the power source 11113, and the power source 13
Electric power is supplied from the base material 10 to generate heat, thereby heating the base material 10. In FIG. 1, a base material 10 and a support member 11 are shown.
However, the high frequency power 1114 is connected through the matching box 15, and in FIG. 2, the matching box 15 is connected to the reaction chamber 1, and high frequency power is applied to the reaction chamber 1. ing. In this way, the first
As shown in the figure and FIG. 2, high frequency power is applied to the base material 10 or the reaction chamber 1, and plasma discharge is generated between the base material 10 and the reaction chamber 1.

Using the apparatus configured as described above, first, the surface of the base material is subjected to plasma treatment in an Ar-containing gas atmosphere. That is, as shown in FIG. 1, the matching box 15 and the support member 11 are connected, and the inside of the reaction chamber 1 is evacuated to about 10 torr. Then, while continuing the pumping, 200 SCCM of Ar gas is introduced into the reaction chamber 1 through the gas inlet 3, and the pressure inside the reaction chamber 1 is adjusted to, for example, 1 Torr. Next, power is supplied from the power supply #i13 to the heater 12 to cause the heater 12 to generate heat, and the base material 10 is
Heat to 300°C. After that, apply 300W to the base material 10.
Applying high frequency power of 1! Plasma is generated between the grain 4 and the base material 10. This plasma treatment time is, for example, about 30 minutes.

In this case, the processing gas is not limited to Ar gas alone, but may be a mixed gas of Ar gas and a gas such as H2, He, or N2.

Note that, as in this example, the base material may be heated in advance, but when plasma is generated, the base material is heated by this plasma, so it is not necessarily necessary to provide a special heating means. do not have. In this way, when the base material 10 is not heated using the heater 12, the high frequency power applied to the base material 10 etc. may be increased or the processing time may be lengthened.

Following this plasma treatment, a gas containing constituent elements of the ceramic to be coated is introduced into the reaction chamber 1, and the ceramic is coated on the base material whose surface has been plasma treated. 81 ceramics to be coated
When the main component is S i H4 gas or Si2
A gas containing Sl such as H6 gas is mixed with a gas containing N such as N2 gas or NH3 gas when it is a nitride, and a gas containing C such as CH3 gas or C2Hs gas when it is a carbide. and when it is an oxide, 02
or a gas containing O, such as N20 gas.

When the ceramic to be coated contains B as a main component, a B-containing gas such as BF3 gas or B2 H6 gas may be used instead of the Si-containing gas. While introducing such raw material gas into the reaction chamber 1,
Connecting the matching box from the support member 11 to the reaction chamber 1
and connect the shield 5 from the reaction chamber 1 to the support member 1.
Switch to 1. Then, A-frequency power is applied from the high-frequency power source 14 to the reaction chamber 1 and the electrode 4 to easily generate plasma between the electrode 4 and the base material 10.

As a result, the surface of the base material 10 is coated with ceramics whose constituent elements are the components in the raw material gas.

Next, typical examples of the ceramic coating conditions and the layer thickness of the ceramic film formed will be described.

(a) For SiN SiH + gas flow 1i: 50 SCCM N 2 gas RJl: 800 S CCM reaction pressure 1.0 Torr High frequency cylinder 300 W Film forming time: 1 hour Layer thickness: Approximately 4 μm (b) For Si C SiH + gas flow rate: 50SCCM CH3 gas flow rate: 300SCCM Reaction pressure 1.01-L high frequency cylinder 300W Film forming time: 1 hour Layer thickness: Approximately 4 μm (c) For BN B2 Ha gas flow rate: 50SCCM N2 gas flow ffi: 800SCCM reaction pressure crab 1. Ot-ru high frequency tube crab 300W Film forming time = 1 hour Layer thickness: Approximately 4 μm (d) In case of SiO Si H4i space PEII: 50SCCMO2 gas 1:300sccM Reaction pressure crab 1. Otor High Frequency Tube Crab 300W Film Forming Time: 1 hour Layer Thickness: Approximately 4 μm The member to which the ceramics produced as described above is adhered has high strength ceramics and has high wear resistance. . A shaft for a rotary compressor was manufactured under each film forming condition described above, and 1000
Continuously operate for 30 minutes at rotation speeds of 0R, P, M, then 1
A 1000 hour durability test was conducted in a mode in which the machine was stopped for 0 minutes and then operated again for 30 minutes. It has been demonstrated that the shafts coated with each of the ceramics shown in (a) to (d) above do not cause seizure due to wear or peeling of the layers, and are extremely durable.

In this example, the surface treatment of the base material and the ceramic coating are carried out by plasma CVD, but the method is not limited to this. Other means may also be used. Furthermore, the power for plasma generation is not limited to high frequency power as in the above embodiments, but direct current power may also be used. In this case, a matching box is not required.

Note that the SiN film formed in this manner.

Ceramic layers such as SiC, SiO, or BN are usually amorphous, but may be polycrystalline, partially crystalline, or have microcrystalline regions. However, in any of these cases, the wear resistance is good and the same excellent effects can be obtained.

[Effects of the Invention] According to the present invention, the ceramic layer is adhered with high adhesiveness even to the base material whose main component is iron, and a member with excellent wear resistance can be obtained.

This member does not grind the mating member on which it slides, and the occurrence of seizure is prevented.

[Brief explanation of drawings]

FIG. 1 and FIG. 2 are cross-sectional views showing a manufacturing mold of a member coated with ceramics according to an embodiment of the present invention. 1: Reaction chamber, 2: Insulator, 4;? ! Love, 5: Shield,
10: Base material, 12: Heater, 141 frequency power supply, 15: Matching box.

Claims (6)

[Claims] (1) It is characterized by having a base material whose main component is iron, and a ceramic layer whose main component is silicon or boron and which is adhered to the base material after the surface of this base material is plasma-treated with an argon-containing gas. A member coated with ceramics. (2) The ceramics include silicon nitride, boron nitride, silicon carbide, boron carbide, silicon oxide, silicon carbonitride, boron carbonitride,
A member coated with a ceramic according to claim 1, characterized in that the ceramic is selected from silicon carbonate and boron carbonate. (3) Plasma treatment is performed by generating plasma using argon-containing gas between the base material whose main component is iron, and then
A method for manufacturing a member coated with ceramics, comprising forming a ceramic layer containing silicon or boron as a main component on a base material. (4) The manufacturing method according to claim 3, wherein the ceramic layer is formed by generating plasma in an atmosphere of a gas containing its constituent elements. (5) The ceramics include silicon nitride, boron nitride, silicon carbide, boron carbide, silicon oxide, silicon carbonitride, boron carbonitride,
4. The method for manufacturing a member coated with ceramics according to claim 3, wherein the ceramic is selected from silicon carbonate and boron carbonate. (6) The manufacturing method according to claim 3 or 4, wherein the plasma is formed by applying high frequency power or DC power to the base material.