JPS62135434U - - Google Patents
Info
- Publication number
- JPS62135434U JPS62135434U JP2352486U JP2352486U JPS62135434U JP S62135434 U JPS62135434 U JP S62135434U JP 2352486 U JP2352486 U JP 2352486U JP 2352486 U JP2352486 U JP 2352486U JP S62135434 U JPS62135434 U JP S62135434U
- Authority
- JP
- Japan
- Prior art keywords
- magnesia film
- reacting
- reaction tube
- magnesium compound
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 8
- 239000000395 magnesium oxide Substances 0.000 claims 4
- 150000002681 magnesium compounds Chemical class 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Description
第１図は本考案の一実施例の概略構成図である
。
１……反応管、２……載置台、３……第１ガス
供給管、４……第２ガス供給管、５……第１ソー
スボート、６……第２ソースボート。
FIG. 1 is a schematic diagram of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... Mounting table, 3... First gas supply pipe, 4... Second gas supply pipe, 5... First source boat, 6... Second source boat.
Claims (1)
、基板上にマグネシア膜を成長させるマグネシア
膜の成長装置において、 この装置の反応管内に備えられる反応管を含め
た石英部分に対し、マグネシウム化合物と反応さ
せて、マグネシア膜が被覆されていることを特徴
とするマグネシア膜の成長装置。[Claims for Utility Model Registration] In a magnesia film growth apparatus for growing a magnesia film on a substrate by reacting a magnesium compound with SiO 2 , a quartz part including a reaction tube provided in the reaction tube of this apparatus On the other hand, a magnesia film growth apparatus is characterized in that the magnesia film is coated by reacting with a magnesium compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2352486U JPS62135434U (en) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2352486U JPS62135434U (en) | 1986-02-20 | 1986-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62135434U true JPS62135434U (en) | 1987-08-26 |
Family
ID=30821904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2352486U Pending JPS62135434U (en) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62135434U (en) |
-
1986
- 1986-02-20 JP JP2352486U patent/JPS62135434U/ja active Pending
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