JPS6186924U - - Google Patents
Info
- Publication number
- JPS6186924U JPS6186924U JP17130384U JP17130384U JPS6186924U JP S6186924 U JPS6186924 U JP S6186924U JP 17130384 U JP17130384 U JP 17130384U JP 17130384 U JP17130384 U JP 17130384U JP S6186924 U JPS6186924 U JP S6186924U
- Authority
- JP
- Japan
- Prior art keywords
- paddle
- wafer
- boat
- tip
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000011261 inert gas Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案ウエハの搬送機構の側面図、第
２図Ａ，Ｂ，Ｃ，Ｄは本考案ウエハの搬送機構を
用いてウエハを反応炉内に設定するときの搬送動
作を工程順に示す模式図である。
１…石英ボート、２，２…ウエハ、４，７…石
英パイプ、５…パドル、６…操作部、８…チユー
ブ、９…軸部、１０…弾性バネ、１１…反応炉。
Fig. 1 is a side view of the wafer transfer mechanism of the present invention, and Figs. 2 A, B, C, and D show the transfer operation when setting a wafer in a reactor using the wafer transfer mechanism of the present invention in the order of steps. It is a schematic diagram. DESCRIPTION OF SYMBOLS 1...Quartz boat, 2,2...Wafer, 4,7...Quartz pipe, 5...Paddle, 6...Operation part, 8...Tube, 9...Shaft part, 10...Elastic spring, 11...Reaction furnace.
Claims (1)
するパドルとこのパドルに設けられ、不活性ガス
をパドル先端部へ供給するガス供給用のパイプと
、から成りウエハが設定されたボートを上記パド
ル先端に保持して、反応炉へ挿入したり、反応炉
から取り出したりするとき、上記パイプを介して
不活性ガスをボートのウエハ載置部に供給するこ
とを特徴としたウエハの搬送機構。 It consists of a board for setting wafers, a paddle for transporting this board, and a gas supply pipe provided on this paddle for supplying inert gas to the tip of the paddle.The boat with the wafer set is placed at the tip of the paddle. A wafer transport mechanism characterized by supplying an inert gas to a wafer mounting section of a boat through the pipe when the wafers are held and inserted into or taken out from the reactor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17130384U JPS6186924U (en) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17130384U JPS6186924U (en) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186924U true JPS6186924U (en) | 1986-06-07 |
Family
ID=30728995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17130384U Pending JPS6186924U (en) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186924U (en) |
-
1984
- 1984-11-12 JP JP17130384U patent/JPS6186924U/ja active Pending
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