JPS62136366A - Work carry-in and out device in polisher - Google Patents

Abstract

PURPOSE:To ensure the carry-in and out of workpieces to and from a plurality of holes on a carrier by providing an index table, a chuck device, a detector and the like in the workpiece carry-in and out device of a polisher for polishing the surfaces of the workpieces on upper and lower surface plates. CONSTITUTION:In the operation of the subject device, a workpiece 'W' is placed on an index table 40 according to the same arrangement as in a carrier 15. Then, a chuck device 23 is made to agree to the rotary angle of the index table 40 and chuck the workpiece 'W'. Furthermore, the chuck device 23 moves to a position over a lower surface plate 11 and the center hole of the carrier 15 is detected by a detector. In this case, air is blown for the removal of a grinding fluid, if any, in the hole. Thereafter, a ram 22, a turn-lifter 21, the chuck device 23 and the like are adjusted for aligning the centers of a chuck part and a workpiece retaining hole 16, and each workpiece 'W' is fed to the workpiece retaining hole 16. According to the aforesaid constitution, the carry-in and out of the workpiece 'X' can be made properly.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to a carrier that meshes with a sun gear and an internal gear, and rotates and revolves between the upper and lower surface plates by inserting workpieces into a plurality of holes, respectively. The present invention relates to a polisher for polishing the surface of a workpiece, and particularly to a device for loading and unloading the workpiece into and out of the carrier.

[Technical background and problems]

The carrier of the polisher as described above does not rotate or revolve, and there is a bub-club in the engagement with the sun gear and internal gear. It cannot be stopped accurately.

For this reason, the loading of workpieces, which requires precision especially in positioning the workpieces with respect to the holes in the carrier, has generally been carried out manually. Recently, there has been a demand for automation in polishers, and various devices have been proposed to automatically load and unload workpieces. It is also possible to use a robot or the like to transport the workpieces one by one into carriers that have been fitted in advance and placed inside the carrier, but this method is inefficient and requires a lot of effort from each person in the carrier. Position of? Each requires accurate detection and has the drawback of taking time to transport.

[Purpose of the invention]

The present invention solves the above-mentioned problems and provides a workpiece loading/unloading device for a polisher that can reliably and efficiently load and unload a workpiece into a carrier using a relatively simple device. It is in.

[Summary of the invention]

In order to achieve this object, the present invention (the present invention) involves inserting workpieces into a plurality of holes in a carrier that meshes with a sun gear and an internal gear, rotates and revolves between upper and lower surface plates, and grinds the surface of the workpiece with constant up-and-down movement. A device for loading and unloading workpieces into and out of a carrier of a porinya, which includes a chuck section that holds a plurality of workpieces in an arrangement corresponding to the arrangement of a plurality of holes in the carrier, a rotation drive section and a moving means for the chuck section, and a borisher. The polisher is equipped with means for detecting the revolution position and rotation angle of a carrier that receives workpieces in and out of the polisher, and means for controlling a rotational drive unit and a moving means in accordance with an output signal from this detection means. A plurality of workpieces can be accurately inserted into each hole of the carrier at the same time, and also a plurality of workpieces fitted into the holes of the carrier can be taken out at the same time.

〔Example〕

1 to 4 showing one embodiment of the present invention will be explained below. In FIG. 1, 10 is a polisher, 20
is a loading/unloading device. The polisher 10 is a so-called double-sided polisher, and has a lower surface plate I+, an upper surface plate 12. Carrier 15 with sun gear I3 and internal gear +4' meshing with both gears 13 and 14 (see FIG. 2)
is placed on the lower surface plate 11, the work W2 is inserted into the plurality of holes (6) provided in the carrier 15, and the upper surface plate 12' is lowered from the state shown in FIG. 1
2, the surface of the workpiece W is rotated to the lower surface plate 11 and the upper surface plate +2' while being clamped with appropriate pressure, and the carrier 15 is rotated and revolved by the sun gear 13 and the internal gear 14, so that the surface of the workpiece W is clamped by the lower surface plate 11 and the upper surface plate +2'. Polishing is performed using a polishing cloth (not shown) provided on the surface of the surface plate 12. Note that, since this polisher 10 is of a general type, a detailed explanation of its structure will be omitted.

The loading/unloading device 20 rotates around the axis (hOt'li-) shown in FIGS.
The revolving elevating body 21 is provided with a ram 22 that extends and contracts in the direction shown by arrow A in FIG.
3 is installed.

As shown in FIGS. 3 and 4, the chuck device 23 includes a plurality of chuck parts 24. ···have. These chuck parts 24. ... are arranged corresponding to the arrangement of the holes 16 of the carrier 15.

A chuck device 23 is rotatably attached to the ram 22 about a shaft 25 (see FIG. 4) located at the center thereof;
It can be stopped at a desired rotation angle position by a drive section (not shown).

The chuck part 24 can be mechanical, vacuum, or
Although an electromagnetic type can be selected as appropriate, FIGS. 3 and 4 show an example of a mechanical type. This chuck part 24 has chuck claws 27.27'Th that swing around pins 26.26, and these chuck claws 27.27'Th.
'The bin 29.2q is moved up and down by the piston 2.
The flow path 30. which is provided in the shaft 25 is opened and closed by the flow path 30. When the piston 28 is raised by the air pressure introduced through the pipe 31, the lower end of the chuck claw 27.27 is closed (reduced), and when the air EE is released, the piston 2g is pushed down by the spring 32.
．． 2. Open the bottom end of 7 (enlarge) and as shown in Figure 4,
The inner peripheral surface of the hole Wa provided at the center of the workpiece W is held.

The chuck device 23 includes a detector 3'3 such as a photo sensor.
is attached and the chuck device 23 is fully opposed to the carrier 15, the hole 34.3 provided in the carrier 15
It is designed to detect parts to be detected such as 5. This detector 33 is installed on a predetermined radius from the center of the chuck device 23 and is also installed at a predetermined angular position in relation to the arrangement of the chuck portion 24 to detect the relative positional relationship of the chuck device 23 with respect to the ram 22. It is configured so that it can be known from the relationship with the rotation angle. Note that one hole 34 for detection of the carrier 15 is located at the center of the carrier 15, and the other hole 35 is located for the detector 3 on the chuck device 23.
3, that is, the center of the chuck device 23 coincides with the center of the carrier 15, and the chuck part 24.・・・
・Hole 16 for holding the workpiece. Hole 3 when corresponding to...
5 faces the detector 33.

An air nozzle 36 (1) is installed near the detector 33, and is designed to remove polishing liquid or the like that adheres to and scratches the detected area prior to detection. In the figure, numeral 37 is a control section of the aforementioned loading/unloading device 20.

As shown in FIG. 2, on both sides of the loading/unloading device 20,
Index tables 40 and 41 are installed. One index table 40 is supplied with workpieces W from a cassette 42 storing unprocessed workpieces W.
Work wl carrier 1 on the interior table 40
It is arranged in the same positional relationship as the arrangement in 5. The other input table 41 receives a plurality of processed workpieces W carried out from the carrier 15 by the loading/unloading device 20, as will be described later, and transfers them to the cassette 4.
This is a 44,45H conveyor belt.

Next, the operation of this device will be explained. The unprocessed workpieces W fed from the cassette 42 by the conveyor belt 44 are placed on the index table 40, which is indexed and rotated, in the same arrangement as in the carrier 15,
The index table 40 stops at a predetermined rotation angle position with respect to the loading/unloading device 20.

The carrying-in/unloading device 20 moves the chuck device 23 to a concentric position above the index table 40 by rotating the swinging elevating body 21 and expanding and contracting the ram 22, and changes the rotation angle of the chuck device 23 to the rotation angle of the index table 40. match. Next, the rotating elevator 21 is lowered, and each chuck part 24 . of the chuck device 23 is lowered. Each of the workpieces W is chucked at...

After chucking, the rotating elevating body 21 rises by a predetermined amount, and further rotates to move the chucking device 23 onto the lower surface plate II of the borisher 10.
position above. At this time, the detector 33 of the chuck device 23 detects that the rotation angle of the chuck device 23 is set.
For example, in a plane passing through the rotation center Os O of the rotating lifting body 21 and the rotation center 02-02i of the chuck device 230, the above 0
2-02 is located closer to the sun gear 13, and the detector 33 detects the orbit of the center 03 of the carrier 15 in the polisher 10 by setting the turning angle of the rotating elevating body 21 and the displacement l of the ram 22. It is located on S.

Therefore, when the carrier 15 is moved on the lower surface plate II by rotation of the sun gear 13 and/or the internal gear 14, the hole 34 provided at the center of the carrier 15 is detected by the detector 33. At this time, air is blown out from the air nozzle 36 to remove any polishing liquid in the hole 34, thereby preventing the occurrence of detection failure. If the carrier 15 is stopped by detecting the hole 34, the hole 34 and the detector 33 will be in a matching position. In addition, the center 03 of carrier 15
is the sun gear 13. Because there is a backlash between the internal gear 14 and the teeth on the outer periphery of the carrier 15, it deviates slightly from the theoretical orbit S, and the detector 33
There is a difference in time between the detection of the hole 34 and the stop of the carrier I5. Therefore, after stopping carrier 15,
It is preferable to more accurately match the position of the detector 33 with respect to the hole 34 by rotating the rotating lifting body 21 and expanding and contracting the ram 22, or to measure the position of the hole 34.

In this way, the position of the hole 34, that is, the center 03 of the carrier 15
Once the position is known, the center 02 of the chuck device 23 is aligned with the center 03 of the carrier 15 by feeding out the ram 22 and further by rotating the rotating lifting body 21. In addition, in the case of the method in which the detector 33 matches the hole 34 when detecting the hole 34, the rotating lifting body 21 is left as it is,
Chuck equipped! If the ram 22 is advanced by an amount equal to the distance from the center 02-02 of 23 to the detector 33, the center 02-02 of the chuck device 23 will match the center 03 of the carrier 15.

Next, the chuck device 23 is rotated, and the hole 35 shown in FIG. 4 in the carrier 15 is detected by the detector 33. Chuck part 24. Detector 33 for ... and carrier 1
Hole 16 for holding the workpiece in 5. Since the angular position of the hole 35 with respect to... is determined equally, the detector 33 and the hole 3
5, the chuck part 24. ...and a hole for holding the workpiece 16. ...and each match. Therefore, if the rotating lifting body 21 is lowered, each workpiece W is moved into the hole 16.・
... will be inserted into each. In this way, the unprocessed work W
hole of carrier 15+6. ..., the chuck part 24. Release the hold on the workpiece W by...,
Unprocessed work W7 on the index table 40 again
Then, the carrier 15 is inserted into the next carrier 15.

Note that if there is already a processed workpiece W in the carrier 15, position the chuck device 23 on the carrier 15 and carry out the processed workpiece W=z onto the index table 41 in the same way as when carrying in the above-mentioned workpiece. Carry out the import.

In the embodiment described above, one detector 3 is provided in the chuck device 23.
In this example, the center 03 and rotation angle of the carrier I5 are detected using the chuck device 2.
Another detector for detecting the center 03 of the carrier 15 may be provided above the center 02-0□ of the carrier 15, and the stop of the carrier 15 during loading/unloading is not dependent on the detector 33 but on the polisher 10 side. This may be performed using another detector provided, and then the center o3 of the carrier 15 may be detected by the detector 33. In addition, another detector for detecting the center 03 of the carrier 15 is provided on the polisher 10 side, and the center 03 of the carrier 15 is determined by position coordinates on the polisher 10.
Measure the position of the loading/unloading device 2 based on the measured value.
0 can be operated in various ways.

〔Effect of the invention〕

As described above, according to the present invention, workpieces can be reliably loaded into and unloaded from a carrier using a relatively simple device, and multiple workpieces can be loaded into and unloaded from one carrier at the same time, making it efficient. Some effects can be obtained.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway front view showing one embodiment of the present invention, and FIG.
3 is an enlarged bottom view of the chuck device, and FIG. 4 is a developed sectional view taken along line 2--IV in FIG. 3. 10...Borisha, I+...Lower surface plate, 12.
... Upper surface plate, 13 ... Sun gear, 14 ... Internal gear, 15 ... Carrier, 16 ... Hole (for holding workpiece), W ... Workpiece, 20 ... Loading/unloading Device,

Claims (1)

[Claims] 1. A polisher which inserts workpieces into a plurality of holes in a carrier that meshes with a sun gear and an internal gear and rotates and revolves between upper and lower surface plates, and polishes the surface of the workpieces with the upper and lower surface plates. A device for loading and unloading workpieces into and out of a carrier, the chuck section holding a plurality of workpieces in an arrangement corresponding to the arrangement of the plurality of holes in the carrier, a rotation driving section and a moving means for the chuck section, and an inside of the polisher. It is characterized by comprising means for detecting the revolution position and rotation angle of the carrier that receives the loading and unloading of workpieces, and means for controlling the rotational drive section and the moving means in accordance with an output signal from the detection means. A device for loading and unloading workpieces in polishers. 2. A work loading/unloading device for a polisher according to claim 1, wherein a detector for the revolution position and rotation angle of the carrier is attached to the chuck portion.