JPS62154646U - - Google Patents
Info
- Publication number
- JPS62154646U JPS62154646U JP4219886U JP4219886U JPS62154646U JP S62154646 U JPS62154646 U JP S62154646U JP 4219886 U JP4219886 U JP 4219886U JP 4219886 U JP4219886 U JP 4219886U JP S62154646 U JPS62154646 U JP S62154646U
- Authority
- JP
- Japan
- Prior art keywords
- holding
- view
- groove
- semiconductor
- facing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 235000012431 wafers Nutrition 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219886U JPH0249725Y2 (it) | 1986-03-22 | 1986-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4219886U JPH0249725Y2 (it) | 1986-03-22 | 1986-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62154646U true JPS62154646U (it) | 1987-10-01 |
| JPH0249725Y2 JPH0249725Y2 (it) | 1990-12-27 |
Family
ID=30857883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4219886U Expired JPH0249725Y2 (it) | 1986-03-22 | 1986-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249725Y2 (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160833U (it) * | 1988-04-12 | 1989-11-08 | ||
| JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
-
1986
- 1986-03-22 JP JP4219886U patent/JPH0249725Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160833U (it) * | 1988-04-12 | 1989-11-08 | ||
| JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0249725Y2 (it) | 1990-12-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62154646U (it) | ||
| JPS62179255U (it) | ||
| JPS6338330U (it) | ||
| JPS62128633U (it) | ||
| JPH01139436U (it) | ||
| JPS62177036U (it) | ||
| JPS62168646U (it) | ||
| JP2509202Y2 (ja) | ウエハ貼付用フレ―ム | |
| JPS6367427U (it) | ||
| JPS63110042U (it) | ||
| JPS6333634U (it) | ||
| JPH01160839U (it) | ||
| JPH01161337U (it) | ||
| JPS60101747U (ja) | ウエ−ハ搬送装置 | |
| JPS61144646U (it) | ||
| JPS6168978U (it) | ||
| JPH0292931U (it) | ||
| JPS6389247U (it) | ||
| JPS58142055U (ja) | シ−トベルトにおけるシヨルダ−スル− | |
| JPS62159434U (it) | ||
| JPS6119701U (ja) | けがき定規 | |
| JPS62140731U (it) | ||
| JPS62114444U (it) | ||
| JPS6231567U (it) | ||
| JPS62165817U (it) |