JPS62157147U - - Google Patents
Info
- Publication number
- JPS62157147U JPS62157147U JP4400386U JP4400386U JPS62157147U JP S62157147 U JPS62157147 U JP S62157147U JP 4400386 U JP4400386 U JP 4400386U JP 4400386 U JP4400386 U JP 4400386U JP S62157147 U JPS62157147 U JP S62157147U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- boat
- loaded
- heat treatment
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4400386U JPS62157147U (th) | 1986-03-27 | 1986-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4400386U JPS62157147U (th) | 1986-03-27 | 1986-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157147U true JPS62157147U (th) | 1987-10-06 |
Family
ID=30861401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4400386U Pending JPS62157147U (th) | 1986-03-27 | 1986-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157147U (th) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5715419A (en) * | 1980-06-30 | 1982-01-26 | Heraeus Schott Quarzschmelze | Supporting draining board made of quartz glass |
-
1986
- 1986-03-27 JP JP4400386U patent/JPS62157147U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5715419A (en) * | 1980-06-30 | 1982-01-26 | Heraeus Schott Quarzschmelze | Supporting draining board made of quartz glass |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6379646U (th) | ||
| JPH01165623U (th) | ||
| JPS61134037U (th) | ||
| JPH01107126U (th) | ||
| JPS631324U (th) | ||
| JPS62120340U (th) | ||
| JPH0313741U (th) | ||
| JPH01173940U (th) | ||
| JPS6370856U (th) | ||
| JPS6043008U (ja) | アンテナ回転駆動装置 | |
| JPH0241438U (th) | ||
| JPH0270484U (th) | ||
| JPH0256442U (th) | ||
| JPS6258042U (th) | ||
| JPS58114039U (ja) | 半導体製造治具 | |
| JPS6332847U (th) | ||
| JPS62145334U (th) | ||
| JPS5996829U (ja) | 半導体ウエ−ハの発熱担体 | |
| JPH0446546U (th) | ||
| JPS6219740U (th) | ||
| JPH0265341U (th) | ||
| JPH02140852U (th) | ||
| JPS62178528U (th) | ||
| JPH01161334U (th) | ||
| JPS5996827U (ja) | 半導体ウエ−ハ収納容器 |