JPS5996829U - 半導体ウエ−ハの発熱担体 - Google Patents

半導体ウエ−ハの発熱担体

Info

Publication number
JPS5996829U
JPS5996829U JP19349882U JP19349882U JPS5996829U JP S5996829 U JPS5996829 U JP S5996829U JP 19349882 U JP19349882 U JP 19349882U JP 19349882 U JP19349882 U JP 19349882U JP S5996829 U JPS5996829 U JP S5996829U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
heat generating
generating carrier
carrier
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19349882U
Other languages
English (en)
Inventor
洋 熊本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19349882U priority Critical patent/JPS5996829U/ja
Publication of JPS5996829U publication Critical patent/JPS5996829U/ja
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図及び第２図は、従来の発熱担体の断面図、第３図
は本考案の一実施例の断面図である。 １・・・・・・発熱担体、１ａ・・・・・・発熱担体上
面、２・・・・・・半導体ウェーハ、２ａ・・・・・・
半導体ウェーハの中央部、２ｂ・・・・・・半導体ウェ
ーハの周辺部、３・・・・・・凹形球面、４・・・・・
・空間。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウェーハの発熱担体の半導体ウェーハ支持面を曲
    面で凹形に形成することを特徴とする半一導体ウェーハ
    の発熱担体。　　、
JP19349882U 1982-12-21 1982-12-21 半導体ウエ−ハの発熱担体 Pending JPS5996829U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19349882U JPS5996829U (ja) 1982-12-21 1982-12-21 半導体ウエ−ハの発熱担体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19349882U JPS5996829U (ja) 1982-12-21 1982-12-21 半導体ウエ−ハの発熱担体

Publications (1)

Publication Number Publication Date
JPS5996829U true JPS5996829U (ja) 1984-06-30

Family

ID=30416160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19349882U Pending JPS5996829U (ja) 1982-12-21 1982-12-21 半導体ウエ−ハの発熱担体

Country Status (1)

Country Link
JP (1) JPS5996829U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (ja) * 1973-06-04 1975-02-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (ja) * 1973-06-04 1975-02-10

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