JPS6216573B2 - - Google Patents

Info

Publication number
JPS6216573B2
JPS6216573B2 JP54119885A JP11988579A JPS6216573B2 JP S6216573 B2 JPS6216573 B2 JP S6216573B2 JP 54119885 A JP54119885 A JP 54119885A JP 11988579 A JP11988579 A JP 11988579A JP S6216573 B2 JPS6216573 B2 JP S6216573B2
Authority
JP
Japan
Prior art keywords
crystal
recess
vibrating body
terminal board
crystal resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54119885A
Other languages
Japanese (ja)
Other versions
JPS5643815A (en
Inventor
Kimio Aizawa
Takashi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11988579A priority Critical patent/JPS5643815A/en
Priority to CA000360439A priority patent/CA1161943A/en
Priority to DE19803035088 priority patent/DE3035088A1/en
Priority to GB8030157A priority patent/GB2063558B/en
Publication of JPS5643815A publication Critical patent/JPS5643815A/en
Publication of JPS6216573B2 publication Critical patent/JPS6216573B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0509—Holders or supports for bulk acoustic wave devices consisting of adhesive elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/588—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は水晶振動子にかかり、特に製造方法が
容易な構造をもち、機械的強度の大きな水晶振動
子を提供しようとするものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a crystal resonator, and in particular, it is an object of the present invention to provide a crystal resonator that has a structure that is easy to manufacture and has a high mechanical strength.

従来の水晶振動子の多くは水晶振動体をワイヤ
スプリングで保持する構造のため、その製造方法
には手作業を非常に多く必要とし、量産性が悪い
ものである。そしてワイヤ保持構造であるために
機械的強度にも劣る。さらには、水晶振動体の周
波数微調整の際に、この水晶振動体それぞれにマ
スクを取り付け電極材料の付加によつて調整を行
つてからマスクを取り外すという非常に煩しい製
造方法をとつていた。一方水晶振動体が平板に固
着される構造をもつ水晶振動子では、水晶振動体
の振動を保護するためのスペーサまたはそれに相
当するものが必要であり、かつ平板に取り付ける
ため水晶振動体の位置決めも困難であつた。
Most conventional crystal oscillators have a structure in which the crystal oscillator is held by wire springs, so the manufacturing method thereof requires a large amount of manual labor and is not suitable for mass production. Furthermore, since it has a wire holding structure, its mechanical strength is also poor. Furthermore, when fine-tuning the frequency of a crystal vibrating body, a very cumbersome manufacturing method was used in which a mask was attached to each crystal vibrating body, adjustment was made by adding electrode material, and then the mask was removed. . On the other hand, a crystal resonator with a structure in which the crystal resonator is fixed to a flat plate requires a spacer or something equivalent to protect the vibration of the crystal resonator, and since it is attached to a flat plate, it is necessary to position the crystal resonator. It was difficult.

本発明にかかる水晶振動子は、水晶振動体保持
用の端子基板に直付けし、かつ凹部を設けること
によつて、前述のような従来品にあつた欠点を解
決したものである。
The crystal resonator according to the present invention solves the above-mentioned drawbacks of conventional products by directly attaching the crystal resonator to a terminal board for holding the crystal resonator and providing a recess.

以下その実施例について具体的に説明する。 Examples thereof will be described in detail below.

第1図Aは水晶振動体100の正面図であり、
同図Bはその側面図である。これは方形板状の水
晶振動素子1とその主面上に水晶振動素子1を挾
んで対向するように形成された円形の電極2,3
とそれらと導電的に接続させて互いに対向しない
ように形成された引出し電極4,5とで構成され
ている。水晶振動素体1の形状は図のような方形
板に限らず他の例えば円板でもよい。
FIG. 1A is a front view of the crystal vibrating body 100,
Figure B is a side view thereof. This consists of a rectangular plate-shaped crystal vibrating element 1 and circular electrodes 2 and 3 formed on its main surface so as to sandwich the crystal vibrating element 1 therebetween.
and lead electrodes 4 and 5 which are conductively connected to these and formed so as not to face each other. The shape of the crystal vibrating element 1 is not limited to the rectangular plate shown in the figure, but may be other shapes such as a circular plate.

第2図Aは端子基板200の正面図、同図Bは
その側面図、そして同図Cは同図AにおけるJ−
J′線に沿つた断面図である。これは、絶縁基板1
1とリード端子12,13が一体成型で形成さ
れ、絶縁基板11の一方の主平面上に第1図に示
す水晶振動体100を収納する方形状の凹部16
を有し、リード端子12,13の一部分はそれぞ
れ第1図に示す引出し電極4,5と導電的に固着
する固着端子14,15として絶縁基板11の主
面上で凹部16に沿つて露出している。
FIG. 2A is a front view of the terminal board 200, FIG. 2B is a side view thereof, and FIG.
FIG. 3 is a sectional view taken along line J'. This is insulating substrate 1
1 and lead terminals 12 and 13 are integrally molded, and a rectangular recess 16 is provided on one main plane of the insulating substrate 11 to house the crystal vibrating body 100 shown in FIG.
A portion of the lead terminals 12 and 13 are exposed along the recess 16 on the main surface of the insulating substrate 11 as fixed terminals 14 and 15 that are conductively fixed to the lead-out electrodes 4 and 5 shown in FIG. ing.

第3図Aは水晶振動体100を端子基板200
に取り付けた時の正面図であり、同図Bは同図A
におけるK−K′線に沿つた断面図である。水晶
振動体100は、その一方の主面が凹部16の底
面に対面し、かつ絶縁基板11の主平面より露出
することがないように収納され、そして引出し電
極4,5はそれぞれ固着端子14,15に例えば
導電性接剤21,22で固着される。
FIG. 3A shows the crystal resonator 100 connected to the terminal board 200.
This is a front view when it is installed in the same figure B.
FIG. The crystal vibrating body 100 is housed so that one main surface thereof faces the bottom surface of the recess 16 and is not exposed from the main surface of the insulating substrate 11, and the extraction electrodes 4 and 5 are fixed terminals 14 and 5, respectively. 15 with conductive adhesives 21 and 22, for example.

このような保持構造をもつ水晶振動子によれ
ば、従来の構造の水晶振動子と比較して以下の利
点を有する。
A crystal resonator having such a holding structure has the following advantages compared to a crystal resonator having a conventional structure.

(a) 水晶振動体の保持が容易で、特に水晶振動体
が小型で薄いときに有利である。
(a) It is easy to hold the crystal vibrating body, which is particularly advantageous when the crystal vibrating body is small and thin.

(b) 水晶振動体全体が端子基板上で凹部に収納さ
れているため、その振動を保護する特別のスペ
ーサを必要としない。
(b) Since the entire crystal vibrating body is housed in a recess on the terminal board, there is no need for a special spacer to protect its vibration.

(c) 水晶振動体が端子基板に直付けされるため、
ワイヤ保持構造をもつ水晶振動子に比べて機械
的強度に優れている。
(c) Since the crystal resonator is directly attached to the terminal board,
It has superior mechanical strength compared to crystal resonators with a wire holding structure.

(d) 凹部の形状を水晶振動体の形状に合わすこと
により水晶振動体の位置決めが非常に容易であ
る。
(d) By matching the shape of the recess to the shape of the crystal vibrating body, positioning of the crystal vibrating body is very easy.

第4図から第7図までは端子基板200と若干
形状の異なる端子基板の他の例を示しており、第
2図と第3図の構成要素と同じものには同じ番号
を付している。第4図Aは端子基板300の正面
図、同図Bはその側面図、そして同図Cは同図A
におけるL−L′線に沿つた断面図である。これは
第2図に示す端子基板200と固着端子14,1
5を除いては同じ構造をもつ。この実施例では固
着端子31,32は凹部16の底面上に露出して
いる。この端子基板300によればリード端子1
2,13と絶縁基板11を一体成型する際にリー
ド端子を折り曲げる必要がない。第5図Aは第1
図の水晶振動体100を第4図の端子基板300
に取り付けた時の正面図であり、同図Bは同図A
におけるM−M′線に沿つた断面図である。水晶
振動体100の引出し電極4,5は凹部16内で
固着端子31,32に導電性接着剤21,22で
固着される。かかる端子基板300によれば第2
図の端子基板200が有すると同じ利点に加えて
絶縁基板の主平面上にリード端子が露出しておら
ず平担であるため凹部16を密封する際に有利で
ある。
4 to 7 show other examples of terminal boards with slightly different shapes from the terminal board 200, and the same components as those in FIGS. 2 and 3 are given the same numbers. . 4A is a front view of the terminal board 300, FIG. 4B is a side view thereof, and FIG. 4C is a front view of the terminal board 300.
FIG. This consists of a terminal board 200 and fixed terminals 14 and 1 shown in FIG.
They have the same structure except for 5. In this embodiment, the fixed terminals 31 and 32 are exposed on the bottom surface of the recess 16. According to this terminal board 300, the lead terminal 1
There is no need to bend the lead terminals when integrally molding 2, 13 and the insulating substrate 11. Figure 5 A is the first
The crystal resonator 100 shown in the figure is connected to the terminal board 300 shown in FIG.
This is a front view when it is installed in the same figure B.
FIG. The extraction electrodes 4 and 5 of the crystal vibrating body 100 are fixed to fixed terminals 31 and 32 within the recess 16 using conductive adhesives 21 and 22. According to this terminal board 300, the second
In addition to the same advantages as the terminal board 200 shown in the figure, the lead terminals are not exposed on the main plane of the insulating board and are flat, which is advantageous when sealing the recess 16.

第6図、第7図はさらに他の実施例を示し、第
6図Aは端子基板400の正面図、同図Bはその
側面図、そして同図Cは同図AにおけるN−
N′線に沿つた断面図である。これは第4図に示
す端子基板300と固着端子31,32を除いて
同じ構造をもつ。すなわち固着端子41,42は
凹部16の底面上で固着端子41,42の厚み全
体を露出せずにその表面だけが露出するように設
けられている。第7図Aは第1図の水晶振動体1
00を第6図の端子基板400に取り付けた時の
正面図であり、同図Bは同図AのO−O′線に沿
つた断面図である。水晶振動体100の引出し電
極4,5は凹部16内で固着端子41,42に導
電性接着剤21,22で固着される。かかる端子
基板400は、前述のような第2図の端子基板2
00または第4図の端子基板300が有すると同
じ利点に加えて、水晶振動体100の一方の主面
全体が凹部16の底面に接するため安定に保持さ
れ、機械的強度に優れる。
6 and 7 show still other embodiments, FIG. 6A is a front view of the terminal board 400, FIG. 6B is a side view thereof, and FIG.
FIG. 3 is a sectional view taken along line N'. This has the same structure as shown in FIG. 4 except for the terminal board 300 and fixed terminals 31 and 32. That is, the fixed terminals 41 and 42 are provided on the bottom surface of the recess 16 so that only the surfaces thereof are exposed without exposing the entire thickness of the fixed terminals 41 and 42. Figure 7A shows the crystal oscillator 1 in Figure 1.
00 is attached to the terminal board 400 of FIG. 6, and FIG. 6B is a sectional view taken along the line O-O' of FIG. 6A. The extraction electrodes 4 and 5 of the crystal vibrating body 100 are fixed to fixed terminals 41 and 42 within the recess 16 using conductive adhesives 21 and 22. Such a terminal board 400 is similar to the terminal board 2 of FIG. 2 as described above.
In addition to the same advantages as the terminal board 300 of FIG. 00 or FIG. 4, one main surface of the crystal vibrating body 100 is stably held because it is in contact with the bottom surface of the recess 16, and has excellent mechanical strength.

第8図から第10図までは本発明の水晶振動子
の実施例を示しており、第1図から第7図までの
構成要素と同じものには同じ番号を付している。
第8図Aは水晶振動子の正面図であり、同図Bは
同図AにおけるP−P′線に沿つた断面図である。
この水晶振動子は水晶振動体100、端子基板4
00、および水晶振動体100を保護しかつ凹部
16を密封して絶縁基板11に接着される絶縁性
の平板51とで構成されている。平板51は樹脂
材料等でよく、その大きさは寸法的に凹部16の
面積より大きいことが必要である。平板51の接
着方法は例えば接着剤、超音波融着、熱融着等の
方法でよい。また端子基板400は前述の端子基
板200,300でもよく、いずれの場合でも水
晶振動体100は平板51により保護、密封され
る。
8 to 10 show embodiments of the crystal resonator of the present invention, and the same components as those in FIGS. 1 to 7 are given the same numbers.
FIG. 8A is a front view of the crystal resonator, and FIG. 8B is a sectional view taken along line P-P' in FIG. 8A.
This crystal resonator includes a crystal resonator 100, a terminal board 4
00, and an insulating flat plate 51 that protects the crystal vibrating body 100, seals the recess 16, and is bonded to the insulating substrate 11. The flat plate 51 may be made of a resin material or the like, and its size needs to be larger than the area of the recess 16 . The method for bonding the flat plate 51 may be, for example, adhesive, ultrasonic bonding, heat bonding, or the like. Further, the terminal board 400 may be the terminal board 200 or 300 described above, and in either case, the crystal vibrating body 100 is protected and sealed by the flat plate 51.

第9図Aは他の実施例になる水晶振動子の正面
図であり、同図Bは同図AにおけるQ−Q′線に
沿つた断面図である。この水晶振動子はリード端
子の一部分63を除く水晶振動体100と端子基
板400全体を密封して絶縁基板11に接着され
る絶縁性のキヤツプ61を有して構成されてい
る。キヤツプ61は樹脂材料等でよく、キヤツプ
61の内孔は端子基板400と同じか寸法的に大
きいことが必要である。またキヤツプ61は例え
ば接着剤、超音波融着、熱融着等の方法で絶縁基
板11に接着すればよく、端子基板400は前記
の端子基板200,300でもよい。上述の2つ
の水晶振動子によれば、水晶振動体100の振動
を保護する特別のスペーサを要せずに水晶振動体
100を密封できる。また真空中や窒素雰囲気中
での密封が容易であるため、信頼性の高い水晶振
動子を得ることができる。
FIG. 9A is a front view of a crystal resonator according to another embodiment, and FIG. 9B is a sectional view taken along the line QQ' in FIG. 9A. This crystal resonator includes an insulating cap 61 that seals the entire terminal board 400 and the crystal resonator 100 except for a portion 63 of the lead terminals, and is bonded to the insulating board 11. The cap 61 may be made of a resin material or the like, and the inner hole of the cap 61 needs to be the same size or larger than the terminal board 400. Further, the cap 61 may be bonded to the insulating substrate 11 by, for example, an adhesive, ultrasonic fusion, heat fusion, or the like, and the terminal substrate 400 may be the terminal substrate 200 or 300 described above. According to the two crystal oscillators described above, the crystal oscillator 100 can be sealed without requiring a special spacer to protect the vibration of the crystal oscillator 100. Furthermore, since it is easy to seal in a vacuum or in a nitrogen atmosphere, a highly reliable crystal resonator can be obtained.

第10図Aは水晶振動子の一部を断面とする正
面図であり、同図Bは同図AにおけるR−R′線
に沿つた断面図である。この水晶振動子は水晶振
動体100、端子基板400、凹部16を保護し
て絶縁基板11に固着される絶縁膜71、リード
端子の一部分72を除く全体を被覆する樹脂73
で構成されている。絶縁膜71は例えば接着剤7
4で絶縁基板11に固着すればよい。端子基板4
00は端子基板200,300でもよい。
10A is a partially sectional front view of the crystal resonator, and FIG. 10B is a sectional view taken along line RR' in FIG. 10A. This crystal resonator includes a crystal resonator 100, a terminal board 400, an insulating film 71 that protects the recess 16 and is fixed to the insulating board 11, and a resin 73 that covers the entire area except for a portion 72 of the lead terminal.
It consists of The insulating film 71 is made of adhesive 7, for example.
4, it may be fixed to the insulating substrate 11. Terminal board 4
00 may be the terminal board 200 or 300.

次に端子基板200,300および400に他
の機能を付加した端子基板の説明をする。第11
図は例えば端子基板400にこれを実施した場合
を示す。第2図から第7図までの構成要素と同じ
ものは同じ番号を付している。第11図Aは端子
基板500の正面図、同図Bは側面図、同図Cは
同図AにおけるS−S′線に沿つた断面図である。
これは端子基板400と同構造であるが新たに凹
部16の底面に透孔81を設けてある。透孔81
は水晶振動体100の電極2,3と同じか寸法的
に小さいことが必要である。第12図Aは水晶振
動体100を端子基板500に取り付けた時の正
面図であり、同図Bは同図AにおけるT−T′線
に沿つた断面図である。この状態で透孔81をマ
スクにして電極材料の付加によつて水晶振動体1
00の周波数の微調整ができる。水晶振動体10
0は一方の電極3が凹部16の底面で透孔81に
対向するように取り付けられることが重要であ
る。この方法によれば電極材料の付加時に水晶振
動体100の電極2,3間の静電容量を変化させ
ることなく周波数の微調整ができる。かかる水晶
振動体100と端子基板500を一体化したもの
は、若干形状を異ならせるが第8図から第10図
までの方法で密封することができる。例えば第1
3図にその一実施例を示す。第13図Aは水晶振
動子の正面図であり、同図Bは同図AにおけるU
−U′線に沿つた断面図である。この水晶振動子
は水晶振動体100、端子基板500、水晶振動
体100を保護しかつ凹部16を密封して絶縁基
板11に接着される絶縁性の平板91、および透
孔81を密封して絶縁基板11に接着される絶縁
性の平板92とで構成されている。平板91,9
2は例えば接着剤、超音波融点、熱融着等の方法
で接着すればよく、これによつて水晶振動体10
0は完全に密封される。
Next, terminal boards in which other functions are added to the terminal boards 200, 300, and 400 will be explained. 11th
The figure shows a case where this is implemented on a terminal board 400, for example. Components that are the same as those in FIGS. 2 to 7 are given the same numbers. 11A is a front view of the terminal board 500, FIG. 11B is a side view, and FIG. 11C is a sectional view taken along line S-S' in FIG. 11A.
This has the same structure as the terminal board 400, but a through hole 81 is newly provided at the bottom of the recess 16. Through hole 81
needs to be the same size or smaller than the electrodes 2 and 3 of the crystal vibrating body 100. FIG. 12A is a front view of the crystal vibrating body 100 attached to the terminal board 500, and FIG. 12B is a sectional view taken along line T-T' in FIG. 12A. In this state, using the through hole 81 as a mask, the crystal vibrating body 1 is
00 frequency can be finely adjusted. Crystal vibrator 10
It is important that one electrode 3 is attached so as to face the through hole 81 at the bottom of the recess 16. According to this method, the frequency can be finely adjusted without changing the capacitance between the electrodes 2 and 3 of the crystal vibrating body 100 when adding electrode material. Such an integrated crystal vibrating body 100 and terminal board 500 can be sealed by the methods shown in FIGS. 8 to 10, although the shape is slightly different. For example, the first
Figure 3 shows an example of this. FIG. 13A is a front view of the crystal resonator, and FIG. 13B is a front view of the crystal resonator, and FIG.
FIG. 3 is a cross-sectional view taken along the −U′ line. This crystal resonator includes an insulating flat plate 91 that protects the crystal resonator 100, the terminal board 500, and the crystal resonator 100, seals the recess 16, and adheres to the insulating substrate 11, and seals the through hole 81 for insulation. It is composed of an insulating flat plate 92 bonded to the substrate 11. flat plate 91,9
2 may be bonded by adhesive, ultrasonic melting point, heat fusion, etc., and thereby the crystal vibrating body 10
0 is completely sealed.

同様にして同一端子基板に第1図の水晶振動体
100を複数個取りつける場合にも本発明が適用
できる。第14図から第16図までは2個の水晶
振動体を同一端子基板に取り付けた場合の一実施
例を示す。第14図Aは水晶振動体100を2個
取り付けることができる端子基板600の正面図
であり、同図Bは同図AにおけるV−V′線に沿
つた断面図である。これは絶縁基板101とリー
ド端子102,103および共通リード端子10
4が一体成型で形成され、絶縁基板101の一方
の主平面上には第1図の水晶振動体100を収納
できる2個の凹部105,106を有し、かつ凹
部105,106の底面には透孔111,112
を有し、リード端子102,103および共通リ
ード端子104の一部分はそれぞれ固着端子10
7,108,109,110として凹部105,
106の底面で表面だけを露出している。第15
図Aは端子基板600に第1図の水晶振動体10
0を2個取り付けた時の正面図であり、同図Bは
同図AにおけるW−W′線に沿つた断面図であ
る。片方の水晶振動体100は引出し電極4,5
が凹部105内で固着端子107,109に、も
う一方の水晶振動体100は引出し電極4,5が
凹部106内で固着端子108,110に例えば
導電性接着剤113,114,115,116で
導電的に固着される。この時水晶振動体は一方の
電極3が透孔112,113に相対向する様に取
り付けられることが必要である。この端子基板6
00は前述の端子基板と同様の密封方法が可能で
ある。第16図にその一実施例を示す。第16図
Aは水晶振動体の正面図であり、同図Bは同図A
におけるX−X′線に沿つた断面図である。この
水晶振動子は2個の水晶振動体100、端子基板
600、凹部105,106を密封して絶縁基板
101に接着される絶縁性の平板121、透孔1
11,112を密封して絶縁基板101に接着さ
れる平板122とで構成されている。このような
複数個の水晶振動体を同一端子基板に取り付け
た、水晶振動子によれば、前述の水晶振動子の有
する利点に加えて、以下の利点を有する。
Similarly, the present invention can be applied to the case where a plurality of crystal vibrating bodies 100 shown in FIG. 1 are attached to the same terminal board. FIG. 14 to FIG. 16 show an embodiment in which two crystal vibrators are attached to the same terminal board. FIG. 14A is a front view of a terminal board 600 to which two crystal vibrating bodies 100 can be attached, and FIG. 14B is a sectional view taken along line V-V' in FIG. 14A. This consists of an insulating substrate 101, lead terminals 102 and 103, and a common lead terminal 10.
4 is integrally molded, and has two recesses 105 and 106 on one main plane of the insulating substrate 101 that can accommodate the crystal vibrating body 100 shown in FIG. Through holes 111, 112
A portion of the lead terminals 102, 103 and the common lead terminal 104 are each attached to a fixed terminal 10.
7, 108, 109, 110 as recess 105,
Only the surface is exposed at the bottom of 106. 15th
In Figure A, the crystal vibrating body 10 of Figure 1 is mounted on a terminal board 600.
FIG. 2 is a front view when two 0s are attached, and FIG. B is a sectional view taken along the line W-W' in FIG. A. One crystal vibrator 100 has lead electrodes 4 and 5
are connected to the fixed terminals 107 and 109 in the recess 105, and the lead electrodes 4 and 5 of the other crystal vibrating body 100 are connected to the fixed terminals 108 and 110 in the recess 106 using conductive adhesives 113, 114, 115, and 116, for example. is fixed. At this time, the crystal vibrating body needs to be attached so that one electrode 3 faces the through holes 112 and 113. This terminal board 6
00 can be sealed in the same manner as the terminal board described above. FIG. 16 shows an example of this. FIG. 16A is a front view of the crystal vibrating body, and FIG. 16B is a front view of the crystal vibrating body.
FIG. This crystal resonator consists of two crystal resonators 100, a terminal board 600, an insulating flat plate 121 which is adhered to an insulating substrate 101 with the recesses 105 and 106 sealed, and a through hole 1.
11 and 112 and a flat plate 122 that is adhered to the insulating substrate 101. A crystal resonator in which a plurality of such crystal resonators are attached to the same terminal board has the following advantages in addition to the advantages of the crystal resonator described above.

(a) ワイヤスプリング保持の水晶振動子に比べ
て、同一平面上で水晶振動体を保持できるた
め、多素子化が容易である。
(a) Compared to crystal oscillators held by wire springs, the crystal oscillator can be held on the same plane, making it easier to increase the number of elements.

(b) リード端子を共用化でき構造が簡略化でき
る。
(b) Lead terminals can be shared, simplifying the structure.

以上説明したように本発明では、水晶振動素体
の主面上に対向する電極と互いに対向しない引出
し電極を有する水晶振動体が、この水晶振動体の
輪郭寸法より寸法的に大きな凹部を有する絶縁基
板とリード端子が一体成型で形成されかつリード
端子の一部分が絶縁基板から露出する構造をもつ
端子基板の凹部内に固着されるものである。この
ような構造をもつ水晶振動子によれば、水晶振動
体が端子基板に直付けされるためワイヤ保持構造
に比べて機械的強度が大きいだけでなく、凹部が
水晶振動子の配置を容易とし、かつ水晶振動体の
振動を保護する役割を果たす。そして製造が容易
であると同時に性能の安定が実現でき、工業的に
も価値の高い水晶振動子を提供できるものであ
る。
As explained above, in the present invention, a crystal vibrating body having electrodes facing each other on the main surface of the crystal vibrating body and extraction electrodes not facing each other is an insulator having a concave portion dimensionally larger than the outline dimension of the crystal vibrating body. The board and the lead terminals are integrally molded and are fixed in the recesses of the terminal board, with a portion of the lead terminals exposed from the insulating board. A crystal resonator with such a structure not only has greater mechanical strength than a wire holding structure because the crystal resonator is directly attached to the terminal board, but also has recesses that facilitate the placement of the crystal resonator. , and plays a role in protecting the vibration of the crystal oscillator. Moreover, it is possible to provide a crystal resonator that is easy to manufacture, has stable performance, and has high industrial value.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図A,Bは本発明にかかる水晶振動子に用
いられる水晶振動体の一実施例を示す正面図およ
び側面図、第2図A,B,Cは端子基板の正面
図、側面図、要部断面図、第3図A,Bは水晶振
動体を取り付けた端子基板の正面図、要部断面
図、第4図、第6図は同様に他の端子基板を示
し、第5図、第7図は同様に水晶振動体を取り付
けたものの構成図、第8図A,Bは水晶振動子の
一実施例を示す正面図および要部断面図、第9
図、第10図は他の実施例を示す構成図、第11
図A,B,Cは他の端子基板を示す正面図、側面
図、要部断面図、第12図は水晶振動体を取りつ
けたものの構成図、第13図は水晶振動体を完成
したものの構成図、第14図、第15図、第16
図はさらに他の実施例を示す構成図である。 100……水晶振動体、1……水晶振動素体、
2,3……電極、4,5……引出し電極、20
0,300,400,500,600……端子基
板、11,101……絶縁基板、12,13,1
02,103,104……リード端子、14,1
5,31,32,41,42,107,108,
109,110……固着端子、16,105,1
06……凹部、81,111,112……透孔。
1A and 1B are a front view and a side view showing an embodiment of a crystal vibrating body used in a crystal oscillator according to the present invention, and FIGS. 2A, B, and C are a front view and a side view of a terminal board, 3A and 3B are front views and sectional views of the main part of the terminal board with the crystal vibrating body attached, FIGS. 4 and 6 similarly show other terminal boards, and FIGS. FIG. 7 is a configuration diagram of a crystal oscillator installed in the same manner, FIGS.
10 is a configuration diagram showing another embodiment, and FIG. 11 is a configuration diagram showing another embodiment.
Figures A, B, and C are front views, side views, and sectional views of main parts showing other terminal boards, Figure 12 is a configuration diagram of the one with a crystal oscillator attached, and Figure 13 is the configuration of the completed crystal oscillator. Figure, Figure 14, Figure 15, Figure 16
The figure is a configuration diagram showing still another embodiment. 100...Crystal vibrating body, 1...Crystal vibrating element,
2, 3... electrode, 4, 5... extraction electrode, 20
0,300,400,500,600...terminal board, 11,101...insulating board, 12,13,1
02,103,104...Lead terminal, 14,1
5, 31, 32, 41, 42, 107, 108,
109,110...Fixed terminal, 16,105,1
06... recess, 81, 111, 112... through hole.

Claims (1)

【特許請求の範囲】 1 一方の主平面に凹部を有する絶縁基板と複数
の導電性のリード端子とを有し、前記リード端子
の一部分を前記凹部のある主平面上に露出させて
固着端子を形成してなる端子基板と、水晶振動素
体の主面上にこの素体を介して対向する電極とこ
の電極のそれぞれに導電的に接続されかつ互いに
対向しないように形成された引出し電極とを有す
る水晶振動体とを具備し、前記水晶振動体の一方
の主面を前記凹部の底面に対面させ、前記水晶振
動体が前記凹部内に収納されかつ前記絶縁基板の
主平面より露出することがないように配置すると
ともに前記引出し電極を前記固着端子に導電的に
固着させて、前記水晶振動体と前記端子基板とを
一体化してなることを特徴とする水晶振動子。 2 前記リード端子の固着端子が前記凹部の底部
に配置されたことを特徴とする特許請求の範囲第
1項記載の水晶振動子。 3 前記リード端子の固着端子の表面だけが露出
していることを特徴とする特許請求の範囲第2項
記載水晶振動子。 4 前記凹部の面積より広い面積をもつ絶縁性の
平板が、この平板の主平面を前記絶縁基板の主平
面に対面させかつ前記凹部全体を密封するよう
に、前記絶縁基板に固着されたことを特徴とする
特許請求の範囲第1項、第2項、または第3項記
載の水晶振動子。 5 絶縁性のキヤツプが、前記リード端子の一部
分を除く前記端子基板と前記水晶振動体全体を覆
つて前記絶縁基板に固着されたことを特徴とする
特許請求の範囲第1項、第2項、または第3項記
載の水晶振動子。 6 前記凹部の面積より広い面積をもつ絶縁膜
を、この絶縁膜の片面が前記絶縁基板の主平面に
対面しかつ前記凹部全体を被覆するように前記絶
縁基板に固着させるとともに、前記リード端子の
一部分を除く前記端子基板、前記水晶振動体、お
よび前記絶縁膜全体を樹脂材料で密封することを
特徴とする特許請求の範囲第1項、第2項または
第3項記載の水晶振動子。 7 前記凹部の底面に前記水晶振動体の電極と同
じか寸法的に小さい透孔を有し、前記水晶振動体
を前記凹部の底部で前記電極の一方が前記透孔に
対面するように配置したことを特徴とする特許請
求の範囲第1項、第2項、または第3項記載の水
晶振動子。 8 絶縁性の平板が前記凹部と前記透孔をそれぞ
れ密封するように前記絶縁基板に固着されること
を特徴とする特許請求の範囲第7項記載の水晶振
動子。 9 絶縁性のキヤツプが前記リード端子の一部分
を除く前記端子基板と前記水晶振動体全体にかぶ
せられて前記絶縁基板に固着されることを特徴と
する特許請求の範囲第7項記載の水晶振動子。 10 絶縁膜が、前記凹部全体と前記透孔をそれ
ぞれ被覆して前記絶縁基板固着されるとともに、
前記リード端子の一部分を除く前記端子基板、前
記水晶振動体、および前記絶縁膜全体を樹脂材料
で密封することを特徴とする特許請求の範囲第7
項記載の水晶振動子。
[Scope of Claims] 1. An insulating substrate having a concave portion on one main plane and a plurality of conductive lead terminals, a part of the lead terminals being exposed on the main plane with the concave portion to form a fixed terminal. A terminal board formed by forming a terminal board, electrodes facing each other on the main surface of a crystal vibrating element through this element, and extraction electrodes formed to be conductively connected to each of the electrodes and not to face each other. a crystal vibrating body having a crystal vibrating body, one main surface of the crystal vibrating body facing a bottom surface of the recess, and the crystal vibrating body being housed in the recess and being exposed from a main plane of the insulating substrate. A crystal resonator characterized in that the crystal resonator and the terminal board are integrated by arranging the lead electrodes so as not to be connected to each other and conductively fixing the extraction electrodes to the fixing terminals. 2. The crystal resonator according to claim 1, wherein the fixed terminal of the lead terminal is disposed at the bottom of the recess. 3. The crystal resonator according to claim 2, wherein only the surface of the fixed terminal of the lead terminal is exposed. 4. An insulating flat plate having an area larger than the area of the recess is fixed to the insulating substrate such that the main plane of the flat plate faces the main plane of the insulating substrate and the entire recess is sealed. A crystal resonator according to claim 1, 2, or 3. 5. Claims 1 and 2, characterized in that an insulating cap is fixed to the insulating substrate so as to cover the entire terminal board and the crystal vibrating body except for a portion of the lead terminal. Or the crystal oscillator described in item 3. 6. An insulating film having an area larger than the area of the recess is fixed to the insulating substrate so that one side of the insulating film faces the main plane of the insulating substrate and covers the entire recess, and the lead terminal is 4. A crystal resonator according to claim 1, wherein the terminal board, the crystal resonator, and the insulating film, except for a portion thereof, are all sealed with a resin material. 7 The bottom of the recess has a through hole that is the same as or smaller in size than the electrode of the crystal vibrating body, and the crystal vibrating body is arranged at the bottom of the recess so that one of the electrodes faces the through hole. A crystal resonator according to claim 1, 2, or 3, characterized in that: 8. The crystal resonator according to claim 7, wherein an insulating flat plate is fixed to the insulating substrate so as to seal each of the recess and the through hole. 9. The crystal resonator according to claim 7, wherein an insulating cap is fixed to the insulating substrate by covering the entire terminal board and the crystal resonator except for a portion of the lead terminals. . 10 An insulating film is fixed to the insulating substrate by covering the entire recess and the through hole, respectively, and
Claim 7, characterized in that the terminal board, the crystal vibrating body, and the entire insulating film except for a part of the lead terminal are sealed with a resin material.
Crystal oscillator described in section.
JP11988579A 1979-09-18 1979-09-18 Quartz oscillator Granted JPS5643815A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11988579A JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator
CA000360439A CA1161943A (en) 1979-09-18 1980-09-17 Crystal oscillator device with one electrode at the mouth of a through-hole
DE19803035088 DE3035088A1 (en) 1979-09-18 1980-09-17 VIBRATION QUARTZ ARRANGEMENT
GB8030157A GB2063558B (en) 1979-09-18 1980-09-18 Crystal oscillator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11988579A JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator

Publications (2)

Publication Number Publication Date
JPS5643815A JPS5643815A (en) 1981-04-22
JPS6216573B2 true JPS6216573B2 (en) 1987-04-13

Family

ID=14772635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11988579A Granted JPS5643815A (en) 1979-09-18 1979-09-18 Quartz oscillator

Country Status (4)

Country Link
JP (1) JPS5643815A (en)
CA (1) CA1161943A (en)
DE (1) DE3035088A1 (en)
GB (1) GB2063558B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3263495D1 (en) * 1981-02-28 1985-06-20 Kinseki Ltd Piezoelectric oscillator device
JPS59189713A (en) * 1983-04-11 1984-10-27 Toko Inc Oscillator and its production
GB2146839B (en) * 1983-07-27 1987-04-01 Nihon Dempa Kogyo Co Piezoelectric resonator

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417504Y2 (en) * 1975-04-21 1979-07-05
JPS53118391U (en) * 1977-02-28 1978-09-20

Also Published As

Publication number Publication date
GB2063558A (en) 1981-06-03
JPS5643815A (en) 1981-04-22
DE3035088A1 (en) 1981-04-02
GB2063558B (en) 1984-01-25
CA1161943A (en) 1984-02-07

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