JPS62170503U - - Google Patents
Info
- Publication number
- JPS62170503U JPS62170503U JP5744286U JP5744286U JPS62170503U JP S62170503 U JPS62170503 U JP S62170503U JP 5744286 U JP5744286 U JP 5744286U JP 5744286 U JP5744286 U JP 5744286U JP S62170503 U JPS62170503 U JP S62170503U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- reflecting mirror
- moving device
- laser
- detaches
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 description 2
Landscapes
- Electron Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案の一実施例の電子線描画装置の
試料台部を示す縦断面図、第２図は他の実施例を
示す電子線描画装置の試料台部を示す平面図であ
る。 ２，３，４…試料台、５…カセツト、６…試料
、９…レーザ干渉測長計、１１…鏡、１２…試料
交換装置。
試料台部を示す縦断面図、第２図は他の実施例を
示す電子線描画装置の試料台部を示す平面図であ
る。 ２，３，４…試料台、５…カセツト、６…試料
、９…レーザ干渉測長計、１１…鏡、１２…試料
交換装置。
Claims (1)
- 【実用新案登録請求の範囲】 １ 試料と一体となり試料移動台上に試料を着脱
する試料保持具に、試料台上の試料位置を測定す
るレーザ干渉計測長光の反射鏡を設けたことを特
徴とする試料移動装置。 ２ 請求の範囲第１項において、レーザー干渉測
長光が、反射鏡上で移動しないように構成したこ
とを特徴とする試料移動装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744286U JPS62170503U (ja) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744286U JPS62170503U (ja) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170503U true JPS62170503U (ja) | 1987-10-29 |
Family
ID=30887145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5744286U Pending JPS62170503U (ja) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170503U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014173885A (ja) * | 2013-03-06 | 2014-09-22 | Ebara Corp | 測長計の設置構造 |
-
1986
- 1986-04-18 JP JP5744286U patent/JPS62170503U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014173885A (ja) * | 2013-03-06 | 2014-09-22 | Ebara Corp | 測長計の設置構造 |