JPS62170759U - - Google Patents
Info
- Publication number
- JPS62170759U JPS62170759U JP6085886U JP6085886U JPS62170759U JP S62170759 U JPS62170759 U JP S62170759U JP 6085886 U JP6085886 U JP 6085886U JP 6085886 U JP6085886 U JP 6085886U JP S62170759 U JPS62170759 U JP S62170759U
- Authority
- JP
- Japan
- Prior art keywords
- section
- susceptor
- heating
- bell gear
- reaction gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085886U JPS62170759U (mo) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6085886U JPS62170759U (mo) | 1986-04-21 | 1986-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170759U true JPS62170759U (mo) | 1987-10-29 |
Family
ID=30893654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6085886U Pending JPS62170759U (mo) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170759U (mo) |
-
1986
- 1986-04-21 JP JP6085886U patent/JPS62170759U/ja active Pending
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