JPS62171149U - - Google Patents

Info

Publication number
JPS62171149U
JPS62171149U JP6065786U JP6065786U JPS62171149U JP S62171149 U JPS62171149 U JP S62171149U JP 6065786 U JP6065786 U JP 6065786U JP 6065786 U JP6065786 U JP 6065786U JP S62171149 U JPS62171149 U JP S62171149U
Authority
JP
Japan
Prior art keywords
ion source
shutter
bellows
housing
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6065786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644005Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6065786U priority Critical patent/JPH0644005Y2/ja
Publication of JPS62171149U publication Critical patent/JPS62171149U/ja
Application granted granted Critical
Publication of JPH0644005Y2 publication Critical patent/JPH0644005Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP6065786U 1986-04-22 1986-04-22 イオン源本体着脱装置 Expired - Lifetime JPH0644005Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6065786U JPH0644005Y2 (ja) 1986-04-22 1986-04-22 イオン源本体着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6065786U JPH0644005Y2 (ja) 1986-04-22 1986-04-22 イオン源本体着脱装置

Publications (2)

Publication Number Publication Date
JPS62171149U true JPS62171149U (2) 1987-10-30
JPH0644005Y2 JPH0644005Y2 (ja) 1994-11-14

Family

ID=30893259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6065786U Expired - Lifetime JPH0644005Y2 (ja) 1986-04-22 1986-04-22 イオン源本体着脱装置

Country Status (1)

Country Link
JP (1) JPH0644005Y2 (2)

Also Published As

Publication number Publication date
JPH0644005Y2 (ja) 1994-11-14

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