JPS62180937U - - Google Patents
Info
- Publication number
- JPS62180937U JPS62180937U JP6955886U JP6955886U JPS62180937U JP S62180937 U JPS62180937 U JP S62180937U JP 6955886 U JP6955886 U JP 6955886U JP 6955886 U JP6955886 U JP 6955886U JP S62180937 U JPS62180937 U JP S62180937U
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- discharge tubes
- generating discharge
- ashing device
- switched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6955886U JPS62180937U (2) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6955886U JPS62180937U (2) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180937U true JPS62180937U (2) | 1987-11-17 |
Family
ID=30910398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6955886U Pending JPS62180937U (2) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180937U (2) |
-
1986
- 1986-05-08 JP JP6955886U patent/JPS62180937U/ja active Pending
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