JPS62186151U - - Google Patents
Info
- Publication number
- JPS62186151U JPS62186151U JP7388286U JP7388286U JPS62186151U JP S62186151 U JPS62186151 U JP S62186151U JP 7388286 U JP7388286 U JP 7388286U JP 7388286 U JP7388286 U JP 7388286U JP S62186151 U JPS62186151 U JP S62186151U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- exposed object
- pattern holder
- light
- exposure apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388286U JPS62186151U (mo) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388286U JPS62186151U (mo) | 1986-05-19 | 1986-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186151U true JPS62186151U (mo) | 1987-11-26 |
Family
ID=30918603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7388286U Pending JPS62186151U (mo) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186151U (mo) |
-
1986
- 1986-05-19 JP JP7388286U patent/JPS62186151U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62186151U (mo) | ||
| JPH0392028U (mo) | ||
| JPS62164358U (mo) | ||
| JPS63115213U (mo) | ||
| JPS63178320U (mo) | ||
| JPS6033342U (ja) | フィルム拡大装置 | |
| JPS6443343U (mo) | ||
| JPS6382933U (mo) | ||
| JPS63187468U (mo) | ||
| JPS606148U (ja) | 投影露光装置 | |
| JPH0468518U (mo) | ||
| JPS61153002U (mo) | ||
| JPS5850414U (ja) | 欠陥検出用投写装置 | |
| JPH0197333U (mo) | ||
| JPS61121446U (mo) | ||
| JPH03117829U (mo) | ||
| JPS5999436U (ja) | 照度モニタ | |
| JPS62201741U (mo) | ||
| JPS6310662U (mo) | ||
| JPS6321930U (mo) | ||
| JPS60107834A (ja) | 露光装置 | |
| JPH02102719U (mo) | ||
| JPS63105134U (mo) | ||
| JPH03127337U (mo) | ||
| JPS61151U (ja) | 縮小投影露光装置 |