JPS62186358U - - Google Patents
Info
- Publication number
- JPS62186358U JPS62186358U JP7388886U JP7388886U JPS62186358U JP S62186358 U JPS62186358 U JP S62186358U JP 7388886 U JP7388886 U JP 7388886U JP 7388886 U JP7388886 U JP 7388886U JP S62186358 U JPS62186358 U JP S62186358U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- ion source
- generate
- arsenic
- boron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- -1 arsenic halide Chemical class 0.000 claims 5
- 150000002500 ions Chemical class 0.000 claims 4
- 229910052785 arsenic Inorganic materials 0.000 claims 3
- 229910052796 boron Inorganic materials 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 239000011574 phosphorus Substances 0.000 claims 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 150000001639 boron compounds Chemical class 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052736 halogen Inorganic materials 0.000 claims 1
- 150000002367 halogens Chemical class 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388886U JPS62186358U (mo) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7388886U JPS62186358U (mo) | 1986-05-19 | 1986-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186358U true JPS62186358U (mo) | 1987-11-27 |
Family
ID=30918614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7388886U Pending JPS62186358U (mo) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186358U (mo) |
-
1986
- 1986-05-19 JP JP7388886U patent/JPS62186358U/ja active Pending
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