JPS62186432U - - Google Patents
Info
- Publication number
- JPS62186432U JPS62186432U JP1986075759U JP7575986U JPS62186432U JP S62186432 U JPS62186432 U JP S62186432U JP 1986075759 U JP1986075759 U JP 1986075759U JP 7575986 U JP7575986 U JP 7575986U JP S62186432 U JPS62186432 U JP S62186432U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing apparatus
- switching valve
- wafers
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986075759U JPS62186432U (2) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986075759U JPS62186432U (2) | 1986-05-20 | 1986-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186432U true JPS62186432U (2) | 1987-11-27 |
Family
ID=30922200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986075759U Pending JPS62186432U (2) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186432U (2) |
-
1986
- 1986-05-20 JP JP1986075759U patent/JPS62186432U/ja active Pending
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