JPS62190350U - - Google Patents
Info
- Publication number
- JPS62190350U JPS62190350U JP1986080004U JP8000486U JPS62190350U JP S62190350 U JPS62190350 U JP S62190350U JP 1986080004 U JP1986080004 U JP 1986080004U JP 8000486 U JP8000486 U JP 8000486U JP S62190350 U JPS62190350 U JP S62190350U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- arm
- arms
- semiconductor wafers
- handle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986080004U JPS62190350U (2) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986080004U JPS62190350U (2) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190350U true JPS62190350U (2) | 1987-12-03 |
Family
ID=30930410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986080004U Pending JPS62190350U (2) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190350U (2) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482674A (ja) * | 1990-07-23 | 1992-03-16 | Kaijirushi Hamono Kaihatsu Center:Kk | 把持具 |
-
1986
- 1986-05-26 JP JP1986080004U patent/JPS62190350U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482674A (ja) * | 1990-07-23 | 1992-03-16 | Kaijirushi Hamono Kaihatsu Center:Kk | 把持具 |
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