JPS62192633U - - Google Patents
Info
- Publication number
- JPS62192633U JPS62192633U JP8049386U JP8049386U JPS62192633U JP S62192633 U JPS62192633 U JP S62192633U JP 8049386 U JP8049386 U JP 8049386U JP 8049386 U JP8049386 U JP 8049386U JP S62192633 U JPS62192633 U JP S62192633U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- thin film
- high frequency
- frequency power
- generate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049386U JPS62192633U (2) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8049386U JPS62192633U (2) | 1986-05-27 | 1986-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192633U true JPS62192633U (2) | 1987-12-08 |
Family
ID=30931345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8049386U Pending JPS62192633U (2) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192633U (2) |
-
1986
- 1986-05-27 JP JP8049386U patent/JPS62192633U/ja active Pending
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