JPS62197628U - - Google Patents
Info
- Publication number
- JPS62197628U JPS62197628U JP8617086U JP8617086U JPS62197628U JP S62197628 U JPS62197628 U JP S62197628U JP 8617086 U JP8617086 U JP 8617086U JP 8617086 U JP8617086 U JP 8617086U JP S62197628 U JPS62197628 U JP S62197628U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- holding
- pair
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 10
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
図はこの考案の一実施例を示し、第１図はその
外観斜視図、第２図はウエハキヤリアを装着した
状態の断面図、第３図は半導体ウエハを移し換え
る状態の断面図である。
１……移し換え治具、２……ウエハキヤリア、
３……保持容器、３ａ……連結アーム、４……支
持部材、４ｃ……支持軸。
The figures show one embodiment of this invention, with FIG. 1 being a perspective view of its appearance, FIG. 2 being a sectional view of the device with a wafer carrier attached, and FIG. 3 being a sectional view of the device in which a semiconductor wafer is being transferred. 1...Transfer jig, 2...Wafer carrier,
3... Holding container, 3a... Connection arm, 4... Support member, 4c... Support shaft.
Claims (1)
着脱可能に装着する一対の保持容器と、この一対
の保持容器をそれぞれ回動可能に支持する支持部
材とを備え、 前記一対の保持容器内に空のウエハキヤリアと
半導体ウエハが収納されたウエハキヤリアとをそ
れぞれ収納配置し、前記保持容器を回動させて各
ウエハキヤリアの開口縁を互いに密着させ、この
状態で各ウエハキヤリアを傾けることにより、半
導体ウエハを空のウエハキヤリア内に移し換える
ようにしたことを特徴とする半導体ウエハの移し
換え治具。[Claims for Utility Model Registration] A device comprising: a pair of holding containers to which a wafer carrier for arranging and storing semiconductor wafers is removably attached; and a support member rotatably supporting each of the pair of holding containers; An empty wafer carrier and a wafer carrier containing semiconductor wafers are respectively housed and arranged in a holding container, and the holding container is rotated to bring the opening edges of each wafer carrier into close contact with each other, and in this state, each wafer carrier is A semiconductor wafer transfer jig, characterized in that the semiconductor wafer is transferred into an empty wafer carrier by tilting it.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617086U JPS62197628U (en) | 1986-06-06 | 1986-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8617086U JPS62197628U (en) | 1986-06-06 | 1986-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197628U true JPS62197628U (en) | 1987-12-16 |
Family
ID=30942234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8617086U Pending JPS62197628U (en) | 1986-06-06 | 1986-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197628U (en) |
-
1986
- 1986-06-06 JP JP8617086U patent/JPS62197628U/ja active Pending