JPH0265343U - - Google Patents
Info
- Publication number
- JPH0265343U JPH0265343U JP14413788U JP14413788U JPH0265343U JP H0265343 U JPH0265343 U JP H0265343U JP 14413788 U JP14413788 U JP 14413788U JP 14413788 U JP14413788 U JP 14413788U JP H0265343 U JPH0265343 U JP H0265343U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- holding stand
- transport device
- cover
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 2
- 230000032258 transport Effects 0.000 claims 3
- 230000007246 mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は保持台の平面図、第３図は動作を説明する
ための図である。
１：ベース、２：搬送機構、３：ケース、４：
保持台、５，１３：蝶番、６：キヤリア、７，８
：ガイド、９，１６：長溝、１０：摺動片、１１
：ウエハ、１２：カバー、１４：アーム、１５：
ブラケツト、１６，１８：ピン、１７：長溝。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, FIG. 2 is a plan view of a holding table, and FIG. 3 is a diagram for explaining the operation. 1: Base, 2: Transport mechanism, 3: Case, 4:
Holding stand, 5, 13: Hinge, 6: Carrier, 7, 8
: Guide, 9, 16: Long groove, 10: Sliding piece, 11
: Wafer, 12: Cover, 14: Arm, 15:
Bracket, 16, 18: pin, 17: long groove.
Claims (1)
を搬送機構により順次所定位置に移送する搬送装
置において、前記キヤリアを着脱可能に保持し、
かつ前記搬送装置ベースに回動可能に取り付けら
れた保持台と、前記キヤリアをその内部に収納し
、かつ前記搬送装置に開閉可能に取り付けられた
カバーと、該カバーの開閉動作に連動して前記保
持台が傾動するようにこのカバーと保持台とを連
結するためのアームとを備えたことを特徴とする
搬送装置用キヤリア収納機構。 In a transport device that sequentially transports a large number of flat moving members stored in a carrier to predetermined positions by a transport mechanism, the carrier is detachably held;
and a holding stand rotatably attached to the carrier base; a cover housing the carrier therein and attached to the carrier so as to be openable and closable; A carrier storage mechanism for a transport device, comprising an arm for connecting the cover and the holding stand so that the holding stand can be tilted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14413788U JPH0265343U (en) | 1988-11-04 | 1988-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14413788U JPH0265343U (en) | 1988-11-04 | 1988-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0265343U true JPH0265343U (en) | 1990-05-16 |
Family
ID=31411577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14413788U Pending JPH0265343U (en) | 1988-11-04 | 1988-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0265343U (en) |
-
1988
- 1988-11-04 JP JP14413788U patent/JPH0265343U/ja active Pending
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