JPS62201639U - - Google Patents
Info
- Publication number
- JPS62201639U JPS62201639U JP1986089241U JP8924186U JPS62201639U JP S62201639 U JPS62201639 U JP S62201639U JP 1986089241 U JP1986089241 U JP 1986089241U JP 8924186 U JP8924186 U JP 8924186U JP S62201639 U JPS62201639 U JP S62201639U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- vacuum chuck
- guide pins
- receiving
- rocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
図は、本考案による受取装置の一例を示す要部
の構成図である。
４……真空チヤツク、５……穴、６……シリコ
ンウエハ、９……揺動板、１１……ガイドピン、
１２……ばね、１３……受板、１４……受け部、
１６，１７……近接センサ。
The figure is a configuration diagram of main parts showing an example of a receiving device according to the present invention. 4... Vacuum chuck, 5... Hole, 6... Silicon wafer, 9... Rocking plate, 11... Guide pin,
12... Spring, 13... Receiving plate, 14... Receiving part,
16, 17... Proximity sensor.
Claims (1)
保持され、真空チヤツク内部から噴出する流体に
よつて真空チヤツクから離脱せしめられる被加工
物の受取装置であつて、真空チヤツクに対し所定
の間隔で揺動可能に配置された揺動板と、この揺
動板に垂直な方向に摺動可能に支持された複数の
ガイドピンと、これらのガイドピンの一端に揺動
板と平行に固定され、一端にコの字状の受け部が
形成された受板と、揺動板と受板の間に位置する
ようにガイドピンに挿着され、受板が揺動板から
離間するように付勢するばねと、揺動板に固定さ
れ、受板の位置を検出する一対の検出手段とを設
けたことを特徴とする被加工物の受取装置。 A workpiece receiving device that is held by a vacuum chuck with a suction surface arranged almost vertically and is separated from the vacuum chuck by fluid jetted from inside the vacuum chuck, and is shaken at a predetermined interval with respect to the vacuum chuck. A movably disposed rocking plate, a plurality of guide pins slidably supported in a direction perpendicular to the rocking plate, and a plurality of guide pins fixed to one end of these guide pins in parallel with the rocking plate, and a plurality of guide pins supported at one end in parallel with the rocking plate. a receiving plate having a U-shaped receiving portion formed therein; a spring inserted into the guide pin so as to be positioned between the swinging plate and the receiving plate, and urging the receiving plate to move away from the swinging plate; 1. A workpiece receiving device comprising a pair of detection means fixed to a swing plate and detecting the position of the receiving plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986089241U JPS62201639U (en) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986089241U JPS62201639U (en) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201639U true JPS62201639U (en) | 1987-12-22 |
Family
ID=30948052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986089241U Pending JPS62201639U (en) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201639U (en) |
-
1986
- 1986-06-13 JP JP1986089241U patent/JPS62201639U/ja active Pending
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