JPS6221000Y2 - - Google Patents
Info
- Publication number
- JPS6221000Y2 JPS6221000Y2 JP3599882U JP3599882U JPS6221000Y2 JP S6221000 Y2 JPS6221000 Y2 JP S6221000Y2 JP 3599882 U JP3599882 U JP 3599882U JP 3599882 U JP3599882 U JP 3599882U JP S6221000 Y2 JPS6221000 Y2 JP S6221000Y2
- Authority
- JP
- Japan
- Prior art keywords
- gallium
- quartz tube
- heating element
- shield plate
- heat shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 17
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 11
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 9
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims description 9
- 229910052733 gallium Inorganic materials 0.000 claims description 9
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000012159 carrier gas Substances 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910001195 gallium oxide Inorganic materials 0.000 description 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3599882U JPS58138333U (ja) | 1982-03-15 | 1982-03-15 | ガリウム拡散装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3599882U JPS58138333U (ja) | 1982-03-15 | 1982-03-15 | ガリウム拡散装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58138333U JPS58138333U (ja) | 1983-09-17 |
| JPS6221000Y2 true JPS6221000Y2 (mo) | 1987-05-28 |
Family
ID=30047453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3599882U Granted JPS58138333U (ja) | 1982-03-15 | 1982-03-15 | ガリウム拡散装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58138333U (mo) |
-
1982
- 1982-03-15 JP JP3599882U patent/JPS58138333U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58138333U (ja) | 1983-09-17 |
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