JPS6226034U - - Google Patents
Info
- Publication number
- JPS6226034U JPS6226034U JP11588685U JP11588685U JPS6226034U JP S6226034 U JPS6226034 U JP S6226034U JP 11588685 U JP11588685 U JP 11588685U JP 11588685 U JP11588685 U JP 11588685U JP S6226034 U JPS6226034 U JP S6226034U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- view
- platform
- quartz board
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案に係る半導体ウエハーの移し替
え装置の一実施例の側面図、第２図はその正面図
、第３図は挾持片部分のみを示す一部を切欠いた
平面図、第４図はその側面図、第５図はウエハー
受けの斜視図、第６図はその断面図、第７図はウ
エハーを挾持片で挾持する状態を示す側面図、第
８図はウエハーと挾持片の関係を示す側面図、第
９図は作業順序を示す側面図、第１０図は従来装
置の縦断側面図、第１１図は挾持状態を示す縦断
側面図、第１２図はウエハーの支持状態を示す正
面図である。
１…ウエハーキヤリヤ、３…ウエハー、１５…
ウエハー受け、１７…嵌入溝、３４…挾持片、３
５…挾持溝、５０…乗せ台、５１…石英ボード。
FIG. 1 is a side view of an embodiment of the semiconductor wafer transfer device according to the present invention, FIG. 2 is a front view thereof, FIG. 3 is a partially cutaway plan view showing only the holding piece, and FIG. The figure is a side view, FIG. 5 is a perspective view of the wafer holder, FIG. 6 is a sectional view thereof, FIG. 7 is a side view showing the wafer being held between the holding pieces, and FIG. 8 is a view of the wafer and the holding piece. FIG. 9 is a side view showing the relationship, FIG. 9 is a side view showing the working order, FIG. 10 is a vertical side view of the conventional device, FIG. 11 is a vertical side view showing the clamping state, and FIG. 12 is the wafer support state. It is a front view. 1...Wafer carrier, 3...Wafer, 15...
Wafer holder, 17... Insertion groove, 34... Holding piece, 3
5...Holding groove, 50...Place, 51...Quartz board.
Claims (1)
して前後進させる乗せ台５０と、上面にウエハー
３を嵌入させる多数の嵌入溝１７，１７，…を平
行に設けた石英ボード５１又はウエハーキヤリヤ
１内を昇降するウエハー受け１５と、乗せ台５０
の上方に設置してウエハー３の下面を支持する多
数の挾持溝３５，３５，…を対向位置に設けた回
動開閉する対向した挾持片３４，３４とから成る
半導体ウエハーの移し替え装置。 A platform 50 on which a quartz board 51 and a wafer carrier 1 are placed and moved back and forth, and a quartz board 51 or wafer carrier 1 having a number of parallel fitting grooves 17, 17, . A wafer receiver 15 that moves up and down inside, and a platform 50
A semiconductor wafer transfer device comprising opposed clamping pieces 34, 34 that are rotatably opened and closed and have a large number of clamping grooves 35, 35, .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11588685U JPS6226034U (en) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11588685U JPS6226034U (en) | 1985-07-30 | 1985-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6226034U true JPS6226034U (en) | 1987-02-17 |
Family
ID=30999961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11588685U Pending JPS6226034U (en) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6226034U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354349A (en) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | Wafer transfer device |
-
1985
- 1985-07-30 JP JP11588685U patent/JPS6226034U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354349A (en) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | Wafer transfer device |
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