JPS62276796A - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS62276796A
JPS62276796A JP11746587A JP11746587A JPS62276796A JP S62276796 A JPS62276796 A JP S62276796A JP 11746587 A JP11746587 A JP 11746587A JP 11746587 A JP11746587 A JP 11746587A JP S62276796 A JPS62276796 A JP S62276796A
Authority
JP
Japan
Prior art keywords
microwave
microwaves
waveguide
source device
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11746587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217917B2 (de
Inventor
児玉　仁史
名取　茂
勲 正田
大貫　一志
馬込　一男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11746587A priority Critical patent/JPS62276796A/ja
Publication of JPS62276796A publication Critical patent/JPS62276796A/ja
Publication of JPH0217917B2 publication Critical patent/JPH0217917B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP11746587A 1987-05-14 1987-05-14 マイクロ波放電光源装置 Granted JPS62276796A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11746587A JPS62276796A (ja) 1987-05-14 1987-05-14 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11746587A JPS62276796A (ja) 1987-05-14 1987-05-14 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS62276796A true JPS62276796A (ja) 1987-12-01
JPH0217917B2 JPH0217917B2 (de) 1990-04-23

Family

ID=14712356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11746587A Granted JPS62276796A (ja) 1987-05-14 1987-05-14 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS62276796A (de)

Also Published As

Publication number Publication date
JPH0217917B2 (de) 1990-04-23

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