JPS6228357U - - Google Patents
Info
- Publication number
- JPS6228357U JPS6228357U JP11815585U JP11815585U JPS6228357U JP S6228357 U JPS6228357 U JP S6228357U JP 11815585 U JP11815585 U JP 11815585U JP 11815585 U JP11815585 U JP 11815585U JP S6228357 U JPS6228357 U JP S6228357U
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- electron microscope
- view
- microscope equipped
- main part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は従来のＸ線分析装置を取り付けた透過
形電子顕微鏡の鏡体要部縦断面図、第２図は本考
案を取り付けた透過形電子顕微鏡の鏡体要部縦断
面図、第３図は本考案を取り付けた走査形電子顕
微鏡の鏡体要部縦断面図である。
１……偏向コイル、２……Ｘ線検出器、３……
コリメータ、４……対物レンズ、５……試料、６
……コールドトラツプ、７……コールドトラツプ
用熱伝導体、８……液体窒素タンク、９……試料
ホルダ、１０……コリメータ用熱伝導体、１１…
…断熱スペーサ。
Figure 1 is a vertical sectional view of the main part of the transmission electron microscope equipped with a conventional X-ray analyzer, Figure 2 is a longitudinal sectional view of the main part of the transmission electron microscope equipped with the present invention, and Figure 3 is a longitudinal sectional view of the main part of the transmission electron microscope equipped with the present invention. The figure is a vertical cross-sectional view of the main body of a scanning electron microscope equipped with the present invention. 1... Deflection coil, 2... X-ray detector, 3...
Collimator, 4... Objective lens, 5... Sample, 6
... Cold trap, 7 ... Heat conductor for cold trap, 8 ... Liquid nitrogen tank, 9 ... Sample holder, 10 ... Heat conductor for collimator, 11 ...
...Insulating spacer.
Claims (1)
において、前記コリメータに冷却機能を設けたこ
とを特徴とするＸ線分析装置。 An X-ray analysis device comprising an X-ray detector and a collimator, characterized in that the collimator is provided with a cooling function.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11815585U JPS6228357U (en) | 1985-08-02 | 1985-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11815585U JPS6228357U (en) | 1985-08-02 | 1985-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6228357U true JPS6228357U (en) | 1987-02-20 |
Family
ID=31004340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11815585U Pending JPS6228357U (en) | 1985-08-02 | 1985-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6228357U (en) |
-
1985
- 1985-08-02 JP JP11815585U patent/JPS6228357U/ja active Pending
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