JPS6230229U - - Google Patents
Info
- Publication number
- JPS6230229U JPS6230229U JP1985121848U JP12184885U JPS6230229U JP S6230229 U JPS6230229 U JP S6230229U JP 1985121848 U JP1985121848 U JP 1985121848U JP 12184885 U JP12184885 U JP 12184885U JP S6230229 U JPS6230229 U JP S6230229U
- Authority
- JP
- Japan
- Prior art keywords
- optical path
- mirror
- switching mirror
- workpiece
- marking device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000010330 laser marking Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Description
第１図は本考案によるレーザマーキング装置の
一実施例を示す構成図である。
１，２，３…入力部光軸調整ミラー、４…ビー
ムエキスパンダ、５…調整ミラー、６…固定ミラ
ー、７…走査ミラー（Ｘ軸）、８…走査ミラー（
Ｙ軸）、９…集光レンズ、１０…光路切換えミラ
ー、１１，１２…上部折返しミラー、１３，１４
…下部折返しミラー、１５…ウエハ、１６…駆動
モータ、１７…レーザ発振器。
FIG. 1 is a block diagram showing an embodiment of a laser marking device according to the present invention. 1, 2, 3... Input section optical axis adjustment mirror, 4... Beam expander, 5... Adjustment mirror, 6... Fixed mirror, 7... Scanning mirror (X axis), 8... Scanning mirror (
Y axis), 9... Condensing lens, 10... Optical path switching mirror, 11, 12... Upper folding mirror, 13, 14
... lower folding mirror, 15 ... wafer, 16 ... drive motor, 17 ... laser oscillator.
Claims (1)
て文字や図形を刻み込むレーザマーキング装置に
おいて、 走査ミラーと集光レンズの後に設けられ、レー
ザ光の光路を切換える光路切換ミラーと、 光路切換ミラーを電気信号により駆動する駆動
手段と、 光路切換ミラーの後に設けられ、光路切換ミラ
ーにより切換えられ、入射したレーザ光をそれぞ
れ被加工物の表面と裏面に導くための相互に独立
した２系統の光路を有することを特徴とするレー
ザマーキング装置。[Scope of claim for utility model registration] In a laser marking device that scans a laser beam on the surface or cover of a workpiece to inscribe characters or figures, an optical path that is provided after a scanning mirror and a condensing lens and that switches the optical path of the laser beam. A switching mirror, a driving means for driving the optical path switching mirror using an electric signal, and a reciprocal device provided after the optical path switching mirror for guiding the incident laser light to the front and back surfaces of the workpiece, respectively. A laser marking device characterized by having two independent optical paths.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985121848U JPS6230229U (en) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985121848U JPS6230229U (en) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6230229U true JPS6230229U (en) | 1987-02-23 |
Family
ID=31011492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985121848U Pending JPS6230229U (en) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230229U (en) |
-
1985
- 1985-08-07 JP JP1985121848U patent/JPS6230229U/ja active Pending