JPS6231101A - Method of forming resistor for thermal recording head - Google Patents

Method of forming resistor for thermal recording head

Info

Publication number
JPS6231101A
JPS6231101A JP60169834A JP16983485A JPS6231101A JP S6231101 A JPS6231101 A JP S6231101A JP 60169834 A JP60169834 A JP 60169834A JP 16983485 A JP16983485 A JP 16983485A JP S6231101 A JPS6231101 A JP S6231101A
Authority
JP
Japan
Prior art keywords
resistor
recording head
thermal recording
trimming
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60169834A
Other languages
Japanese (ja)
Inventor
和彦 阿藤
浩 大津
村山 英晴
森藤 茂則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60169834A priority Critical patent/JPS6231101A/en
Publication of JPS6231101A publication Critical patent/JPS6231101A/en
Pending legal-status Critical Current

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  • Electronic Switches (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔発明の利用分野〕 プぐ zxn日 け    鯛す自五 口= 14シ、
八 −1しφ M&’装 自i七C七かM−1r IC
り感熱記録ヘッドの品質向上を図るに好適な高精度抵抗
を形成する方法に関するものである。
[Detailed description of the invention] [Field of application of the invention]
8 -1 φ M&'So-i7C7 or M-1r IC
The present invention relates to a method of forming a high-precision resistor suitable for improving the quality of a thermal recording head.

〔発明の背景〕[Background of the invention]

ファクシミリや感熱プリンタに使用される感熱記録ヘッ
ドは、第1図に示すように絶縁基板1に共通電極2より
、抵抗接続用端子電極5を設け、他方の個別電極4を端
子電極Sの間に設け、抵抗体5を直線状に連続して設け
て形成されている。この様な構成の感熱ヘッドにおいて
は従来の2値化出力画像では、発熱抵抗体の電気特性、
すなわち抵抗素子Et1 、82 、・・・の抵抗値の
バラツキが±15〜20チであっても、トリミング修正
することなく実用に供されていた。
As shown in FIG. 1, a thermal recording head used in a facsimile or a thermal printer has a terminal electrode 5 for connecting a resistor connected to a common electrode 2 on an insulating substrate 1, and the other individual electrode 4 is placed between a terminal electrode S. The resistor elements 5 are continuously provided in a straight line. In a thermal head with such a configuration, in the conventional binary output image, the electrical characteristics of the heating resistor,
In other words, even if the resistance values of the resistive elements Et1, 82, .

近年のカラープリントや多値化複写の傾向は、感熱記録
ヘッドの高精度化を必要とし、抵抗体の微細化と同時に
、上記電気特性のバラツキ量の低減が不可欠となった。
The recent trends in color printing and multi-level copying require higher precision in thermal recording heads, and it has become essential to miniaturize resistors and at the same time reduce the amount of variation in electrical characteristics.

しかし、感熱記録ヘッドの抵抗材料面からの上記電気特
性の改善はかなり困難である。このためレーザトリミン
グによる修正法が検討されている。第1図の抵抗R1に
従来と同じ様にトリミングをすることにより、抵抗値は
精度が上げられるが、発熱分布が変ったり、寿命を劣化
させるなどの問題があり、実用化に適していt7い。
However, it is quite difficult to improve the electrical characteristics of the thermal recording head from the viewpoint of the resistive material. For this reason, a correction method using laser trimming is being considered. By trimming the resistor R1 in Figure 1 in the same way as before, the accuracy of the resistance value can be improved, but there are problems such as changing the heat generation distribution and deteriorating the life, making it unsuitable for practical use. .

レーザトリミングの手法としては従来、抵抗体材料への
影響を少くするため、rIC抵抗体のトリミング方法J
($開昭52−117087号公報)、「レーザトリミ
ング方法」(特開昭51−27195号公報)があるが
、一般の膜折抗素子のトリミングを対象としたもので、
感熱記録ヘッドの抵抗体では発熱分布が悪くなってしま
う。
Conventionally, laser trimming has been performed using rIC resistor trimming method J in order to reduce the effect on the resistor material.
(JP-A-52-117087) and “Laser trimming method” (JP-A-51-27195), which are aimed at trimming general membrane folded resistor elements.
The heat distribution in the resistor of the thermal recording head is poor.

また、抵抗素子を連続した抵抗体から切断分離する方法
も報告されている([子材料、昭和60年5月号P 1
25−P 129 )が、抵抗値のトリミングは従来の
方法で行っており、発熱分布に対しての考慮はなされて
いない。
In addition, a method of cutting and separating a resistive element from a continuous resistor has also been reported ([Child Materials, May 1985 issue, P1
25-P 129 ), the resistance value is trimmed using a conventional method, and no consideration is given to the heat generation distribution.

〔発明の目的〕 本発明の目的は、感熱記録ヘッドの発熱抵抗体の電気的
特性バラツキを、主要発熱部に影響を与えることなく、
倫減できるトリミング方法を提供することにある。
[Object of the Invention] An object of the present invention is to eliminate variations in the electrical characteristics of the heat generating resistor of a thermal recording head without affecting the main heat generating part.
The purpose is to provide a trimming method that reduces hair loss.

〔発明の概要〕[Summary of the invention]

本発明は感熱記録ヘッドの抵抗素子が直線状に形成され
ることに着目し、抵抗素子を連続して形成した後、該抵
抗体の抵抗値を測定しつつ。
The present invention focuses on the fact that the resistance elements of a thermal recording head are formed in a straight line, and after forming the resistance elements in succession, the resistance value of the resistance element is measured.

所望の抵抗値になるまで、次の抵抗素子との抵抗素子間
の抵抗材料をレーザー等により除去してトリミングを行
い、次に隣接する抵抗素子の抵抗値を測定し、同様のト
リミングを行う。この操作を繰返すことにより抵抗素子
の主要部に切削溝等を残すことなく抵抗値バラツキを大
巾に低減しようとするものである。
Trimming is performed by removing the resistive material between the next resistive element and the next resistive element using a laser or the like until a desired resistance value is reached, then the resistance value of the adjacent resistive element is measured, and the same trimming is performed. By repeating this operation, it is intended to greatly reduce the variation in resistance value without leaving cut grooves or the like in the main part of the resistance element.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を第2図、第5図により説明する
。第2図は本発明の感熱記録ヘッドを部分的に拡大した
平面図、第5図は第2図の断面図である。第2図、第5
図において、1は絶縁基板であり、2は基板上に形成し
た共通電極、6は共通電極2から分岐した抵抗接続用独
立電極、7は図示していないが、駆動回路に接続される
側に設けられた抵抗接続用独立電極で、Bは端子電極6
と独立電極70間に設けられた抵抗体である。
Embodiments of the present invention will be described below with reference to FIGS. 2 and 5. FIG. 2 is a partially enlarged plan view of the thermal recording head of the present invention, and FIG. 5 is a sectional view of FIG. 2. Figures 2 and 5
In the figure, 1 is an insulating substrate, 2 is a common electrode formed on the substrate, 6 is an independent electrode for resistance connection branched from the common electrode 2, and 7 is not shown, but on the side connected to the drive circuit. B is the terminal electrode 6 of the independent electrode for resistance connection provided.
This is a resistor provided between the independent electrode 70 and the independent electrode 70.

次に本発明の抵抗体のトリミング方法について詳述する
。第2図において、共通電極2から分岐した端子電極6
と駆動回路に接続される抵抗接続用独立電極70間に形
成された厚膜抵抗体8の一方の端部8人をレーザ光等に
より、切削溝9人を形成して分離した後、抵抗体8Bの
電極に接続した計測器により、抵抗値を計測しつつ、レ
ーザー光等により、切削溝9Bを形成し、抵抗体8Bの
抵抗値が所定の抵抗値になった時切削を停止する。次に
抵抗体8Cの両側の電極に接続を切替え抵抗値を計測し
つつ、レーザー光等により、切削@pcを形成し、抵抗
体8Cの抵抗値が所定の値となった時、切削を停止する
。以下の抵抗体に対しても順次同様のトリミングを行っ
て、抵抗値を調整し、高精度な感熱記録ヘッド用発熱抵
抗体を得ることができる。ここで得られた発熱抵抗素子
は各々完全に分離されてはいないが、このことによる抵
抗体の発熱は僅少であり、発熱抵抗体8B、8C。
Next, a method for trimming a resistor according to the present invention will be described in detail. In FIG. 2, a terminal electrode 6 branched from the common electrode 2
After separating 8 ends of the thick film resistor 8 formed between the resistor connection independent electrode 70 connected to the drive circuit and the drive circuit by forming 9 cutting grooves with a laser beam or the like, the resistor A cutting groove 9B is formed using a laser beam or the like while measuring the resistance value using a measuring device connected to the electrode 8B, and cutting is stopped when the resistance value of the resistor 8B reaches a predetermined resistance value. Next, change the connections to the electrodes on both sides of the resistor 8C, measure the resistance value, and form a cutting@pc using a laser beam, etc., and stop cutting when the resistance value of the resistor 8C reaches a predetermined value. do. Similar trimming is sequentially performed on the following resistors to adjust their resistance values, thereby making it possible to obtain a highly accurate heating resistor for a thermal recording head. Although the heating resistor elements obtained here are not completely separated from each other, the heat generation of the resistors due to this is slight, and the heating resistors 8B and 8C.

8D・・・・・・は良好な発熱特性を示す。8D... exhibits good heat generation characteristics.

次に具体的実施例について説明する。Next, specific examples will be described.

グレーズセラミック基板上に厚膜抵抗ペーストを印刷、
乾燥、焼成し、通常の方法でエツチングを行って共通電
極2、端子電極6、独立電極7を形成した。次に厚膜抵
抗ペーストを印刷。
Printing thick film resistor paste on glazed ceramic substrate,
The common electrode 2, the terminal electrode 6, and the independent electrode 7 were formed by drying, baking, and etching using a conventional method. Next, print thick film resistor paste.

乾燥、焼成し、直線状に抵抗体8を形成した。It was dried and fired to form a linear resistor 8.

抵抗素子数は480本である。この抵抗体なYAGレー
ザ光を用いて前記の方法にてトリミングを行い、±25
Jの抵抗値を得た。YAGレーザ光のスポット径を変え
て5μm〜60μm の切削巾のトリミングを行った感
熱ヘッドを作成し、印画を行った結果、5〜40μmの
切削巾のとき、切削部による印画の淡色部が裸眼では見
えなくなり、印画品質が良好であった。
The number of resistance elements is 480. Using this resistive YAG laser beam, trimming was performed using the method described above, and ±25
The resistance value of J was obtained. A thermal head was created with a cutting width of 5 μm to 60 μm trimmed by changing the spot diameter of the YAG laser beam, and as a result of printing, it was found that when the cutting width was 5 to 40 μm, the light colored parts of the print by the cutting part were visible to the naked eye. It was no longer visible, and the print quality was good.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、前記の如く感熱記録ヘッドの発熱抵抗
体の電気的特性バラツキを、発熱素子間に切削溝を入れ
ることKより、抵抗体の主要発熱部に影響を与えること
なく、大巾に低減で微るので、発熱分布の安定化、印画
品質の向上と共に、発燃抵抗体の信頼性も向上させる効
果がある。
According to the present invention, variations in the electrical characteristics of the heat generating resistor of a thermal recording head can be reduced by cutting grooves between the heat generating elements without affecting the main heat generating part of the resistor. This has the effect of stabilizing the distribution of heat generation, improving printing quality, and improving the reliability of the combustible resistor.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の感熱記録ヘッドの部分拡大した平面図、
第2図は本発明を適用した感熱記録ヘッドの部分拡大図
、第5図は第2図の縦断面図である。 1・・・絶縁基板、2・・・共通電極、6・・・共通電
極から分岐した端子電極、7・・・駆動回路への抵抗接
続用独立電極、8・・・発熱抵抗体全体、8A・・・抵
抗体端部、aB 、 sC、8D 、 sE・・・端子
電極に対応する発熱抵抗体、9A 、 9B 、 9C
、?D・・・レーザー光等による抵抗体切削溝。
Figure 1 is a partially enlarged plan view of a conventional thermal recording head.
FIG. 2 is a partially enlarged view of a thermal recording head to which the present invention is applied, and FIG. 5 is a longitudinal sectional view of FIG. 2. DESCRIPTION OF SYMBOLS 1... Insulated substrate, 2... Common electrode, 6... Terminal electrode branched from the common electrode, 7... Independent electrode for resistance connection to drive circuit, 8... Entire heating resistor, 8A ...Resistor end, aB, sC, 8D, sE...Heating resistor corresponding to terminal electrode, 9A, 9B, 9C
,? D...Resistance body cutting groove by laser beam etc.

Claims (1)

【特許請求の範囲】 1、絶縁基板上に一方に共通電極を設け、この共通電極
から複数本り抵抗接続用端子電極を設けこれと対抗する
側に複数本の独立電極を設け、両電極間に抵抗体を形成
する感熱ヘッド用抵抗体において、抵抗体を対抗する電
極毎に独立せず、連続して形成し、しかるのち、隣り合
う電極間より抵抗体へレーザー等により、所定の抵抗値
になるまでトリミングを行うことを特徴とする感熱ヘッ
ド用抵抗体の形成方法。 2、特許請求の範囲第1項記載の感熱ヘッドにおいて、
トリミング切削溝を5〜40μmとしたことを特徴とす
る感熱ヘッド用抵抗体の形成方法。
[Claims] 1. A common electrode is provided on one side on an insulating substrate, a plurality of resistor connection terminal electrodes are provided from this common electrode, a plurality of independent electrodes are provided on the opposite side, and a plurality of independent electrodes are provided between the two electrodes. In a resistor for a thermal head in which a resistor is formed on each opposing electrode, the resistor is formed continuously rather than independently for each opposing electrode, and then a laser or the like is applied to the resistor from between adjacent electrodes to a predetermined resistance value. 1. A method for forming a resistor for a thermal head, the method comprising trimming the resistor until it becomes . 2. In the thermal head according to claim 1,
A method for forming a resistor for a thermal head, characterized in that the trimming cut groove is 5 to 40 μm.
JP60169834A 1985-08-02 1985-08-02 Method of forming resistor for thermal recording head Pending JPS6231101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60169834A JPS6231101A (en) 1985-08-02 1985-08-02 Method of forming resistor for thermal recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60169834A JPS6231101A (en) 1985-08-02 1985-08-02 Method of forming resistor for thermal recording head

Publications (1)

Publication Number Publication Date
JPS6231101A true JPS6231101A (en) 1987-02-10

Family

ID=15893782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60169834A Pending JPS6231101A (en) 1985-08-02 1985-08-02 Method of forming resistor for thermal recording head

Country Status (1)

Country Link
JP (1) JPS6231101A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01247171A (en) * 1988-03-29 1989-10-03 Hitachi Ltd Thermosensitive head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01247171A (en) * 1988-03-29 1989-10-03 Hitachi Ltd Thermosensitive head

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