JPS6232309U - - Google Patents
Info
- Publication number
- JPS6232309U JPS6232309U JP12441385U JP12441385U JPS6232309U JP S6232309 U JPS6232309 U JP S6232309U JP 12441385 U JP12441385 U JP 12441385U JP 12441385 U JP12441385 U JP 12441385U JP S6232309 U JPS6232309 U JP S6232309U
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- line image
- image sensor
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の一実施例の全体の系統図、第
２図はラインイメージセンサＡ１，Ｂ１の受光面
を示す図、第３図は本考案の他の実施例の一部の
系統図、第４図は第３図に示された実施例におけ
るラインイメージセンサＡ１，Ｂ１の受光面を示
す図、第５図は先行技術の系統図である。
１１…光源手段、１２…光源、１３…遮光部材
、１４…スリツト、１５…シリンドリカルレンズ
、１６…被測定物、１７…セルフオツクレンズア
レイ、１８…ハーフミラー、２１，３７…演算回
路、２２…移動手段、３１…セレクタ、３２…コ
ンパレータ、３８…極性反転回路、Ａ１，Ｂ１…
ラインイメージセンサ。
Fig. 1 is an overall system diagram of one embodiment of the present invention, Fig. 2 is a diagram showing the light receiving surfaces of line image sensors A1 and B1, and Fig. 3 is a partial system diagram of another embodiment of the present invention. , FIG. 4 is a diagram showing the light receiving surfaces of the line image sensors A1 and B1 in the embodiment shown in FIG. 3, and FIG. 5 is a system diagram of the prior art. DESCRIPTION OF SYMBOLS 11... Light source means, 12... Light source, 13... Light blocking member, 14... Slit, 15... Cylindrical lens, 16... Measured object, 17... Self-occurring lens array, 18... Half mirror, 21, 37... Arithmetic circuit, 22... Moving means, 31...Selector, 32...Comparator, 38...Polarity inversion circuit, A1, B1...
Line image sensor.
Claims (1)
段と、 被測定物上の光像を検出するための検出セルが
配列されて構成される、一対のラインイメージセ
ンサと、 被測定物上の光像を前記検出セルに結像する光
学手段と、 ラインイメージセンサからの各出力をそれぞれ
受信して、前記光像のラインイメージセンサとの
間の距離に対応した値を算出する手段と、 光源手段と、ラインイメージセンサと、光学手
段とを一体的にしたままで、被測定物を相対的に
移動する移動手段とを含むことを特徴とする平面
度測定装置。[Claims for Utility Model Registration] A pair of line image sensors comprising a light source means for irradiating an object to be measured with elongated slit light and a detection cell for detecting a light image on the object to be measured. , an optical means for forming a light image on the object to be measured on the detection cell; and receiving each output from the line image sensor and calculating a value corresponding to the distance between the light image and the line image sensor. 1. A flatness measuring device comprising: calculating means; and moving means for relatively moving an object to be measured while keeping a light source means, a line image sensor, and an optical means integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12441385U JPS6232309U (en) | 1985-08-13 | 1985-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12441385U JPS6232309U (en) | 1985-08-13 | 1985-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232309U true JPS6232309U (en) | 1987-02-26 |
Family
ID=31016400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12441385U Pending JPS6232309U (en) | 1985-08-13 | 1985-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232309U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213288U (en) * | 1988-03-17 | 1990-01-26 | ||
| JP2008309532A (en) * | 2007-06-13 | 2008-12-25 | Lasertec Corp | Three-dimensional measuring device and inspection device |
| JP2009139333A (en) * | 2007-12-10 | 2009-06-25 | Internatl Business Mach Corp <Ibm> | Macro inspection device, and macro inspection method |
| JP2010145230A (en) * | 2008-12-18 | 2010-07-01 | Disco Abrasive Syst Ltd | Height position measuring device of workpiece held on chuck table |
-
1985
- 1985-08-13 JP JP12441385U patent/JPS6232309U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0213288U (en) * | 1988-03-17 | 1990-01-26 | ||
| JP2008309532A (en) * | 2007-06-13 | 2008-12-25 | Lasertec Corp | Three-dimensional measuring device and inspection device |
| JP2009139333A (en) * | 2007-12-10 | 2009-06-25 | Internatl Business Mach Corp <Ibm> | Macro inspection device, and macro inspection method |
| JP2010145230A (en) * | 2008-12-18 | 2010-07-01 | Disco Abrasive Syst Ltd | Height position measuring device of workpiece held on chuck table |
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