JPS6232526U - - Google Patents
Info
- Publication number
- JPS6232526U JPS6232526U JP12481685U JP12481685U JPS6232526U JP S6232526 U JPS6232526 U JP S6232526U JP 12481685 U JP12481685 U JP 12481685U JP 12481685 U JP12481685 U JP 12481685U JP S6232526 U JPS6232526 U JP S6232526U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- exposure
- ultraviolet rays
- opening
- substrate support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
Description
第１図は本考案にかかる露光用半導体基板支持
具の一実施例を示す平面図、第２図はその断面図
である。
１……ウエーハデイスク、２……半導体ウエー
ハ、３……爪部、４……開口部、５……光線。
FIG. 1 is a plan view showing an embodiment of a semiconductor substrate support for exposure according to the present invention, and FIG. 2 is a sectional view thereof. DESCRIPTION OF SYMBOLS 1...Wafer disk, 2...Semiconductor wafer, 3...Claw portion, 4...Aperture, 5...Light beam.
Claims (1)
板とほぼ同じ大きさの開口部と、 前記半導体基板のレジスト塗布面をその周囲の
一部において複数箇所支持するように前記開口部
内に突出すると共に、露光光線が透過する材料で
形成された支持爪と、 を備えた露光用半導体基板支持具。 ２ 露光光線が紫外線であり、支持爪が紫外線を
通過させる透明体で形成されたものである実用新
案登録請求の範囲第１項記載の露光用半導体基板
支持具。[Claims for Utility Model Registration] 1. An opening approximately the same size as a resist-coated semiconductor substrate to be exposed; A semiconductor substrate support for exposure, comprising: a support claw that projects into the opening and is made of a material through which exposure light passes. 2. The semiconductor substrate support for exposure according to claim 1, wherein the exposure light is ultraviolet rays and the supporting claws are formed of a transparent material that allows ultraviolet rays to pass through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12481685U JPS6232526U (en) | 1985-08-14 | 1985-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12481685U JPS6232526U (en) | 1985-08-14 | 1985-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6232526U true JPS6232526U (en) | 1987-02-26 |
Family
ID=31017182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12481685U Pending JPS6232526U (en) | 1985-08-14 | 1985-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6232526U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0236888A (en) * | 1988-07-27 | 1990-02-06 | Kiyobumi Yokoyama | Trimming and corner-folding tool for sheet |
-
1985
- 1985-08-14 JP JP12481685U patent/JPS6232526U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0236888A (en) * | 1988-07-27 | 1990-02-06 | Kiyobumi Yokoyama | Trimming and corner-folding tool for sheet |
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