JPS6233313A - thin film magnetic head - Google Patents
thin film magnetic headInfo
- Publication number
- JPS6233313A JPS6233313A JP17230385A JP17230385A JPS6233313A JP S6233313 A JPS6233313 A JP S6233313A JP 17230385 A JP17230385 A JP 17230385A JP 17230385 A JP17230385 A JP 17230385A JP S6233313 A JPS6233313 A JP S6233313A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- conductor
- terminal
- substrate
- terminals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/403—Edge contacts; Windows or holes in the substrate having plural connections on the walls thereof
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は薄膜磁気ヘッドの構造に係り、#K。[Detailed description of the invention] [Field of application of the invention] The present invention relates to the structure of a thin film magnetic head #K.
薄膜素子を形成した基板から信号線を引き出すに好適な
薄膜磁気ヘッドの構造に関する。The present invention relates to the structure of a thin film magnetic head suitable for drawing out signal lines from a substrate on which thin film elements are formed.
従来の薄膜磁気ヘッドの信号線引き出し方法は実開昭5
8−69528号公報に記載のように薄膜素子か形成さ
れた基板(以下薄膜素子基板1と称す)と外部回路に接
続される信号線を持つ可撓性プリント基板2を別々に設
定しく第2図(α))各々の信号線を接続するには、第
2図(b)に示す様に多数の信号線を1本づつワイヤボ
ンダにてリード線5を接続している構造となっていた。The signal line extraction method for conventional thin-film magnetic heads was developed in 1973.
As described in Japanese Patent No. 8-69528, a substrate on which a thin film element is formed (hereinafter referred to as thin film element substrate 1) and a flexible printed circuit board 2 having signal lines connected to an external circuit are separately set. In order to connect each signal line (FIG. 2(a)), the structure was such that a large number of signal lines were connected one by one to a lead wire 5 using a wire bonder, as shown in FIG. 2(b).
このような構造においては、多素子高密度実装における
リード線接続に要する端末処理技術の高度化が必要とさ
れ、又接続箇所の増大による接続信頼性の低下や、配線
接続時間の増大が見込まれる。In such a structure, advanced terminal processing technology is required for lead wire connection in multi-element high-density packaging, and it is expected that connection reliability will decrease due to the increase in connection points and wiring connection time will increase. .
このようなll造を改善するには第5図(α)Ch)に
示す如く薄膜素子基板1と可撓性プリント基板2を多数
の信号線を一括して例えば抵抗圧着溶接や赤外線リフロ
ー半田方法にて直接接続することが可能である。しかし
この様な構造において例えば磁気テープ装置用ヘッドの
如(書き込みヘッドと読み出しヘッドを対向させるヘッ
ド構造の場合、薄膜素子基板1面を対向面とするのでプ
リント基板2つ厚さ分を逃がす構造を必要としヘッド構
造が複雑となることは必須である。In order to improve this structure, as shown in Figure 5 (α) Ch), the thin film element substrate 1 and the flexible printed circuit board 2 can be connected together by connecting a large number of signal lines, for example, by resistance crimp welding or infrared reflow soldering. It is possible to connect directly. However, in such a structure, for example, in the case of a head for a magnetic tape device (a head structure in which a write head and a read head are opposed to each other), one side of the thin film element substrate is used as the opposing surface, so a structure that allows the thickness of two printed circuit boards to escape is required. However, it is essential that the head structure is complicated.
第5図に示したヘッドを改善するには第4図(α)(b
)に示すヘッド構造が考えられる。本へ、ド構造は特開
昭58−128016号公報に記載されており、薄膜素
子基板Iにおいて信号線・端子を設ける側に端部に至る
ほど深くなるテーパ部を設けて可撓性プリント基板2を
接合する構造となっている。このような構造にすると第
4図(b)に示す如く基板表面から50〜100ミクロ
ンの段差が信号線端子部にでき、プリント基板の厚さ分
が逃げる構造となQ読出しヘッド、書置込みヘッドの一
体化も可能となる。しかしこのように薄膜素子基板上に
段差を予め設けて薄膜素子を形成するy−は、薄膜素子
形成技術の特徴である平板上にイλ層する技術からいっ
て必ずしも容易でなく、寸法精度や素子回路の形成の上
でより単純容易化できることが望ましい。To improve the head shown in Fig. 5, Fig. 4 (α) (b)
) is possible. This structure is described in Japanese Patent Application Laid-Open No. 128016/1982, and a thin film element substrate I is provided with a tapered portion that becomes deeper toward the end on the side where signal lines and terminals are provided, thereby forming a flexible printed circuit board. The structure is such that two parts are joined together. With this structure, as shown in Figure 4(b), a step of 50 to 100 microns from the board surface is created at the signal line terminal part, and the thickness of the printed circuit board is removed. It is also possible to integrate the head. However, forming thin film elements by forming steps on the thin film element substrate in advance is not necessarily easy considering the technology of forming a λ layer on a flat plate, which is a feature of thin film element formation technology, and it is difficult to achieve dimensional accuracy. It is desirable to be able to simplify and facilitate the formation of element circuits.
本発明の目的は薄映累子から引出される導体端子とプリ
ント基板端子の接続に関し、基板と同一平面上に接合を
可能として、書込みヘッドと読出しヘッドを簡単に組立
を可能とした、薄膜a気ヘッドを提供することにある。The object of the present invention is to connect a conductor terminal drawn out from a thin film resistor to a printed circuit board terminal, and to provide a thin film a, which enables bonding on the same plane as the board and enables easy assembly of a write head and a read head. The aim is to provide a caring head.
本発明は薄膜素子を形成する場合において、基板表面に
磁性層、絶縁層、電極コイル、信号線端子を積層して形
成しなければならないので信号線端子は基板表面に露出
する。この為にプリント基板を信号線端子接続すると基
板面よりプリント基板が凸となりリードヘッドとライヘ
ッド組込みが不可能である。よってリード/ライトヘッ
ドを一体に組立てるには、素子基板面を合せ面にする必
要があり、その為(はプリント基板面を素子基板面より
低くすることである。In the case of forming a thin film element according to the present invention, a magnetic layer, an insulating layer, an electrode coil, and a signal line terminal must be laminated on the surface of a substrate, so that the signal line terminal is exposed on the surface of the substrate. For this reason, when a printed circuit board is connected to a signal line terminal, the printed circuit board protrudes from the surface of the circuit board, making it impossible to incorporate a read head and a write head. Therefore, in order to assemble the read/write head as one unit, it is necessary to make the element substrate surface the mating surface, and for this reason, the printed circuit board surface must be lower than the element substrate surface.
それには、素子基板面の信号端子面に穴部を設げ、その
穴部にプリント基板端子を挿入することにより基板面よ
り低く位置決めできその後プリント基板端子と穴部の隙
間に軟ろう材を充填して素子基板信号端子とプリント基
板端子を結合する。そして素子基板面を平滑に加工して
合せ面を形成する。To do this, a hole is provided in the signal terminal surface of the element board, and by inserting the printed circuit board terminal into the hole, it can be positioned lower than the board surface.Then, the gap between the printed circuit board terminal and the hole is filled with soft brazing material. and connect the element board signal terminals and the printed circuit board terminals. Then, the element substrate surface is smoothed to form a mating surface.
このように行なうことにより、プリント基板と素子基板
を接合した状態で合せ面が形成でき、リードヘッドとラ
イトヘッドの組込みが従来ヘッドの組込みと同様にでき
ることになる。By doing this, a mating surface can be formed with the printed circuit board and the element substrate bonded together, and the read head and write head can be assembled in the same manner as conventional heads.
以下本発明の一実楕例を第1図により説明する。M1図
(cL)には薄膜素子基板1と可撓性プリント基板(以
下FPCと称す)2の接続された状態を示す。本図で示
す薄膜素子基板1はウェハプロセスで作られた多数のヘ
ッドチップが集積されているもののうち、マルチトラッ
ク薄飄磁気ヘッドの1ブロツクを示している。薄膜素子
5は基板1上に絶縁膜や磁性膜、を極コイル膜をスパッ
タ、メッキ、エツチング、ミーリング等の薄膜形成技術
にて積層、加工を行ない形成されている。導体端子7は
薄膜素子5のコイルと素子導体6を介して継なかってお
r)Cμをメッキして端子が形成されている。 一方可
撓性プリント基板2は通常多数の信号線を効率よ(作製
するにFPeが良く使用されている。FP(、’はポリ
イミドベース上に厚さ10〜15μの薄い導体を接着し
エツチングにて所定の導体幅にni度よく加工した後、
その上に絶縁剤を塗布するかポリイミドカバーを接着し
てFPeを作製する。このようにして作製された薄膜素
子基板1とFPe2を接合する方法の詳細を第1図(b
)(c)に示す。An elliptical example of the present invention will be explained below with reference to FIG. FIG. M1 (cL) shows a state in which a thin film element substrate 1 and a flexible printed circuit board (hereinafter referred to as FPC) 2 are connected. The thin film element substrate 1 shown in this figure shows one block of a multi-track thin film magnetic head out of which a large number of head chips fabricated by a wafer process are integrated. The thin film element 5 is formed by laminating and processing an insulating film, a magnetic film, and a polar coil film on the substrate 1 using thin film forming techniques such as sputtering, plating, etching, and milling. The conductor terminal 7 is not connected to the coil of the thin film element 5 via the element conductor 6, but is formed by plating r) Cμ. On the other hand, for the flexible printed circuit board 2, FPe is often used to efficiently fabricate a large number of signal lines. After processing the conductor to the desired width,
FPe is produced by applying an insulating agent or adhering a polyimide cover thereon. The details of the method of bonding the thin film element substrate 1 and FPe2 fabricated in this way are shown in
) (c).
第1図(h)(C)は(α)図における断面品及び断面
BBを示している。FIGS. 1(h) and 1(C) show the cross-sectional product and cross-section BB in FIG. 1(α).
基板1上に絶縁層q (S:0. )を形成しその上に
素子と一緒に素子導体6を形成する。素子溝。An insulating layer q (S: 0.) is formed on a substrate 1, and an element conductor 6 is formed thereon together with the element. element groove.
体6は所定の幅で形成されたvk隣接素子導体を絶縁す
る為絶縁膜(AI!、 O8) 10を形成する。この
時素子導体6の一部を素子端子7と接合する為にCμm
Cr11もメッキする。次に素子端子7のCtLをメッ
キし、そして隣接端子の絶縁として絶縁膜(A/、 0
. ) 10を形成して素子端子7を得ることができる
。In the body 6, an insulating film (AI!, O8) 10 is formed to insulate the vk adjacent element conductors formed with a predetermined width. At this time, in order to connect a part of the element conductor 6 to the element terminal 7,
Cr11 is also plated. Next, CtL of the element terminal 7 is plated, and an insulating film (A/, 0
.. ) 10 can be formed to obtain the element terminal 7.
素子端子7は約400ミクロイピッチ、端子幅約200
ミクロンにて形成される。その後本発明に必要なFPe
導体8が挿入可能な穴12を素子端子7の中にエツチン
グであけろ。この穴12は幅約100ミクロンとし深さ
は約50〜50ミクロンである。その侵基板表面を仕上
げ加工を行ない端子表面も併せて仕上げる。The element terminal 7 has a pitch of approximately 400 microns and a terminal width of approximately 200 mm.
Formed in microns. After that, FPe necessary for the present invention
Etch a hole 12 into which the conductor 8 can be inserted into the element terminal 7. The hole 12 is approximately 100 microns wide and approximately 50-50 microns deep. The surface of the eroded substrate is finished, and the terminal surface is also finished.
以上の如く述べてきた薄膜形罐工程はフェノ1一基板に
てヘッドチップが集積された状態にて行ない、その後マ
ルチトラック薄膜占気ヘッドとして1ブロツクずつ切り
離して第1図(cL)で示す薄膜素子基板1が作製され
る。1ブロツクづつ切り離す際にはFP(、’接合時の
FPC厚さ分の逃げ段羊部14の加工を併せて行ない、
端子部も同時に断面、υ、に示す如く端子部のCμが露
出する様に段差部の加工を行なう。その後FPC導体端
子8を第1図(A)(c) に示す如く素子導体端子
7の穴部12に抽入して位置決めする。FPC導体端子
8及び素子導体端子7の穴部12のピッチ及び導体幅は
エツチングにて精度よく加工されていること及び穴部1
2がガイドとなることもあって従来の位置決めよりも容
易に行なえることである。The thin film can manufacturing process described above is carried out with the head chips integrated on the phenol substrate, and then the thin film shown in Figure 1 (cL) is cut out one block at a time as a multi-track thin film air-filling head. An element substrate 1 is produced. When separating one block at a time, process the escape step part 14 for the thickness of the FPC at the time of joining.
At the same time, the stepped portion of the terminal portion is processed so that Cμ of the terminal portion is exposed as shown in the cross section υ. Thereafter, the FPC conductor terminal 8 is inserted into the hole 12 of the element conductor terminal 7 and positioned as shown in FIGS. 1(A) and 1(c). The pitch and conductor width of the holes 12 of the FPC conductor terminals 8 and the element conductor terminals 7 must be precisely etched, and the holes 1
2 serves as a guide, which makes positioning easier than conventional positioning.
FPC導体端子8を位置決め後、素子導体端子7の穴部
12には接合する為に軟質ろう材例え(イ半田13を溶
融充填する。このようにして薄膜素子基板1とFPC4
は接合される。第1図(c)には接合状態での断面BB
を示しており、薄膜素子部5は省略し端子接合部のみ描
いである。基板1とFPCaの固定には段差部14で接
着剤15にて固定しFP(、’導体は樹脂又はポリイミ
ドカバーにて覆い絶縁の保護をしている。この後合せ面
を形成する為に、11i膜索子基板1表面を仕上げ加工
を行ないひとつの薄膜ヘッドを形成することができる。After positioning the FPC conductor terminals 8, the holes 12 of the element conductor terminals 7 are melted and filled with soft brazing material (e.g. solder 13) for bonding.In this way, the thin film element substrate 1 and the FPC 4 are
are joined. Figure 1(c) shows the cross section BB in the bonded state.
The thin film element portion 5 is omitted and only the terminal joint portion is depicted. To fix the substrate 1 and the FPCa, use the adhesive 15 at the stepped portion 14 to fix the FP (the conductor is covered with a resin or polyimide cover to protect the insulation. After this, to form a mating surface, One thin film head can be formed by finishing the surface of the 11i film cable substrate 1.
以上述べてきた様なFP(、’接合方法をとることによ
り、ヘッド合せ面を面一に出きり−ドヘッド、ライトヘ
ッドの組立てが容易になること。By using the FP bonding method described above, the head mating surfaces can be made flush, making it easier to assemble the read head and the write head.
又FPC接合の一括多数接合が可能となり接続工数の低
減、充填接合による接合信頼性の向上を図ることができ
る。In addition, it is possible to perform a large number of FPC connections at once, thereby reducing the number of connection steps and improving the reliability of the connections through filling bonding.
従来薄膜素子基板にFPC及びリード線等を接合すると
基板表面よりそれらが凸となる為ヘッド合せ面としての
機能がなくなり、例えばリード/ライトヘッドを一体化
とする磁気テープ装置用ヘッドを組立てる場合、複雑な
ヘッド構造をとらなければならなくなる。Conventionally, when an FPC, lead wires, etc. are bonded to a thin film element substrate, they become convex from the substrate surface and lose their function as a head mating surface.For example, when assembling a head for a magnetic tape device that integrates a read/write head, This necessitates a complicated head structure.
本発明によれば、 FP(、’を薄膜素子基板に接合し
ても基板表面よりFPCは凸とならない構造がとれる為
、基板表面はそのま一ヘッド合せ面として使用でき、従
来通りリード/ライトヘッドを一体化して容易に組立て
ることができる。According to the present invention, even if an FP (,') is bonded to a thin film element substrate, the FPC does not protrude from the substrate surface, so the substrate surface can be used as a head mating surface, and read/write can be performed as before. The head can be integrated and easily assembled.
【図面の簡単な説明】
第1図は本発明の一実施例を示しくα)は薄膜素子基板
とFP(、’の接合状態の外観図、(b)は(α)図に
おけるA−A線断面図、(C)は(α)図におけるB−
B線断面図、第2図(α)は従来実施している薄膜素子
基板と可撓性プリント基板の接合状態外観図、<b>は
その側面図、第゛5図(α)(b)、第4図(α)(b
)は第2図で示した別方法の接合状態外観図とその側面
図である。
1・・・薄膜素子基板
2・・・可撓性プリント基板
5・・・リード線
5・・・薄膜素子
6・・・素子導体
7・・・素子端子
8・・・FP(、’導体端子
9・・・絶縁膜
10・・・絶縁膜
11・・・メッキ
12・・・穴部
15・・・軟質ろう材
14・・・段差
15・・・七吋i旨[Brief Description of the Drawings] Figure 1 shows an embodiment of the present invention, α) is an external view of the bonded state of the thin film element substrate and the FP (,'), and (b) is an A-A in Figure (α). Line sectional view, (C) is B- in (α) diagram
B-line sectional view, Figure 2 (α) is an external view of the conventional bonding state of the thin film element substrate and flexible printed circuit board, <b> is its side view, Figure 5 (α) (b) , Figure 4 (α) (b
) is an external view of the joined state of another method shown in FIG. 2 and a side view thereof. 1...Thin film element substrate 2...Flexible printed circuit board 5...Lead wire 5...Thin film element 6...Element conductor 7...Element terminal 8...FP(, 'Conductor terminal 9... Insulating film 10... Insulating film 11... Plating 12... Hole 15... Soft brazing material 14... Step 15... Seven inches
Claims (1)
て形成してなる薄膜磁気ヘッドにおいて、前記基板と同
一面に可撓性印刷回路基板端子と薄膜素子導体端子の接
合された面が存在し、かつその面がヘッド合せ面を形成
していることを特徴とする薄膜磁気ヘッド。1. In a thin film magnetic head in which a magnetic film, an insulating film, and an electrode coil are formed on a substrate using thin film technology, a surface where a flexible printed circuit board terminal and a thin film element conductor terminal are bonded on the same surface as the substrate. 1. A thin-film magnetic head characterized in that a magnetic head is present, and the surface thereof forms a head mating surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17230385A JPS6233313A (en) | 1985-08-07 | 1985-08-07 | thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17230385A JPS6233313A (en) | 1985-08-07 | 1985-08-07 | thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6233313A true JPS6233313A (en) | 1987-02-13 |
Family
ID=15939421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17230385A Pending JPS6233313A (en) | 1985-08-07 | 1985-08-07 | thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6233313A (en) |
-
1985
- 1985-08-07 JP JP17230385A patent/JPS6233313A/en active Pending
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