JPS6234181U - - Google Patents

Info

Publication number
JPS6234181U
JPS6234181U JP12573085U JP12573085U JPS6234181U JP S6234181 U JPS6234181 U JP S6234181U JP 12573085 U JP12573085 U JP 12573085U JP 12573085 U JP12573085 U JP 12573085U JP S6234181 U JPS6234181 U JP S6234181U
Authority
JP
Japan
Prior art keywords
pump
atmospheric
diaphragm
vacuum pump
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12573085U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12573085U priority Critical patent/JPS6234181U/ja
Publication of JPS6234181U publication Critical patent/JPS6234181U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Description

【図面の簡単な説明】
図面は本考案の実施例の截断側面図である。 1……ポンプケース、2……ダイヤフラム、8
……ポンプ室、9……大気通路、10……大気吸
込経路、11……開閉弁。

Claims (1)

    【実用新案登録請求の範囲】
  1. ポンプケース内に往復動自在のダイヤフラムを
    設け、その往復動で容積が可変するポンプ室を形
    成するようにしたものに於いて、該ポンプ室に大
    気を導入する大気通路をポンプケースに設け、該
    大気通路に接続した大気吸込経路に真空ポンプの
    停止時に開弁される開閉弁を設けたことを特徴と
    するダイヤフラム形真空ポンプ。
JP12573085U 1985-08-19 1985-08-19 Pending JPS6234181U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12573085U JPS6234181U (ja) 1985-08-19 1985-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12573085U JPS6234181U (ja) 1985-08-19 1985-08-19

Publications (1)

Publication Number Publication Date
JPS6234181U true JPS6234181U (ja) 1987-02-28

Family

ID=31018886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12573085U Pending JPS6234181U (ja) 1985-08-19 1985-08-19

Country Status (1)

Country Link
JP (1) JPS6234181U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置

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