JPS6235741U

JPS6235741U -

Info

Publication number: JPS6235741U
Application number: JP12652385U
Authority: JP
Priority date: 1985-08-21
Filing date: 1985-08-21
Publication date: 1987-03-03
Also published as: JPH0236666Y2

Description

[Brief explanation of drawings]

第１〜３図は本考案の搬送装置の実施例を示し
ており、第１図は縦断側面図、第２図は平面図、
第３図は第２図のＡ―Ａ断面図、第４図は搬送装
置の設置状態の１例を示す略平面図、第５〜６図
は従来の搬送装置の１例を示しており、第５図は
平面図、第６図は側面図である。１：加工機、２：搬送機、３：第一腕、４：第
二腕、５：半導体ウエハ、６：置台、７：基台、
８：フレーム、９：円筒体、１０：ベアリング、
１１：大径歯車、１２：モータ、１３：小径歯車
、１４：円筒軸、１５：ベアリング、１６：駆動
軸、１７：段付プーリ、１８：連結具、１９：駆
動用モータ、２０：ブラケツト、２１：ベアリン
グ、２２：回転腕、２３：連結腕、２４：第一連
結軸、２５：ベアリング、２６：段付プーリ、２
７：段付ベルト、２８：第二連結軸、２９：ベア
リング、３０：搬送腕、３１：載置部、３２：ス
ライダ、３３：ガイドレール、３４：ブラケツト
、３５，３６：センサ。 1 to 3 show an embodiment of the conveying device of the present invention, in which FIG. 1 is a vertical side view, FIG. 2 is a plan view,
FIG. 3 is a cross-sectional view taken along the line AA in FIG. 2, FIG. 4 is a schematic plan view showing an example of the installation state of the conveyance device, and FIGS. 5 and 6 show an example of a conventional conveyance device. FIG. 5 is a plan view, and FIG. 6 is a side view. 1: Processing machine, 2: Transfer machine, 3: First arm, 4: Second arm, 5: Semiconductor wafer, 6: Placing table, 7: Base,
8: Frame, 9: Cylindrical body, 10: Bearing,
11: Large diameter gear, 12: Motor, 13: Small diameter gear, 14: Cylindrical shaft, 15: Bearing, 16: Drive shaft, 17: Stepped pulley, 18: Connector, 19: Drive motor, 20: Bracket, 21: Bearing, 22: Rotating arm, 23: Connecting arm, 24: First connecting shaft, 25: Bearing, 26: Stepped pulley, 2
7: Stepped belt, 28: Second connecting shaft, 29: Bearing, 30: Transfer arm, 31: Placement section, 32: Slider, 33: Guide rail, 34: Bracket, 35, 36: Sensor.

Claims

[Scope of utility model registration request]

A rotatable drive shaft is inserted into the inside of a cylindrical shaft that can freely rotate about a vertical line with respect to the base, and a drive wheel is fixed to the upper end of this drive shaft, and the base end of the rotating arm is pivotally attached. The distal end of the rotary arm pivots a first connecting shaft which is suspended and fixed to the lower surface of the proximal end of a connecting arm having the same length as the rotary arm, and the driven wheel fixed to this first connecting shaft and the drive wheel are connected to each other. An endless connecting member is stretched across the vehicle, a second connecting shaft is planted on the upper surface of the distal end of the connecting arm, and the base end of the transport arm, on which the object to be transported can be freely placed, is mounted on the second connecting shaft. The distance between the center of the drive shaft and the center of the first connecting shaft is equal to the distance between the center of the first connecting shaft and the center of the second connecting shaft, and the conveying arm is A conveyance device that is only capable of parallel movement in the length direction along a linear guide provided.