JPS6236074U - - Google Patents
Info
- Publication number
- JPS6236074U JPS6236074U JP1985123245U JP12324585U JPS6236074U JP S6236074 U JPS6236074 U JP S6236074U JP 1985123245 U JP1985123245 U JP 1985123245U JP 12324585 U JP12324585 U JP 12324585U JP S6236074 U JPS6236074 U JP S6236074U
- Authority
- JP
- Japan
- Prior art keywords
- container
- slider
- magnetic material
- attached
- drive shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図はこの考案に係るスライダー駆動装置の
一実施例を示す構成図、第２図は従来のスライダ
ー駆動手段を示す構成図である。
１……成長炉、２……スライダー、３……押棒
、１０……磁性材、１１……収納容器、１２……
スクリユー式駆動軸、１４ｂ……磁石、１７……
スクリユー式駆動装置。
FIG. 1 is a block diagram showing an embodiment of a slider driving device according to this invention, and FIG. 2 is a block diagram showing a conventional slider driving means. 1... Growth furnace, 2... Slider, 3... Push rod, 10... Magnetic material, 11... Storage container, 12...
Screw type drive shaft, 14b...Magnet, 17...
Screw type drive device.
Claims (1)
成長炉内のスライダーに係止している押棒の炉外
端部に磁性材を取り付けるとともに、この磁性材
に磁石を介してスクリユー式駆動軸を連結し、こ
れらを覆うように炉の端部に気密に収納容器を取
り付けるとともに、この容器の他端に上記駆動軸
の駆動装置を気密に取り付けたことを特徴とする
スライダー駆動装置。 A magnetic material is attached to the outer end of the push rod whose tip is secured to a slider in a slide boat liquid-phase epitaxial growth furnace, and a screw type drive shaft is connected to this magnetic material via a magnet. A slider drive device characterized in that a storage container is airtightly attached to an end of the furnace so as to cover the container, and a drive device for the drive shaft is airtightly attached to the other end of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123245U JPS6236074U (en) | 1985-08-10 | 1985-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985123245U JPS6236074U (en) | 1985-08-10 | 1985-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236074U true JPS6236074U (en) | 1987-03-03 |
Family
ID=31014171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985123245U Pending JPS6236074U (en) | 1985-08-10 | 1985-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236074U (en) |
-
1985
- 1985-08-10 JP JP1985123245U patent/JPS6236074U/ja active Pending
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