JPS6236537U - - Google Patents
Info
- Publication number
- JPS6236537U JPS6236537U JP12690185U JP12690185U JPS6236537U JP S6236537 U JPS6236537 U JP S6236537U JP 12690185 U JP12690185 U JP 12690185U JP 12690185 U JP12690185 U JP 12690185U JP S6236537 U JPS6236537 U JP S6236537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck table
- rotates
- holding
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Description
第１図は本考案の１実施例に係るウエハ位置決
めユニツトの平面図、第２図は本考案の実施例の
縦断面図、第３図ａ〜ｄは本考案の実施例を位置
決め動作順序にしたがつて示した平面図である。
１……ウエハ、１ａ……オリエンテーシヨン・
フラツト部、２……チヤツク・テーブル、３……
センタリングピン、４……センサ、５……位置規
定ピン、６……アーム、７……ストツパ、８……
押えピン、９……シリンダ、１０……中心穴、１
１……ノズル、１２……駆動モータ、１３，１５
……電磁バルブ、１４……真空源、１６……圧力
源、１７……穴。
Fig. 1 is a plan view of a wafer positioning unit according to an embodiment of the present invention, Fig. 2 is a longitudinal sectional view of the embodiment of the present invention, and Figs. FIG. 4 is a plan view shown accordingly. 1...Wafer, 1a...Orientation
Flat part, 2...Chick table, 3...
Centering pin, 4...Sensor, 5...Position regulation pin, 6...Arm, 7...Stopper, 8...
Presser pin, 9...Cylinder, 10...Center hole, 1
1... Nozzle, 12... Drive motor, 13, 15
... Solenoid valve, 14 ... Vacuum source, 16 ... Pressure source, 17 ... Hole.
Claims (1)
転を行うチヤツク・テーブルを用いて該ウエハの
オリエンテーシヨン・フラツト部を検出し位置決
めを行う装置において、最終位置決めを行う時に
チヤツク・テーブルからウエハに向つて空気又は
不活性ガスを吹き出すノズルと、ウエハのオリエ
ンテーシヨン・フラツト部に接触して規定するピ
ンが押え側ピンと連動しかつ移動後に機械的に固
定される機構とを有することを特徴とする半導体
ウエハ用位置決めユニツト。 In a device that detects and positions the orientation flat of a semiconductor wafer by using a chuck table that rotates while holding and adsorbing the center of the wafer, the chuck table rotates when the chuck table rotates while holding the center of the wafer. a nozzle for blowing out air or inert gas, and a mechanism in which pins that contact and define the orientation flat portion of the wafer are interlocked with presser side pins and are mechanically fixed after movement. Positioning unit for semiconductor wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690185U JPS6236537U (en) | 1985-08-20 | 1985-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12690185U JPS6236537U (en) | 1985-08-20 | 1985-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236537U true JPS6236537U (en) | 1987-03-04 |
Family
ID=31021140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12690185U Pending JPS6236537U (en) | 1985-08-20 | 1985-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236537U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0564784U (en) * | 1992-02-05 | 1993-08-27 | 株式会社東京精密 | Pressure application stage for pressure element measurement |
-
1985
- 1985-08-20 JP JP12690185U patent/JPS6236537U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0564784U (en) * | 1992-02-05 | 1993-08-27 | 株式会社東京精密 | Pressure application stage for pressure element measurement |