JPS6236539U - - Google Patents
Info
- Publication number
- JPS6236539U JPS6236539U JP12840785U JP12840785U JPS6236539U JP S6236539 U JPS6236539 U JP S6236539U JP 12840785 U JP12840785 U JP 12840785U JP 12840785 U JP12840785 U JP 12840785U JP S6236539 U JPS6236539 U JP S6236539U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- pair
- side plates
- connecting plate
- suspended portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012993 chemical processing Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000012545 processing Methods 0.000 claims 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はこの考案の一実施例を示す斜視図、第
２図は従来の化学処理治具を示す斜視図である。
図において、１はウエハ、２は側板、３は溝、
４，５はいずれも結合板、６ａは懸架部分である
。なお、各図中同一符号は同一または相当部分を
示す。
FIG. 1 is a perspective view showing an embodiment of this invention, and FIG. 2 is a perspective view showing a conventional chemical processing jig. In the figure, 1 is a wafer, 2 is a side plate, 3 is a groove,
4 and 5 are both connecting plates, and 6a is a suspension portion. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
配置された一対の側板と 前記一対の側板をつなぐ前記溝に平行な結合板
と 前記一対の側板に設けられた懸架部分とを 備え、前記懸架部分は、前記溝近傍の処理液の流
れを妨げないようになつていることを特徴とする
化学処理治具。[Claims for Utility Model Registration] A pair of side plates in which a groove for holding a wafer is cut and arranged to face each other, a connecting plate parallel to the groove connecting the pair of side plates, and a connecting plate provided in the pair of side plates. 1. A chemical processing jig, comprising: a suspended portion, wherein the suspended portion does not obstruct the flow of processing liquid in the vicinity of the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12840785U JPS6236539U (en) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12840785U JPS6236539U (en) | 1985-08-21 | 1985-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6236539U true JPS6236539U (en) | 1987-03-04 |
Family
ID=31024045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12840785U Pending JPS6236539U (en) | 1985-08-21 | 1985-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236539U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232948A (en) * | 1988-03-31 | 1990-02-02 | Toppan Printing Co Ltd | career |
-
1985
- 1985-08-21 JP JP12840785U patent/JPS6236539U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0232948A (en) * | 1988-03-31 | 1990-02-02 | Toppan Printing Co Ltd | career |
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