JPS6236539U - - Google Patents

Info

Publication number
JPS6236539U
JPS6236539U JP12840785U JP12840785U JPS6236539U JP S6236539 U JPS6236539 U JP S6236539U JP 12840785 U JP12840785 U JP 12840785U JP 12840785 U JP12840785 U JP 12840785U JP S6236539 U JPS6236539 U JP S6236539U
Authority
JP
Japan
Prior art keywords
groove
pair
side plates
connecting plate
suspended portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12840785U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12840785U priority Critical patent/JPS6236539U/ja
Publication of JPS6236539U publication Critical patent/JPS6236539U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第1図はこの考案の一実施例を示す斜視図、第
2図は従来の化学処理治具を示す斜視図である。 図において、1はウエハ、2は側板、3は溝、
4,5はいずれも結合板、6aは懸架部分である
。なお、各図中同一符号は同一または相当部分を
示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 ウエハを保持するための溝が切られ、対向して
    配置された一対の側板と 前記一対の側板をつなぐ前記溝に平行な結合板
    と 前記一対の側板に設けられた懸架部分とを 備え、前記懸架部分は、前記溝近傍の処理液の流
    れを妨げないようになつていることを特徴とする
    化学処理治具。
JP12840785U 1985-08-21 1985-08-21 Pending JPS6236539U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12840785U JPS6236539U (ja) 1985-08-21 1985-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12840785U JPS6236539U (ja) 1985-08-21 1985-08-21

Publications (1)

Publication Number Publication Date
JPS6236539U true JPS6236539U (ja) 1987-03-04

Family

ID=31024045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12840785U Pending JPS6236539U (ja) 1985-08-21 1985-08-21

Country Status (1)

Country Link
JP (1) JPS6236539U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232948A (ja) * 1988-03-31 1990-02-02 Toppan Printing Co Ltd キャリア

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232948A (ja) * 1988-03-31 1990-02-02 Toppan Printing Co Ltd キャリア

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