JPS6237366A - Resistance heating vacuum evaporation equipment - Google Patents

Abstract

PURPOSE:To form a uniform vapor deposited film having no relation to the positional deviation of the evaporation holes of a boat on the surface of a material for vapor deposition by attaching a cover having the evaporation holes to the parts facing the vapor deposition holes of the boat for housing an evaporating material of a resistance heating and vacuum deposition device and subjecting the same to resistance heating by electrical conduction. CONSTITUTION:The boat 2 into which a vapor deposition material 1 is put and which has the evaporation holes 2a is fixed to an electrode 3 for heating the boat by means of screws 4. The cover 5 formed with the evaporation holes 5a in the parts facing the holes 2a of the boat 2 is disposed in proximity to the boat 2. One end of the cover 5 is positioned by means of a pin 7 to an electrode 6 for heating and is fixed by mounting screws 8. The other end is formed with a long groove 5b for sliding and is positioned by a pin 9. The cover 5 having the holes 5a is disposed in proximity to the holes 2a of the boat 2 in the above-mentioned manner, than even if there is the positional deviation in the mounting of the boat 2, the evaporation direction 13 of the evaporating material is determined by the holes 5a of the cover 5 and the vapor deposited film having no variance in the thickness of the material for vapor deposition is formed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a resistance heating vacuum deposition apparatus, and particularly to a structure for forming a deposited film of uniform thickness.

[Background of the invention]

As a method for making the thickness of the deposited film uniform, a method is known in which a window proportional to the circumferential speed is formed in a revolving jig or a rotating body (Japanese Patent Publications No. 31829/1982 and Japanese Patent Publication No. 55/1983).
No. 27624), all of these have a control function on the side of the object to be deposited. The present invention is directed to the evaporated matter side.

2. Description of the Related Art Conventionally, as a resistance heating vacuum evaporation apparatus, those shown in FIGS. 1 and 2, for example, are known. The boat 2 containing the evaporated material 1 is fixed to the boat heating electrode 3 with a mounting screw 4, and by applying electricity to the boat heating electrode 3 and heating it resistance, the evaporated material 1 is released from the evaporation hole 2a of the boat 2. Evaporates toward the object to be evaporated. At this time, if the relative positional relationship between the evaporation hole 2a of the boat 2 and the object to be evaporated is misaligned, it will directly affect the variation in the thickness of the evaporated film of the object to be evaporated.

Therefore, in order to eliminate variations in the deposited film thickness, the boat 2
A positioning hole is formed in the positioning hole, a positioning pin is inserted into the positioning hole to position the boat 2, and the boat 2 is fixed to the boat heating electrode 3.

However, &-)2 requires electrical resistance for resistance heating, and the volume is determined by the filling amount of evaporated material 1, so yN
- The plate thickness of the plate 2 is normally about 0.1 mm, and the use of positioning pins or the like will deform the positioning holes and is not a good idea.

[Purpose of the invention]

SUMMARY OF THE INVENTION An object of the present invention is to provide a resistance heating vacuum evaporation apparatus that can obtain a uniform evaporated film regardless of a one-rffi deviation in the evaporation hole of a boat.

[Summary of the invention]

According to one embodiment of the present invention, a cover having evaporation holes in a portion of the boat opposite to the evaporation holes is positioned approximately on the boat, and this cover is resistance heated by a Cummer heating electrode.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIGS. 3 to 5. Note that the same or equivalent members as in FIGS. 1 and 2 are given the same reference numerals, and their explanations will be omitted. The evaporation hole 2a of the boat 2 is formed to be larger than a predetermined size. A force/ζ-5 is arranged close to this boat 2, and a cover 5
There is an evaporation hole 5a in the part opposite to the evaporation hole 2a of the boat 2.
is formed. This evaporation hole 5a is formed to have a predetermined size smaller than the evaporation hole 2a of the boat 2. Kakka-5
One end of the heating electrode 6 is positioned at pin/7 and fixed with a mounting screw 8. A long groove 5b is formed at the other end of the cover 5 so that it can slide.
The bottle 9 is inserted and positioned, and is fixed to the cover heating electrode 11 with a mounting screw 12 via a sliding connector 10.

In this way, yf? -) Evaporation hole 5a'f of a predetermined size close to the evaporation hole 2a of 2! r: Since the cover 5 is arranged with Film thickness variations can be reduced. Moreover, since the cover 5 can be shaped into any shape, its strength can be increased by making it partially thicker, thereby eliminating restrictions on plate thickness. In addition, since the cover 5 is resistance heated by the cover heating electrode 6.11, the temperature of the cap 5 can be raised to a constant temperature, and when the evaporated material 1 passes through the evaporation hole 5a of the cover 5, It is possible to prevent a large amount of vapor from being deposited around 5a. Furthermore, by providing a structure in which one end of the cover 5 can be slid as in the embodiment, deformation of the cover 5 due to thermal expansion during heating can be prevented.
The positional reproducibility of the evaporation holes 5a can be made with high precision.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, a cover having an evaporation hole in the portion facing the evaporation hole of the boat is positioned close to the gate, and this cover is used for heating the cover. Since resistance heating is performed at lt and ffl, a uniform evaporated film can be obtained regardless of the positional deviation of the evaporation hole of the boat.

[Brief explanation of the drawing]

FIG. 1 is a top view of the conventional example, FIG. 2 is a cross-sectional view of FIG. 1, FIG. 3 is a top view of an embodiment of the present invention, FIG. The figure is an enlarged sectional view showing the relationship between the evaporation holes of the boat and the evaporation holes of the cover. 1... Evaporated matter, 2... Boat, 2a.
...Evaporation hole, 3...Boat heating electrode, 4...
・Mounting screw, 5...Crack-15a...Evaporation hole,
6...Cover heating electrode, 7...Bin, 8...Mounting screw, 9...Bin, 1
0...Slide connector, 11...Cover heating electrode, 12...Mounting screw. \ko/ Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] In the resistance heating vacuum evaporation apparatus, in which a boat containing evaporated material is fixed to a boat heating electrode, and the evaporated material evaporates from an evaporation hole of the boat toward the object to be evaporated by applying electricity to the boat heating electrode to perform resistance heating. A resistor comprising: a cover disposed close to a boat and having an evaporation hole in a portion facing the evaporation hole of the boat to determine the evaporation position; and a cover heating electrode for resistance heating the cover. Heating vacuum evaporation equipment.